3-Axis NanoMax Flexure Stage with Bundled Controller

3-Axis Piezo Flexure Stage with Compatible Controller
4 mm of Manual Travel for Each Axis
Piezo Actuators Provide 20 µm of High-Resolution Displacement

Three-Channel Piezo Controller

MDT630B

Three-Axis Flexure Stage with
Differential Micrometers Installed

Please Wait

Overview
Specs
Pin Diagrams
Piezo Bandwidth
Software
Feedback
Multi-Axis Stages

Click for Details
Front Panel of MDT693B Controller

Click to Enlarge
DRV3 Micrometer with Coarse and Fine Adjustment

This bundle consists of the MAX302(/M) 3-Axis NanoMax Flexure Stage, three DRV3 Differential Micrometers, and the MDT693B Three-Channel Piezo Controller at a savings over purchasing these items separately. Together, these items provide local and remote control of the position of our MAX302 NanoMax stage along X, Y, and Z with sub-micron resolution. Each axis has a maximum travel range of 4 mm. The DRV3 differential micrometers provide 4 mm of coarse travel and 300 µm of fine travel, with a calculated fine resolution of 100 nm. The embedded piezo elements provide an additional 20 µm of fine travel.

This bundle includes three SMC cables, three SMC-to-BNC adapters (MDC40211), and a region-specific power cord selected at the time of the order.

MAX302 3-Axis NanoMax Flexure Stage
Designed for alignment applications requiring sub-micron resolution, the patented flexure design of the MAX302 ensures low crosstalk, high stability, and long-term reliability. This stage is compatible with our entire family of flexure stage accessories. In a typical multi-axis stacked stage, touching one of the two axes that are not referenced to "ground" will result in unwanted motion within the assembly. Since each of the axes in a NanoMax stage are coupled directly to the base of the stage, these adverse effects are eliminated. For more information, please see the full MAX302 presentation.

DRV3 Differential Micrometer
The DRV3 features two large knobs for coarse and fine adjustment. The coarse adjuster knob provides 500 µm/rev over a 4 mm range, while the fine adjuster knob provides 50 µm/rev over a 300 µm range. The calculated fine drive resolution is 100 nm. The rubber grip on the fine adjuster knob reduces heat transfer when making small adjustments, improving stability. For more information, please see the full DRV3 presentation.

MDT693B Three-Channel Open-Loop Piezo Controller
The MDT693B piezo controller features three precise, low-noise, independently controllable output channels and is capable of supporting the MAX302's absolute maximum control voltage of 75 V. The control voltage can be modified using rotary knobs on the front panel and by providing an external signal through BNC or USB 2.0. For more information, please see the full MDT693B presentation.

MAX302 Three-Axis Flexure Stage

Item #	MAX302(/M)
General Specifications
Travel per Axis	4 mm
Load Capacity	<1.54 lbs (<0.7 kg) Recommended 2.2 lbs (1 kg) Max
Thermal Stability	1 µm/°C
Deck Height	2.46" (62.5 mm)
Optical Axis Height	2.95" (75 mm)
Weight	1.65 lbs (0.75 kg)
Piezo Specifications
Piezo Voltage Range	0 - 75 V
Piezo Travel Range	20 µm +0.2 µm / -0.0µm
Piezo Bidirectional Repeatability	0.2 µm
Piezo Absolute On-Axis Accuracy	1.0 µm
Resonant Frequency	375 Hz (No Load) 200 Hz (275 g Load) 150 Hz (575 g Load)

Arcuate Cross Talk
As a Function of X-Axis Position^a		As a Function of Z-Axis Position^b
X-Axis Position	Arcuate Motion in Z-Axis	Z-Axis Position	Arcuate Motion in X-Axis
0.0 mm	80.0 µm	0.0 mm	57.1 µm
0.5 mm	45.0 µm	0.5 mm	32.1 µm
1.0 mm	20.0 µm	1.0 mm	14.3 µm
1.5 mm	5.0 µm	1.5 mm	3.6 µm
2.0 mm	0.0 µm	2.0 mm	0.0 µm
2.5 mm	5.0 µm	2.5 mm	3.6 µm
3.0 mm	20.0 µm	3.0 mm	14.3 µm
3.5 mm	45.0 µm	3.5 mm	32.1 µm
4.0 mm	80.0 µm	4.0 mm	57.1 µm

