Calibration Targets

Overview
Mounting Options
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General Specifications
Chrome Thickness	0.120 µm
Chrome Optical Density	OD ≥3 at 430 nm
Substrate Thickness	0.06" (1.5 mm)
Surface Flatness	≤15 µm
Line Spacing Tolerance^a	±1 µm
Line Width Tolerance^a	±0.5 µm
Substrate	Soda Lime Glass

This tolerance is valid for the mask used to create these targets and may differ minimally for the targets themselves.

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An R3L3S3P Stage Micrometer Mounted in an XYF1 Test Target Positioner

Features

Horizontal Stage Micrometers with Divisions from 10 µm to 100 µm
Concentric Squares with Fourteen Positive Pattern Sizes from 0.1 mm to 50 mm

Thorlabs offers stage micrometers and concentric square patterns for calibrating distances in an imaging system. These targets feature soda lime glass substrates with vacuum-sputtered, low-reflectivity chrome. Each pattern is manufactured using photolithography, allowing for edge features to be resolved down to approximately 1 µm.

Mounting
These test targets can be mounted in one of four of our microscopy slide holders. Our MAX3SLH fixed slide holder provides two spring clips to mount the optic and can be mounted to any of our 3-axis flexure stages. The MAX3SLH is only compatible with test targets greater than or equal to 2" wide and provides a clear aperture of 1", which may cover the chrome pattern on some of the test targets. Thorlabs also offers our XYF1(/M) test target positioning mount (see photo above) capable of translating a 1" (25.4 mm) to 3" (76.2 mm) wide rectangular target over a 50 mm (1.97") x 30 mm (1.18") area. The mount offers five 8-32 (M4) taps for six post-mountable orientations. The XYF1 uses nylon-tipped setscrews to secure the optic. Please note that the mount's support arms overlap the optic by 4.4 mm on each side. For users of the MLS203 microscopy stage, we offer the MLS203P2 slide holder for inverted microscopes, which can mount slides 25 mm to 26.5 mm wide and petri dishes 30 mm to 60 mm in diameter.

Targets Selection Guide
Resolution Test Targets	Distortion Test Targets	Slant Edge MTF Resolution Test Targets	Calibration Targets

Mounting Options
Mount Item #	MAX3SLH	XYF1	MLS203P2	FFM1 with B3C	SFH2
Image (Click to Enlarge)
Compatible Target Item #s	R1L3S1P, R1L3S2P	R1L1S5P^a, R1L3S1P, R1L3S2P, R3L3S3P	R1L1S5P	R1L1S5P,R1L3S1P, R1L3S2P,R3L3S3P	R1L1S5P,R1L3S1P, R1L3S2P,R3L3S3P
Features/Mounting	Mounts to 3-Axis Stages or Any with 1/4"-20 Taps	XY Translation Ø1/2" Post Mountable	Mounts to Our MLS203-1 and MLS203-2 Fast XY Scanning Stages	Ø1/2" Post Mountable	Ø1/2" Post Mountable

The pattern on this target will be partially obscured by this mount.

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Stage Micrometer, 1" x 1"

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Close Up of the R1L1S5P Horizontal Scale with Crosshair

1" x 1" (25.4 mm x 25.4 mm) Stage Micrometer
For Calibrating Eyepiece Reticles or Objective Magnification
20 mm Horizontal Scale with 100 µm Divisions and Crosshair

This target features a stage micrometer pattern with 100 µm divisions and numerical labeling every 1 mm. The pattern is oriented horizontally with a 20 mm long scale and a perpendicular crosshair. The target consists of a 1" x 1" soda lime substrate with low-reflectivity, vacuum-sputtered chrome. This positive target is useful for the calibration of distances within imaging systems.

Stage Micrometers, 3" x 1"

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Microscope Image of R1L3S1P Stage Micrometer

For Calibrating Eyepiece Reticles or Objective Magnification
R1L3S1P: 10 mm Scale with 50 µm Divisions
R1L3S2P: 1 mm Scale with 10 µm Divisions
Scales Centered on a 3" x 1" (76.2 mm x 25.4 mm) Microscope Slide

These targets each feature a horizontal stage micrometer pattern. The R1L3S1P micrometer has a 10 mm long scale with 50 µm divisions and numerical labeling every millimeter, while the R1L3S2P has a 1 mm long scale with 10 µm divisions and numerical labeling every 0.1 mm. Both targets consist of a 3" x 1" soda lime substrate with low-reflectivity, vacuum-sputtered chrome. These positive targets are useful for the calibration of distances within imaging systems.

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R1L3S1P Under Magnification

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R1L3S2P Under Magnification

Concentric Squares, 3" x 3"

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R3L3S3P Concentric Square Pattern

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Close Up of the Squares Smaller than 15 mm Wide on R3L3S3P Concentric Square Target

3" x 3" (76.2 mm x 76.2 mm) Concentric Square Target
Calibrate a Measurement for Imaging Software
Low-Reflectivity, Vacuum-Sputtered Chrome

The R3L3S3P Concentric Square Target features fourteen concentric squares with lengths and widths ranging from 0.1 mm to 50 mm (see table below). Each square is labeled with its width on the target. This target is made from a soda lime glass substrate with low-reflectivity, vacuum-sputtered chrome. These positive targets are useful for the calibration of distances within imaging systems.

Widths of Positive Squares (mm)

	• 0.1	• 0.5	• 2	• 4	• 10	• 20	• 40
	• 0.25	• 1	• 3	• 5	• 15	• 30	• 50

View All »Matching Part Numbers

Calibration Targets

Features

Stage Micrometer, 1" x 1"

Stage Micrometers, 3" x 1"

Concentric Squares, 3" x 3"