"; _cf_contextpath=""; _cf_ajaxscriptsrc="/cfthorscripts/ajax"; _cf_jsonprefix='//'; _cf_websocket_port=8578; _cf_flash_policy_port=1244; _cf_clientid='6C6E3DCD698E5EE63D43852C5259BE49';/* ]]> */
| ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
6-Axis NanoMax™ NanoPositioning Flexure Stages![]()
MAX609 No Actuators, MAX603D Differential Micrometers US Patent 6,467,762 MAX683 Stepper Motors ![]() Please Wait ![]() Click to Enlarge In the Above Application, a 3-Axis NanoMax Flexure Stage is Aligned in Front of a 6-Axis Stage at the Proper 112.5 mm Deck Height Using an AMA554 Height Adapter Features
Thorlabs' 6-axis NanoMax™ Nanopositioning Flexure Stages are ideal for use in fiber launch systems or applications that require sub-micron resolution. Each unit provides 4 mm (0.16") of X, Y, and Z travel and 6° (105 mrad) of θx, θy, and θz travel with a maximum load capacity of 1 kg (2.2 lbs). Versions are available with or without preconfigured piezo actuators and differential or stepper motor actuators. The nominal deck height of the stage is 112.5 mm (4.43"), which matches that of our 112.5 mm tall 5-axis stage kits. Adapter plates are available for increasing the 62.5 mm deck height of our 3-axis and 4-axis flexure stages to 112.5 mm, enabling compatibility with our 6-axis stages. The parallel flexure design ensures precise, smooth, continuous motions with negligible friction. For complex, multi-axis positioning, parallel flexure stages that incorporate three or more degrees of freedom into a single compact unit provide significantly improved performance over serialized stacks of translation stages. See the Design Features tab for more information. A powerful tool for nanopositioning, our 6-axis NanoMax stages offer two innovative features: a common point of rotation and a patented design that allows all actuators to be coupled directly to the base to minimize any unwanted motion in the system. ![]() Click to Enlarge The tip of a removable stainless steel probe marks the stage's common pivot point for all rotational axes. ![]() Click to Enlarge In this Fiber Coupling Application, a Laser Diode is Mounted in Front of a 6-Axis Stage Using an AMA029D Extension Platform Common Point of Rotation Precision Drives Piezo Options Stages with open-loop piezo actuators do not have a strain gauge displacement sensor and are ideal for applications requiring positioning resolution down to 20 nm. Versions with closed-loop piezo actuators have internal strain gauge displacement sensors that provide a feedback voltage signal that is linearly proportional to the displacement of the piezoelectric element. This feedback signal increases the resolution to 5 nm and can be used to compensate for the hysteresis, creep, and thermal drift that is inherent in all piezoelectric elements, making these stages an excellent choice for applications requiring nanometer resolution. Please note that the piezo mechanism uses contact with the micrometer drives in order to move the top platform. If for any reason the stage is operated with the micrometer drives removed, blanking plugs must be fitted before the piezo actuators can function. To order blanking plugs, please contact Tech Support. Easy Alignment of Accessories
Stage Specifications
Differential Micrometer Specifications
Stepper Motor Specifications
Resonant Frequencies
Removing the Actuators
![]() Click to Enlarge Step 2: Unscrew the knurled Knob and Remove the Actuator ![]() Click to Enlarge Step 1: Rotate the actuator counterclockwise to disengage the actuator from the platform. Modular Drive OptionsAll 6-Axis NanoMax systems have a modular design that allows the drives to be removed and replaced at any time. This allows for mix-and-match customization of actuators depending on the amount of automation or resolution needed on each axis. Replacing a drive is simple and can be done in three steps. First, retract the leadscrew of the actuator until it is no longer engaging the moving body of the stage. Then unscrew the knurled knob attaching the existing drive to the stage. Finally, attach the new drive to the stage using the same knurled knob. The drives compatible with our 6-axis NanoMax stages are summarized below. While some drives have longer travel ranges, in all cases the NanoMax 6-axis stages have a travel range of 4 mm in X, Y, and Z and 6° of roll, pitch, and yaw. For more detailed information on each drive, please see the full presentation for our Stepper Motor Drive, Differential Micrometers and Thumbscrew Drives, or In-line Piezo Actuators.