a. The typical measured cross talk to the Z axis for a commanded movement in X. In these measurements, the Y axis was positioned at 0 mm. The effect on the Z axis is expected to be similar for commanded movements in Y with the X axis positioned at 0 mm. The maximum measured cross talk to the Z axis was <88 µm.
b. The typical measured cross talk to the X axis for a commanded movement in Z. In these measurements, the Y axis was positioned at 0 mm. The effect on the Y axis is expected to be similar for commanded movements in Z with the X axis positioned at 0 mm. The maximum measured cross talk to the X axis was <66 µm.

DRV3 Differential Actuator

Item #	DRV3
Travel Range	Coarse: 4 mm (0.16") When Used with MAX302^c Fine: 300 µm
Translation per Revolution	Coarse: 500 µm/rev Fine: 50 µm/rev
Resolution	Fine: 100 nm (Calculated)

c. The DRV3's maximum coarse travel range is 8 mm, but the MAX302's maximum travel range is 4 mm.

MDT693B Three-Channel Piezo Controller

Item #	MDT693B
Output Specifications
Number of Channels	3
Connectors	BNC (One BNC-to-SMC Adapter per Channel Included)
Output Voltage	0 - 75 V, 0 - 100 V, or 0 - 150 V (Selected by Switch on Rear)
Output Voltage Resolution When Using Knobs	1.1 mV (for 75 V Output Voltage Setting) 1.5 mV (for 100 V Output Voltage Setting) 2.2 mV (for 150 V Output Voltage Setting)
Output Current (Max)	60 mA
Output Noise^d	1.5 mV (RMS) ~9.9 mV (Peak-to-Peak)
Output Impedance (Max)	150 Ω, 1.0 nF
Load Impedance^e (Min)	2.5 kΩ
Bandwidth (-3 dB)	9 kHz (No Load, Small Signal) 8.5 kHz (No Load, 150 V_pp)^f 200 Hz (1.4 µF Piezo, 150 V_pp)^f
Bandwidth Stability (-3 dB)	<0.01% Over 5 Hours
External Control through BNC
Input Voltage	0 - 10 V
Input Impedance	10 kΩ
Input Gain	7.5 V/V ± 5% (for 75 V Output Voltage Setting) 10 V/V ± 5% (for 100 V Output Voltage Setting) 15 V/V ± 5% (for 150 V Output Voltage Setting)
Output Voltage Resolution When Using BNC	Limited by Noise of External Voltage Source
Scan Trim Gain Adjustment	80% to 120% of Sum of Master Scan External Voltage and Offset from Rotary Adjustment Knob
External Control through Command Line
Physical Interface	Female Type B USB 2.0 Connector
Digital-to-Analog Resolution	16-Bit, 2.75 mV
Analog-to-Digital Resolution	16-Bit, 3.0 mV
Physical Specifications
Display Type	7-Segment LED with Four Digits
Display Resolution	0.1 V
Enclosure Size	12.18" × 4.15" × 8.55" (309.4 mm × 105.5 mm × 217.1 mm)
Weight	3.02 kg (6.65 lbs)
Operating Temperature	10 to 40 °C
Power Specifications
Input Voltage	100 - 240 VAC
Input Frequency	50 - 60 Hz
Input Power (Max)	60 VA
Fuse Type	IEC60127-2/3 (250 VA, Slow Blow, Type "T")
Fuse Dimensions	5 mm x 20 mm
Fuse Rating	600 mA

d. Tested without an external load connected (1 nF output impedance only). Adding a capacitive load, such as a piezo, will decrease the noise because the capacitance will create a low-pass filter with the output resistance.
e. The smallest allowable terminating resistance. Applying lower impedances will cause the short-circuit protection to limit the output voltage. Continued use in this mode will cause circuit degradation and eventual circuit failure.
f. Assume a ramp function is used. The bandwidth depends upon the load and requires a calculation for a more representative number. See Chapter 6 of the manual for details.

