3-Axis NanoMax with Fixed Differential Adjusters
| Common Specifications |
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| Travel | 4.0 mm | | Load Capacity (Max) | 2.2 lbs (1 kg) | | Coarse Adjustment Range | 0.5 mm/rev | | Fine Adjustment | 50 µm/rev (300 µm Range) | | Piezo Specifications (MAX311D and MAX312D Only) | | Piezo Voltage Range | 0 - 75 V | | Piezo Range | 20 µm | | Piezo Resolution (Theoretical) | 20 nm (5 nm for Closed Loop) | | Piezo Bidirectional Repeatability | 200 nm Open Loop,
5 nm Closed Loop | | Piezo Absolute On-Axis Accuracy | 1.0 µm |
Features- 4 mm Travel Per Axis
- Flexure Design Ensures Smooth Continuous Motion with No Friction
- Compact Design: 157.4 mm x 160.4 mm x 62.5 mm
(6.2" x 6.31" x 2.46") Including Actuators - Enhanced Long-Term Stability
- All Adjusters Tied to the Base, Minimizing Crosstalk
- Piezo and Feedback Cables Included
NanoMax Parallel Flexure Stages
Traditional multi-axis stacked stage, touching one of the three drives will result in unwanted motion within the assembly. Our NanoMax Flexure stages feature drives which are coupled directly to the base, minimizing this unwanted motion. The result is a design ideal for applications requiring sub-micron resolution. Precision Differential Drives
The differential drives offer 4 mm of coarse travel and 300 µm of fine travel with a resolution of 50 µm per revolution. The graduations engraved on the fine travel adjusters provide a clear reference point for applications that require absolute positioning. Easy Alignment of Accessories
A central keyway in the top platform allows rapid system reconfiguration while maintaining accessory alignment. A wide range of accessories is available to mount items such as microscope objectives, collimation packages, wave guides, fiber and much more. If options are required for off-center mounting ofcomponents, the grooved top plate can be replaced with the RB13P1 adapter plate, which has an array of 1/4"-20 (M6) and 8-32 (M4) mounting holes (see image at top of page). In addition, several adapter plates are available to mount the NanoMax series stages to a wide range of other Thorlabs rotation and long travel linear stages. Combined, these features make the MAX300D series flexure stage a solid platform for alignment applications that require high stability and repeatability.
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Common Specifications| Item # | MAX311D, MAX312D, and MAX313D |
|---|
| Travel | 4 mm | | Load Capacity (Max) | 2.2 lbs (1 kg) | | Recommended Load Capacity | <1.54 lb (<0.7 kg) | | Thermal Stability | 1 µm/°C | | Weight | 1.65 lbs (0.75 kg) | | Deck Height | 2.46" (62.5 mm) | | Optical Axis Height | 2.95" (75 mm) | | Differential Adjuster Specifications | | Coarse Adjustment | 0.5 mm/rev | | Fine Adjustment (with Vernier) | 50 µm/rev (300 µm Range) |
Arcuate Cross Talk SpecificationsThe measured maximum cross talk to the Z axis, when a movement is demanded in X or Y is <88 µm.
The table below shows the theoretical amount of cross talk to the Z axis, for movement at various X positions (Y axis at zero).
Cross talk at Y axis positions (with X at zero) would be the same. | X axis position (mm) | 0.0 | 0.5 | 1.0 | 1.5 | 2.0 | 2.5 | 3.0 | 3.5 | 4.0 | | Arcuate Motion in Z axis (µm) | 80.0 | 45.0 | 20.0 | 5.0 | 0.0 | 5.0 | 20.0 | 45.0 | 80.0 |
The measured maximum cross talk to the X and Y axes, when a movement is demanded in Z is <66 µm.
The table below shows the typical amount of cross talk to the X axis, for movement at various Z axis positions (Y axis at zero).
Cross talk to Y axis positions (with X axis at zero) would be the same. | Z axis position (mm) | 0.0 | 0.5 | 1.0 | 1.5 | 2.0 | 2.5 | 3.0 | 3.5 | 4.0 | | Arcuate Motion in X axis (µm) | 57.1 | 32.1 | 14.3 | 3.6 | 0.0 | 3.6 | 14.3 | 32.1 | 57.1 |
Piezo Stage Specifications |
Displacement Sensor7 Pin LEMO MaleMAX311D Only 
Piezo Drive InputSMC MaleMAX311D & MAX12D 
Nominal maximum input voltage: 75 V
Absolute maximum input voltage: 100 V | Pin | Designation |
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| 1 | +15 V | | 2 | Oscillator + | | 3 | 0 V | | 4 | Signal Out - | | 5 | Signal Out + | | 6 | -15 V | | 7 | Travel |
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Additional 3-Axis Stages and Flexure Platforms
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Closed-Loop Piezoelectric Actuators
NanoMax300 with Differential Actuators