Displacement Sensor7-Pin LEMO Male MAX603D(/M), MAX683(/M), MAX609(L)(/M)
Piezo Drive InputSMC Male MAX602D(/M), MAX603D(/M), Nominal Maximum Input Voltage: 75 V DRV208 Stepper Motor Connector PinsD-Type Male MAX681(/M), MAX682(/M), MAX683(/M)
6-Axis NanoMax Design FeaturesPatented Parallel Flexure Design![]() Click to Enlarge Figure 1: Simplified Parallel Flexure Schematic Parallel Flexure Platforms The parallel flexure design of the moving platform provides an unmatched combination of high stability and resolution in a six-axis nanopositioner. The mechanical stiffness is an order of magnitude higher than traditional serial flexure designs. In addition to those already mentioned, there are several other intrinsic advantages of the parallel flexure design: a much lower working height compared to stacked axis stages, additional resistance to external forces, and significant improvements to damping capabilities. Also, since there are fewer moving parts, there is a reduction in the inertia of the moving platform. This leads to excellent dynamic performance, making this product ideal for fast automated alignments. This design also solves the problem of error buildup commonly seen in stacked (serial) designs as discussed below. It is important to note that parallel flexures, like serial flexures, exhibit crosstalk or arcuate motion. As a stage is moved to either side of its central position, transverse arcuate displacements of approximately 20 μm per millimeter of travel occur. If several axes are moved at once, the combined effect can be greater; however, unlike the random positioning errors found in traditional stages, this crosstalk is highly predictable and hence can be corrected via small adjustments. Although these arcuate displacements are sometimes a concern, they rarely hinder the alignment of fibers or other optical components since optical beams rarely propagate collinearly with the axes of any stage to better than the scale of the arcuate motion. Furthermore, when using a NanoTrak™ Auto-Alignment Controller, these effects are automatically compensated for by the controller itself. However, if arcuate motion is a limiting parameter of a particular alignment or positioning application, its effects can also be compensated for with software. ![]() Click to Enlarge Figure 2: Simplified Stacked (Serial) Flexure Schematic Traditional, Stacked (Serial) Multi-Axis Platforms All traditional designs of multi-axis stages (e.g., roller bearings, ball bearings, or flexures) suffer from the buildup of errors as stages are stacked. For a simple stacking of two stages, two main errors must be considered: cosine and Abbe. The cosine error arises when the axes of two stages are not aligned orthogonally to each other. The Abbe error arises from the finite height of the upper stage. Any angular roll, pitch, or yaw errors in the lower stage will be amplified by the overall height of the stacked system. The situation is particularly pronounced for a six-axis stage, where the mechanism providing the sixth degree of freedom is stacked atop five other stages. All of the errors in the preceding stages combine to make the overall volumetric accuracy of the complete stack far worse than the errors associated with any individual stage. A parallel platform design solves the problem of error buildup. The design intent was to conceive the flexure as a rigid rod that has a flexible coupling at each end, leading to exactly two rotational degrees of freedom. This rod structure constrains the motion of the top plate by connecting it to the base. Six such rods provide the six independent constraints needed to restrain the stage, neither over- nor under-constraining it. To actuate movement in the top plate, the ends of the flexure rods not attached to the top plate are connected to linear actuators. Linear translation occurs by moving the appropriate pairs of flexure rods in the same direction, whereas rotation occurs by moving the appropriate pairs of rods in opposite directions.
Reduced Part Count, Low Maintenance, and Long LifetimeTo transmit motion accurately, it has been shown that it is preferable to have as few moving parts acting in series as possible. At each interface between parts, microscopic imperfections can exist which will create friction between the parts. Such friction tends to be unpredictable and uncontrollable, making it the most undesirable element of any high-performance design. Parallel flexure platforms have very few moving parts and can transmit motion very precisely. Tests performed over 30 μm in 1 μm steps have yielded a root-mean-square bidirectional repeatability of 30 nm, or 0.1% of full range for the 6-axis NanoMax stages. These results are made possible by the inherently superior performance of the parallel flexure mechanism that eliminates static and kinematic friction within the platform. During operation, 6-axis NanoMax platforms do not suffer appreciably from wear and tear due to the minimal number of moving parts. Since there are no bearings in the moving parts, there is no degradation of positioning performance with time. This also reduces the maintenance costs since the only parts that may require servicing are the drive actuators. Moreover, setups do not need to be completely disturbed for stage maintenance. Drives can be very easily and quickly swapped, minimizing system down time and inconvenience. However, when the actuator is removed the platform will move from its position.