MAX302 Three-Axis Flexure Stage

SMC Male

SMC Male
Input Voltage: 0 - 75 V

MDT693B Three-Channel Piezo Controller

Piezo Output

BNC Female

Output Voltage: 0 - 150 V
Output Impedance (Max): 150 Ω, 1.0 nF

External Voltage Control

BNC Female

Input Voltage: 0 - 10 V
Input Impedance: 10 kΩ

External Computer Control

Type B USB Female

DB9 Female

Piezo Driver Bandwidth Tutorial

Knowing the rate at which a piezo is capable of changing lengths is essential in many high-speed applications. The bandwidth of a piezo controller and stack can be estimated if the following is known:

The maximum amount of current the controllers can produce. This is 0.5 A for our BPC Series Piezo Controllers, which is the driver used in the examples below.
The load capacitance of the piezo. The higher the capacitance, the slower the system.
The desired signal amplitude (V), which determines the length that the piezo extends.
The absolute maximum bandwidth of the driver, which is independent of the load being driven.

To drive the output capacitor, current is needed to charge it and to discharge it. The change in charge, dV/dt, is called the slew rate. The larger the capacitance, the more current needed:

Piezo Equation 1

For example, if a 100 µm stack with a capacitance of 20 µF is being driven by a BPC Series piezo controller with a maximum current of 0.5 A, the slew rate is given by

Piezo Equation 2

Hence, for an instantaneous voltage change from 0 V to 75 V, it would take 3 ms for the output voltage to reach 75 V.

Note: For these calculations, it is assumed that the absolute maximum bandwidth of the driver is much higher than the bandwidths calculated, and thus, driver bandwidth is not a limiting factor. Also please note that these calculations only apply for open-loop systems. In closed-loop mode, the slow response of the feedback loop puts another limit on the bandwidth.

Sinusoidal Signal

Click to Enlarge

The bandwidth of the system usually refers to the system's response to a sinusoidal signal of a given amplitude. For a piezo element driven by a sinusoidal signal of peak amplitude A, peak-to-peak voltage V_pp, and frequency f, we have:

Piezo Equation 3

A diagram of voltage as a function of time is shown to the right. The maximum slew rate, or voltage change, is reached at t = 2nπ, (n=0, 1, 2,...) at point a in the diagram to the right:

Piezo Equation 4

From the first equation, above:

Piezo Equation 5

Thus,
Piezo Equation 6

For the example above, the maximum full-range (75 V) bandwidth would be

Piezo Equation 7 .

For a smaller piezo stack with 10 times lower capacitance, the results would be 10 times better, or about 1060 Hz. Or, if the peak-to-peak signal is reduced to 7.5 V (10% max amplitude) with the 100 µm stack, again, the result would be 10 times better at about 1060 Hz.

Click to Enlarge

Triangle Wave Signal

For a piezo actuator driven by a triangle wave of max voltage V_peak and minimum voltage of 0, the slew rate is equal to the slope:

Or, since f = 1/T:

Equation 9

Click to Enlarge

Square Wave Signal

For a piezo actuator driven by a square wave of maximum voltage V_peak and minimum voltage 0, the slew rate limits the minimum rise and fall times. In this case, the slew rate is equal to the slope while the signal is rising or falling. If t_r is the minimum rise time, then

Equation 11

Equation 12 .

For additional information about piezo theory and operation, see the Piezoelectric Tutorials page.

Piezo Controller Software

Version 2.4.2

Software package with GUI and drivers to control the MDT693B, as well as an SDK for third-party development.

External Control Using Serial Commands
The three output channels of the MDT693B piezo controller can also be modulated remotely by sending serial commands through USB. The list of available commands is given in Chapter 7 of the manual. They include the ability to read and set voltages on a per-channel basis, to increment or decrement the control voltage at fixed step sizes, and to enable Master Scan mode.

Compatibility
The MDT693B is also backwards compatible with the software and serial commands used to control the previous-generation MDT693A.

Please note that firmware version 1.09 or later is required if using version 2 of the software. The firmware can be updated by clicking the Software link to the left.

