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Vacuum-Compatible Motorized Actuators
25 mm Travel 3/8" Barrel
12 mm Travel
6 mm Travel
These Vacuum-Compatible, Motorized Actuators provide 6, 12, or 25 mm of travel for use with mirror mounts and stages. With vacuum-rated servo motors, phosphorous bronze internal coupling mechanisms and mounting bushings, and high-vacuum grease, these actuators can be used in environments down to 10-6 Torr.
Commercial limit switches have been added to provide overdrive protection and accurate home positioning. The incorporated motor is capable of speeds up to 2.3 mm/s. The precision of the encoder (512 counts/rev) results in a minimum resolution of about 29 nm (see the Calculations tab for more information). They offer high resolution in lightweight packages (0.134 kg), making them ideal for demanding automation applications.
The Z812BV and Z825BV actuators are designed to replace manual adjusters with 3/8” barrel fittings in stages and mirror mounts, while the Z806V and Z812V actuators can replace manual adjusters with 1/4"-80-threaded fittings. To use these actuators, simply remove the existing manual adjuster from the mount, and either clamp or thread in the vacuum-compatible actuator.
The image above shows the Z825BV actuator fitted to a custom, vacuum-compatible version of the PT1 translation stage. To order vacuum-compatible versions of our stages and mirror mounts, please contact Technical Support.
The vacuum-compatible actuators are each shipped with a 1.6' (0.5 m) vacuum compatible flat ribbon cable with IDC connector. This cable has a 0.05" (1.27 mm) pitch, 28 AWG stranded conductors and Fluorinated Ethylene Propylene (FEP) insulation. A converter cable for use with the KDC101 controller is also supplied, but this is not vacuum compatible and should only be used outside the chamber.
The KDC101 DC Servo Controller is the ideal driver for this actuator. Please note that previous-generation TDC001 units purchased before March 2009 will require a firmware upgrade before they can be used with this motor. An upgrade is included with the latest APT software, which can be downloaded here.
How to Calculate the Linear Displacement per Encoder Count
For these vacuum-compatible actuators, there are 512 encoder counts per revolution of the motor. The output shaft of the motor goes into a 67:1 planetary gear head. This requires the motor to rotate 67 times to rotate the 1.0 mm pitch lead screw one revolution. The end result is the lead screw advances by 1.0 mm.
The linear displacement of the actuator per encoder count is given by
512 x 67 = 34,304 encoder counts per revolution of the lead screw,
whereas the linear displacement of the lead screw per encoder count is given by
1.0 mm / 34,304 counts = 2.9 x 10-5 mm (29 nm).
Connector Pin Out
This Apiezon grease has excellent anti-seize properties. It contains PTFE for maximum lubricity and is ideal for re-lubricating the lead screw threads of our ZST, ZFS, and Z8 series actuators described above. It is supplied in a syringe for easy application and is recommended both for general use and for vacuum applications down to 10-9 Torr. It has an optimal working range of 10 to 30 °C (50 to 86 °F).
Note: It is recommended that the lead screws of the Z8, ZFS, and ZST motors are lubricated every 50,000 cycles or 6 months, whichever comes first.