Common Pivot Point for All Rotation Axes![]() Click to Enlarge Figure 3: The tip of a removable stainless steel probe marks the stage's common pivot point for all rotational axes. Click here to see the mechanical drawing indicating the common pivot point. ![]() Click for Details Figure 4: The stainless steel probe can be removed at any time by loosening the knurled knob on the front of the stage A unique mechanical feature of the 6-Axis NanoMax stages is the addition of a single common pivot point, shown in Figure 3, for all three of the rotation axes (θx, θy, θz) to simplify any alignment challenge. In practical terms, this means that the need to compensate lateral movement is nearly eliminated when making rotational adjustments to any axis. For complex alignments of planar optical devices this can vastly reduce the time required for optimizing a system. Usually a fiber holder is attached so that the tip of the fiber is held at the common rotation point with all of the attached adjusters at the middle of their translation range. For instructions on positioning the top plate please see page 13 of the manual. If the moving platform is translated from its midpoint, the pivot point also moves relative to the base, retaining its position relative to the moving platform. Once the mounted accessories are aligned on the platform, the stainless steel probe can be removed by loosening the knob on the front of the unit, as shown in Figure 4.
Fixed, Modular, High-Resolution Actuators![]() Click to Enlarge Figure 5: 6-axis stage configured with various actuators. Please see the Drives tab for all options. All actuators are connected directly to the base of the system rather than the moving top plate, thus minimizing unwanted motion within the system. Consequently, during manual operation, this allows operators to achieve a higher resolution with less skill. In motorized and automated applications, actuator vibration and shocks have little effect on the moving top plate. The modular design of our 6-axis NanoMax stages allows the drives to be removed and replaced at any time. This allows for mix-and-match customization of actuators depending on the amount of automation or resolution needed on each axis. Thorlabs offers a number of drive options including fine-thread thumbscrews, differential micrometers, motorized actuators, and piezo extenders. Figure 5 shows various drive options attached to different axes. This modularity allows the stage to be highly versatile for all applications. Versions are also available that have internal piezoelectric actuators giving 30 μm of travel with resolutions down to 1.0 nm, either open-loop or with strain gauge position feedback (closed loop). For increased performance and stability, the drive voltages are also controlled by built-in circuitry to compensate for thermal variations. For all of our compatible drive options, please see the Drives tab. Pre-configured stages are also offered that have differential micrometers or stepper motor actuators for out-of-the-box manual or motorized operation, respectively.
Low Platform Height and Keyway Accessory Alignment![]() Click to Enlarge Figure 7: In the Above Application, a 3-Axis MicroBlock Compact Flexure Stage is Aligned in Front of a 6-Axis Stage at the Proper 112.5 mm Deck Height Using an AMA554 Height Adapter ![]() Click to Enlarge Figure 6: In the Above Application, a 3-Axis NanoMax Flexure Stage is Aligned in Front of a 6-Axis Stage at the Proper 112.5 mm Deck Height Using an AMA554 Height Adapter Thorlabs' 6-axis stages have a low platform height of 112.5 mm (4.43") for increased stability. This height also makes the 6-axis stage compatible with our 112.5 mm tall 5-axis stage kits. As shown in Figures 6 and 7, adapter plates are available for increasing the 62.5 mm deck height of our 3-axis and 4-axis flexure stages to 112.5 mm, enabling compatibility with our 6-axis stages. A central keyway in the top platform allow for rapid system reconfiguration while maintaining accessory alignment. A wide range of accessories is available to mount items such as microscope objectives, collimation packages, wave guides, fiber, and much more.
Multi-Axis Stage Selection Guide![]() Click to Enlarge In the above application, a 3-Axis NanoMax flexure stage is aligned in front of a 6-axis stage at the proper 112.5 mm deck height using an AMA554 Height Adapter. 3-Axis Stages 4- and 5-Axis Stages 6-Axis Stages A complete selection and comparison of our multi-axis stages is available below.