Posted Comments:

user (posted 2024-08-01 10:45:23.623)

When rotating the X/Y axis, the top plate on the stages seems to move with a tilt angle, which is inferred by the quick out of focus while moving the sample in 30 um distance under a microscope. How to repair or adjust this?

ksosnowski (posted 2024-08-05 03:30:11.0)

Thank you for reaching out to us. There is an amount of crosstalk on the Z axis from motion in XY and vice versa. The MAX302 manual Chapter 6 has a table of the approximate arcuate displacement crosstalk between the axes. The measured maximum cross talk to the Z axis, when a movement is demanded in X or Y, is <88 µm.

Mark Martino (posted 2024-02-02 10:05:28.42)

Hello Thorlabs, I'm interested in a PZT stage that can cover roughly 200 microns total travel with a resolution of roughly 100nm. Do I need to actuate this stage with a ~100V or higher PZT controller/amplifier/driver is required? Do you have suggestions for PZT stages for phase shifting our interferometer (midwave at 10.6 microns)? Thanks! Mark

cdolbashian (posted 2024-02-16 09:20:58.0)

Thank you for reaching out to us with this inquiry. For small, qualitative, steps like this a piezo actuator is certainly the best approach here. I have reached out to you directly to discuss your application.

Moritz Cavigelli (posted 2023-09-05 11:11:53.74)

I cannot get the manual as a pdf version, as the link just forwards me to a blank page. Could you please provide me with the corresponding manual? Thanks!

ksosnowski (posted 2023-09-07 02:41:07.0)

Hello Moritz, thanks for reaching out to Thorlabs. The MDT630A kit we used to sell included our MDT693A Piezo Driver, MAX302 Stage, and DRV3 differential micrometer. Each of these devices have their own manual which are available on our website. We currently offer a newer piezo driver MDT693B as well in our new kit part# MDT630B using the same stage and actuator.

HANG CHEN (posted 2021-06-12 17:00:37.117)

Hi, I am wondering what the relationship between the applied voltage and the travel displacement. Are they linearly dependent? Thanks.

cdolbashian (posted 2021-06-22 03:44:53.0)

Thank you for reaching out to us at Thorlabs. Piezo elements have a nonlinear relationship with the applied voltage, especially for bare piezos. Additionally they will exhibit electrical hysteresis: the Voltage-to-Displacement relationship will differ as a function of the previous Voltage setpoint. More information can be found in our short tutorial on piezos on the "technical resources" section of our "Products" menu.

Giuseppe Vicidomini (posted 2020-11-09 15:35:27.84)

Dear Sir or Madam, I am using the MDT630B/M 3-Axis NanoMax stages but I am not able anymore to control the z-axis. In particular, by turning the know I can only reach the value 6.2 V. By changing the cables, i.e., using the y-output to control the z-axis of the stage, I had a similar problem. While using the z-output for the y-axis I do not have a problem. Reading the manual I have the impression that the z-axis enters a sort of protection modality, and the controller attenuates the output. Do you have any suggestions to solve this problem.

YLohia (posted 2020-12-29 03:09:03.0)

Hello, thank you for contacting Thorlabs. We reached out to you directly a while ago to gather more details to help troubleshoot -- please reply to us at europe@thorlabs.com if you still have this issue. Are you using an external signal, or are you using the controller in stand-alone operation? Are you still able to adjust the z-axis properly using the manual adjuster? Can you please check that all manual adjusters are properly inserted in the stage? They must be in contant with the stage for the piezos to move. Would you be able to view the output of the MDT630B/M controller on an oscilloscope to verify that the controller is able to output the right voltage?

`mbirowosuto (posted 2016-06-14 22:34:47.77)

Dear Sir, We need a software for this Nanomax 300 product (MDT6938). We purchase it but we didnot receive the software. Serial Number is 150424175409. Thanks and looking forward, Best regards, Dr. Danang Birowosuto Nanyang Technological University

besembeson (posted 2016-06-15 05:32:57.0)

Response from Bweh at Thorlabs USA: At the bottom of the overview on this page, we have a link to the "full MDT693B presentation" that also includes the software. We will make the software link more visible. Here is the link to the page with the software for you to download: http://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=1191

julien.paparone (posted 2014-04-09 05:05:37.36)

Hello, I'm currently trying to interface my MDT693B with my computer (win7 pro x64 sp1) via labview. The CD application is unable to install the drivers, and the software provided on the website being out-of-date, I can't use the product as it is meant to. Have you been experiencing this problem so far, and if so, how did you manage to fix it ? Yours, Julien Paparone

cdaly (posted 2014-04-09 05:31:29.0)

