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3-Axis NanoMax™ Flexure Stages![]()
MAX313D Differential Micrometers MAX302 No Actuators RB13P1 Additional Top Plate for US Patents 6,186,016 and 6,467,762 MAX381 Stepper Motor Actuators, Closed-Loop Piezo Operation Related Items ![]() Please Wait ![]() APY002 Pitch & Yaw Stage can be mounted on a 3-axis flexure stage in place of the regular top plate, enabling ![]() 3-Axis Flexure Stage Mounted Directly to a PY004 High-Load Pitch and Yaw Stage for 5-Axis Control Features
Thorlabs' 3-axis NanoMax Flexure Stages are ideal for use in fiber launch systems or applications that require sub-micron resolution. The parallel flexure design ensures precise, smooth, continuous motions with negligible friction. Each unit provides 4 mm of X, Y , and Z travel with a maximum load capacity of 1 kg. The nominal deck height of the stage is 62.5 mm, which matches that of our 3-Axis MicroBlock compact flexure stages and RollerBlock long travel stages. Adapter plates are available for mounting our NanoMax stages to a wide range of other Thorlabs rotation and long travel linear stages. Precision Drives ![]() HCS013 Objective Mount and HFF001 Quick-Release Fiber Clamp Accessories Attached to the Top Plate Using AM010 Cleats for Fiber Launch Applications Piezo Options ![]() Click to Enlarge Piezo and Feedback Connections Stages with open-loop piezo actuators do not have a strain gauge displacement sensor and are ideal for applications requiring positioning resolution down to 20 nm. Versions with closed-loop piezo actuators have internal strain gauge displacement sensors that provide a feedback voltage signal that is linearly proportional to the displacement of the piezoelectric element. This feedback signal increases the resolution to 5 nm and can be used to compensate for the hysteresis, creep, and thermal drift that is inherent in all piezoelectric elements, making these stages an excellent choice for applications requiring nanometer resolution. Please note that the piezo mechanism uses contact with the micrometer drives in order to move the top platform. If for any reason the stage is operated with the micrometer drives removed, blanking plugs must be fitted before the piezo actuators can function. To order blanking plugs, please contact Tech Support. Easy Alignment of Accessories
Stage Specifications
Differential Micrometer Specifications
Arcuate Cross Talk SpecificationsThe measured maximum cross talk to the Z axis, when a movement is demanded in X or Y is <88 µm.
The measured maximum cross talk to the X and Y axes, when a movement is demanded in Z is <66 µm.
Removing the Actuators
![]() Click to Enlarge Step 1 Rotate the Actuator Counterclockwise to Disengage the Actuator from the Platform Modular Drive OptionsAll 3-Axis NanoMax system have a modular design that allows the drives to be removed and replaced at any time. This allows for mix-and-match customization of actuators depending on the amount of automation or resolution needed on each axis. Replacing a drive is simple and can be done in three steps. First, retract the leadscrew of the actuator until it is no longer engaging the moving body of the stage. Then unscrew the knurled knob attaching the existing drive to the stage. Finally, attach the new drive to the stage using the same knurled knob. The drives compatible with our 3-axis NanoMax stages are summarized below. Some drives have limited travel range when used with the NanoMax 3-axis flexure stages; see the table for more details. For more detailed information on each drive, please see the full presentation for our Stepper Motor Drive, Differential Micrometers and Thumbscrew Drives, or In-line Piezo Actuators.
Displacement Sensor7-Pin LEMO MaleMAX311D, MAX381, MAX301 ![]()
Piezo Drive InputSMC MaleMAX311D, MAX312D, MAX381, MAX301, MAX302 Nominal Maximum Input Voltage: 75 V DRV208 Stepper Motor Connector PinsD-Type MaleMAX381, MAX383
Multi-Axis Stage Selection Guide![]() Click to Enlarge In the above application, a 3-Axis NanoMax flexure stage is aligned in front of a 6-axis stage at the proper 112.5 mm deck height using an AMA554 Height Adapter. 3-Axis Stages 4- and 5-Axis Stages 6-Axis Stages A complete selection and comparison of our multi-axis stages is available below.