3-Axis Stages
4-Axis Stages
5-Axis Stages
6-Axis Stages
![]()
Thorlabs' 6-Axis NanoMax stages with Differential Adjusters provide 4 mm (0.16") of coarse X, Y, and Z travel with 300 µm of fine travel. They also provide 6° (105 mrad) of θx, θy, and θz (Roll, Pitch, and Yaw) Travel with 18 arcmin (5.2 mrad) of fine travel. The coarse adjuster has a Vernier scale with 10 µm graduations for a resolution of 5 µm. The fine adjuster has a Vernier scale with 1 µm graduations allowing for a resolution of 0.5 µm. This resolution and travel range make these stages ideal for optimizing the coupling efficiency in a fiber alignment or waveguide positioning system. The graduations also allow for a clear reference point for absolute positioning within a system. Please note that for the X- and Y-axis 1 mm of micrometer travel will translate to 1.5 mm of stage travel. Please see page 10 of the manual for more information. The modular design of the included drives allows them to be replaced at any time; please see the Drives tab for more details and our full selection of compatible actuators. In addition to the features above, the MAX602D(/M) and MAX603D(/M) NanoMax Stages incorporate open- and closed-loop piezoelectric actuators, respectively, with 30 µm of travel. The open-loop design does not contain an internal strain gauge sensor. The theoretical resolution of the piezo actuators is 1.0 nm for the X-, Y-, and Z-axis and 0.018 µrad for the θx, θy, and θz rotational axes. This feedback loop created when using our closed loop system is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. These piezo stages include six PAA100 Drive Cables and, in the case of closed-loop systems, six PAA622 Feedback Converter Cables. ![]()
Thorlabs' 6-Axis NanoMax Stages with stepper motor actuators provide 4 mm (0.16") of X, Y, and Z travel and 6° (105 mrad) of θx, θy, θz (Roll, Pitch, and Yaw) travel. The actuators can achieve a bidirectional repeatability of 5.0 µm. Hall effect limit switches provide a high repeatability ideal for homing the motors. This is critical for auto alignment applications that rely on a highly repeatable zero point. The high repeatability and small step size make these stages ideal for any high-precision automated fiber launch system or general application. The modular design of the included drives allows them to be replaced at any time; please see the Drives tab for more details and our full selection of compatible actuators. Each stage also includes six PAA613 3 m extension cables for the stepper motor actuators. In addition to the features above, the MAX682(/M) and MAX683(/M) NanoMax Stages incorporate open- and closed-loop piezoelectric actuators, respectively, with 30 µm of travel. The open-loop design does not contain an internal strain gauge sensor. The theoretical resolution of the piezo actuators is 1.0 nm for the X-, Y-, and Z-axis and 0.018 µrad for the θx, θy, and θz rotational axes. This feedback loop created when using our closed loop system is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. These piezo stages also include six PAA100 Drive Cables and, in the case of closed-loop systems, six PAA622 Feedback Converter Cables. ![]()
![]() Click to Enlarge 6-Axis Stage configured with various actuators. Please see the Drives tab for all options. Thorlabs' 6-axis NanoMax stages, which are designed for those who wish to customize the installed actuators, are able to provide 4 mm (0.16") of X, Y, and Z travel and 6° (105 mrad) of θx, θy, θz (Roll, Pitch, and Yaw) travel when drives are installed. This allows each axis to be configured depending on the precision or automation needed. Whether the application is a multimode fiber launch system using thumbscrews or an automated alignment setup using stepper motor actuators, each axis can be configured to meet the demand. For a list of all compatible actuators, please see the Drives tab. In addition to the features above, item numbers starting with MAX608 or MAX609 incorporate open- and closed-loop piezoelectric actuators, respectively, with 30 µm of travel. The open-loop design does not contain an internal strain gauge sensor. The theoretical resolution of the piezo actuators is 1.0 nm for the X-, Y-, and Z-axis and 0.018 µrad for the θx, θy, and θz rotational axes. This feedback loop created when using our closed loop system is ideal for compensating for the hysteresis, creep, and thermal drift that is inherent to all piezoelectric elements. These piezo stages include six PAA100 Drive Cables and, in the case of closed-loop systems, six PAA622 Feedback Converter Cables. | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
|