Response from Chris at Thorlabs: To install the drivers from the CD, you will need to have administrative privileges on the computer. If you are not an administrator, you can also browse the CD for the file “CD-Starter2.exe” in the root of the CD. Right click the file and choose the “Run as administrator” option from the menu, this should solve the issue, but we will contact you directly to provide any additional support.

snaghizadeh (posted 2014-03-02 19:27:46.813)

Dear Sir/Madam, I am contacting you from Koç university, Istanbul, Turkey. We are using your MDT693A piezo controller. I am trying to write a LabView code, in which I wish to find the max output from our sample at each (x,y) coordinate pair. Please do me a favor and assist me in understanding the following questions. 1)I read through manuals, however, I could not find relationship between voltage and displacement. I mean to have minimum displacement of 20 nm, how much should I change the voltage? Does this amount depend on different voltage scales (75 ,100)? 2) What is the minimum voltage step(resolution)? 3)Does the displacement happen in both positive and negative X, Y, and Z directions? If so, what voltage range cause movement in negative directions? Many thanks, Solmaz

cdaly (posted 2014-03-06 04:06:26.0)

1) The controller is an open loop controller. It simply outputs a voltage. There is no feedback capability in an open loop system to display something like position. If you were to assume a linear response form your piezo, you would get the given displacement you want by the voltage range and divide by the range in the same distance units as your displacement range. V(x)=VMax*X/Range. We cannot guarantee this will work as piezo devices are not strictly linear. 2) The display resolution of the controller is +/-0.1V, though the actual resolution, when using a software interface an analog input to drive the voltage would be 2.75mV. 3) This depends on your piezo device. Some piezos cannot handle a reverse bias and can only be used in the positive voltage range to extend the piezo.

Thorlabs (posted 2010-10-06 11:32:01.0)

Reponse from Javier at Thorlabs to kl_mun: we currently do not offer 25 mm travel stages fit with piezo control for fine adjustment. I will contact you directly to discuss your application requirements.

kl_mun (posted 2010-10-06 06:00:30.0)

Can we upgrade the MDT630A/M with a 25mm of coarse travel instead of 4mm? Thanks.

Multi-Axis Stage Selection Guide

Click to Enlarge
In the above application, a 3-Axis NanoMax flexure stage is aligned in front of a 6-axis stage at the proper 112.5 mm deck height using an AMA554 Height Adapter.

3-Axis Stages
Thorlabs offers three different 3-Axis Stage variations: NanoMax flexure stages, MicroBlock compact flexure stages, and RollerBlock long-travel stages. Each stage features a 62.5 mm nominal deck height. Our NanoMax line of 3-axis stages offers built-in closed- and open-loop piezos as well as modular drive options that include stepper motors, differential drives, or additional piezos. The MicroBlock stages are available with differential micrometer drives or fine thread thumbscrews; these drives are not removable. Finally, our RollerBlock stage drivers can be switched out for any actuator that has a Ø3/8" (9.5 mm) mounting barrel.

4- and 5-Axis Stages
Our 4- and 5-axis stages are ideal for the static positioning of waveguides or complex optical elements with respect to our 3-axis or 6-axis high-performance alignment stages. Thorlabs' 5-axis stages have nominal heights of 62.5 mm or 112.5 mm. The AMA554 Height Adapter can be used to raise the deck height of the 3-axis or 4-axis stages to 112.5 mm for compatibility with our 5-axis MicroBlock or 6-Axis NanoMax Stages.

6-Axis Stages
Thorlabs' 6-Axis NanoMax Nanopositioners are ideal for complex, multi-axis positioning and have a nominal deck height of 112.5 mm. These stages offer a common point of rotation and a patented parallel flexure design that allows all actuators to be coupled directly to the base to minimize any unwanted motion in the system. Built-in closed- and open-loop piezo options are available. A selection of modular drive options allows any axis to be manual or motorized with the option for external piezos. Our units without included actuators are also available in right- or left-handed configurations. To increase the stage height of the 3-axis stages to 112.5 mm, we recommend our AMA554 Height Adapter, shown in the image to the right.