3-Axis Stages
4-Axis Stages
5-Axis Stages
6-Axis Stages
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Thorlabs' NanoMax Stages with Differential Adjusters provide 4 mm of coarse travel and 300 µm of fine travel. The coarse adjuster has a Vernier scale with 10 µm graduations while the fine adjuster has a Vernier scale with 1 µm graduations. This resolution and travel range make these stages ideal for optimizing the coupling efficiency in a fiber alignment or waveguide positioning system. The graduations also allow for a clear reference point for absolute positioning within a system. The modular design of the included drives allows them to be replaced at any time; please see the Drives tab for more details and our full selection of compatible actuators. ![]() Click to Enlarge MAX311D 3-Axis Stage with a PY005/M 5-Axis Stage, PY005A2/M Base, and MMP1/M Top Plate for Fiber Coupling In addition to the features above, the MAX312D and MAX311D NanoMax Stages incorporate open- and closed-loop piezoelectric actuators, respectively, with 20 µm of travel. The open-loop design does not contain an internal strain gauge sensor, limiting the resolution to 20 nm. The addition of a strain gauge sensor in the closed-loop feedback design increases the resolution to 5 nm. This feedback loop is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. These piezo stages include three PAA100 Drive Cables and, in the case of closed-loop systems, three PAA622 Feedback Converter Cables. Imperial stages come with an MMP1 top plate and two AMA010 mounting cleats, while metric stages come with an MMP1/M top plate and two AMA010/M mounting cleats. These mounting plates contain a central keyway that allows for easy and repeatable alignment of all of the accessories listed in the overview. If off-center or breadboard mounting is necessary, we also offer the RB13P1 Top Plate. ![]()
Thorlabs' NanoMax Stages with Stepper Motor Actuators provide 4 mm of travel along each axis. The actuators can achieve a bidirectional repeatability of 5.0 µm. Hall effect limit switches provide a high repeatability ideal for homing the motors. This is critical for auto-alignment applications that rely on a highly repeatable zero point. The high repeatability and small step size make these stages ideal for any high-precision automated fiber launch system or general application. The modular design of the included drives allows them to be replaced at any time; please see the Drives tab for more details and our full selection of compatible actuators. Each stage also includes three PAA613 3 m extension cables for the stepper motor actuators. In addition to the features above, the MAX381 NanoMax Stage offers closed-loop piezoelectric actuators that have a 20 µm travel range. The closed-loop piezo actuators have strain gauge displacement sensors that provide a feedback signal allowing for a resolution up to 5 nm. This feedback loop is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. A 500 mm (19.7") drive cable is attached to each stepper motor actuator. The MAX381 stage also includes three PAA100 Piezo Drive Cables and, in the case of closed-loop systems, three PAA622 Feedback Converter Cables. Imperial stages come with an MMP1 top plate and two AMA010 mounting cleats, while metric stages come with an MMP1/M top plate and two AMA010/M mounting cleats. The mounting plates contain a central keyway that allows for easy and repeatable alignment of all of the accessories listed in the Overview tab. If off-center or breadboard mounting is necessary, we also offer the RB13P1 Top Plate. ![]() ![]() Click to Enlarge MAX301 with a Stepper Motor, Thumbscrew, and Differential Actuator Attached to the X, Y, and Z Axis, Respectively
Thorlabs' NanoMax Stages Without Included Actuators are ideal for customizing the type of drive that will be installed on each axis. This allows each axis to be configured depending on the precision or automation needed. Whether the application is a multimode fiber launch system using thumbscrews or an automated alignment setup using stepper motor actuators, each axis can be configured to meet the demand. For a list of all compatible actuators, please see the Drives tab. In addition to the features above, the MAX302 and MAX301 NanoMax Stages offer open- and closed-loop piezoelectric actuators, respectively, with 20 µm of travel. The open-loop design does not contain an internal strain gauge sensor, limiting the resolution to 20 nm. The addition of a strain gauge sensor in the closed-loop feedback design increases the resolution to 5 nm. This feedback loop is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. These piezo stages include three PAA100 Drive Cables and, in the case of closed-loop systems, three PAA622 Feedback Converter Cables. Imperial stages come with an MMP1 top plate and two AMA010 mounting cleats, while metric stages come with an MMP1/M top plate and two AMA010/M mounting cleats. These mounting plates contain a central keyway that allows for easy and repeatable alignment of all of the accessories listed in the overview. If off-center or breadboard mounting is necessary, we also offer the RB13P1 Top Plate. ![]() ![]() Click to Enlarge RB13P1 Top Plate Shown Replacing the MMP1 Crossed Groove Mounting Plate on an MAX311D Flexure Stage
The RB13P1(/M) Adapter Plate is designed as a replacement option for the standard MMP1(/M) grooved top plate sold with the stages above. Four counterbores that accept M3 screws allow it to be attached to the above stages. The 2.36" x 2.36" mounting surface is the same as the MMP1(/M) top plate that is included with the above stages. For complete details on the dimensions and tap locations of this top plate, please see the mechanical drawings below. The MMP1(/M) Top Plate is included with the stages sold above but can be purchased separately as well. This plate features two 3 mm wide central keyways in a crossed pattern to allow for rapid configuration while maintaining accessory alignment, making this plate ideal for fiber launch applications. This "crossed groove" design allows for the NanoMax stages to be used in a left- or right-handed configuration. The plate also contains an array of 4-40 (M2), 6-32 (M3), and 8-32 (M4) tapped mounting holes for securing and mounting various components. For complete details on the dimensions and tap locations of this plate, please see the mechanical drawings. | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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