A complete selection and comparison of our multi-axis stages is available below.

3-Axis Stages

Item #	MAX313D	MAX312D	MAX311D	MAX383	MAX381	MAX303	MAX302	MAX301	MBT602	MBT616D	RB13M	RBL13D
Stage Type	NanoMax Flexure Stages								MicroBlock Compact Flexure Stages		RollerBlock Long Travel Stages
Included Drives	DRV3 Differential Micrometers			DRV208 Stepper Motor Actuators		N/A			Fine Thread Thumbscrews	Differential Micrometers	148-801ST Micrometer Drives	DRV304 Differential Micrometers
Built-in Piezos	N/A	Open Loop	Closed Loop	N/A	Closed Loop	N/A	Open Loop	Closed Loop	N/A		N/A
Travel (X, Y, Z)	4 mm (0.16")										13 mm (0.51")
Deck Height (Nominal)	62.5 mm (2.46")
Optical Axis Height (Nominal)	75 mm (2.95")
Load Capacity (Max)	1 kg (2.2 lbs)										4.4 kg (9.7 lbs)
Thermal Stability	1 µm/°C										-
Weight	1.00 kg (2.20 lbs)								0.64 kg (1.40 lbs)		0.59 kg (1.30 lbs)

4-Axis Stages

Item #		MBT401D MBT401D/M	MBT402D MBT402D/M
Stage Type		4-Axis Thin-Profile MicroBlock Device Stage	4-Axis Low-Profile MicroBlock Device Stage
Included Drives		Differential Micrometers
Built-in Piezos		N/A
Travel	Horizontal Axis (Y)^a	13 mm (0.51")
	Vertical Axis (Z)	6 mm (0.24")
	Pitch (θ_y)	±5°
	Yaw (θ_z)	±5°
Deck Height (Nominal)		62.5 mm (2.46")
Optical Axis Height (Nominal)		75 mm (2.95")
Load Capacity (Max)		0.5 kg (1.1 lbs)

Perpendicular to the Optical Axis (X)

5-Axis Stages

Item #		MBT401D (MBT401D/M) or MBT402D (MBT402D/M) with MBT501	PY005
Stage Type		5-Axis MicroBlock Stage System	Compact 5-Axis Stage
Included Drives		Differential Micrometers	100 TPI Actuators
Built-in Piezos		N/A
Travel	Optical Axis (X)	13 mm (0.51")	3 mm (0.12")
	Horizontal Axis (Y)	13 mm (0.51")	3 mm (0.12")
	Vertical Axis (Z)	6 mm (0.24")	3 mm (0.12")
	Pitch (θ_y)	±5°	±3.5°
	Yaw (θ_z)	±5°	±5°
Deck Height (Nominal)		112.5 mm (4.43")	62.5 mm (2.46")^a
Optical Axis Height (Nominal)		125 mm (4.92")	75 mm (2.95")^a
Load Capacity (Max)		0.5 kg (1.1 lbs)	0.23 kg (0.5 lbs)

Nominal deck height of 62.5 mm and optical axis height of 75 mm can only be achieved using the PY005A2 Height Adapter and MMP1 Mounting Plate.

6-Axis Stages

Item #		MAX601D MAX601D/M	MAX602D MAX602D/M	MAX603D MAX603D/M	MAX681 MAX681/M	MAX682 MAX682/M	MAX683 MAX683/M	MAX607 MAX607/M MAX607L^a MAX607L/M^a	MAX608 MAX608/M MAX608L^a MAX608L/M^a	MAX609 MAX609/M MAX609L^a MAX609L/M^a
Stage Type		6-Axis NanoMax Flexure Stage
Included Drives		DRV3 Differential Micrometers			DRV208 Stepper Motor Actuators			N/A
Built-in Piezos		N/A	Open Loop	Closed Loop	N/A	Open Loop	Closed Loop	N/A	Open Loop	Closed Loop
Travel	X, Y, Z	4 mm (0.16")
Travel	θ_x, θ_y, θ_z	6°
Deck Height (Nominal)		112.5 mm (4.43")
Optical Axis Height (Nominal)		125 mm (4.92")
Load Capacity (Max)		1.0 kg (2.2 lbs)

Left-Handed Version