Create an Account  |   Log In

View All »Matching Part Numbers


Your Shopping Cart is Empty
         

Vacuum-Compatible Motorized Actuators


  • Vacuum Compatible Down to 10-6 Torr
  • Precision DC Servo Motor Actuators
  • Options with 1/4" -80 Thread or 3/8" 
    Barrel Fitting

Z825BV

25 mm Travel 3/8" Barrel

Z812V

12 mm Travel
1/4"-80 Threading

Z806V

6 mm Travel
1/4"-80 Threading

Related Items


Please Wait
Common Specificationsa
Backlash <8 µm
Bidirectional Repeatability <1.5 µm
Home Location Accuracy <2 µm
Homing Repeatability ±1.0 µm
Vertical Load Capacity <4.0 kg (Recommended)
4.5 kg (Max)
Horizontal Load Capacity <7.5 kg (Recommended)
9 kg (Max)
Velocity (Max)b 2.6 mm/s
Acceleration (Max) 4 mm/s2
Motor Coil Temperature 85 °C (Max)
Limit Switch Lifetime >100,000 Cycles
Achievable Incremental Movement (Min.) 0.05 µm
Repeatable Incremental Movement (Min.) 0.2 µm
Operating Temperature Range 41 to 104 °F
(5 to 40 °C)
Vacuum Rating 10-6 Torr
Weight 0.134 kg
  • For full specifications, please refer to the Specs tab.
  • At 2.6 mm/s velocity ripple and distortion of the acceleration/deceleration profile may occur. For improved control, the max velocity should be limited to 2.3 mm/s.
DC Servo Controller
Click to Enlarge

Recommended Controller: KDC101

Features

  • Drop-In Replacement for Manual Actuators with 1/4"-80 Thread or 3/8" Barrels
  • 12 VDC Servo Actuators with 6, 12, or 25 mm of Travel
  • Minimum Resolution of About 29 nm
  • Maximum Velocity of 2.3 mm/s
  • Limit Switches for Zero Datum and Actuator Protection
  • Rated Down to 10-6 Torr

These Vacuum-Compatible, Motorized Actuators provide 6, 12, or 25 mm of travel for use with mirror mounts and stages. With vacuum-rated servo motors, phosphorous bronze internal coupling mechanisms and mounting bushings, and high-vacuum grease, these actuators can be used in environments down to 10-6 Torr.

Commercial limit switches have been added to provide overdrive protection and accurate home positioning. The incorporated motor is capable of speeds up to 2.3 mm/s. The precision of the encoder (512 counts/rev) results in a minimum resolution of about 29 nm (see the Calculations tab for more information). They offer high resolution in lightweight packages (0.134 kg), making them ideal for demanding automation applications.

The Z812BV and Z825BV actuators are designed to replace manual adjusters with 3/8” barrel fittings in stages and mirror mounts, while the Z806V and Z812V actuators can replace manual adjusters with 1/4"-80-threaded fittings. To use these actuators, simply remove the existing manual adjuster from the mount, and either clamp or thread in the vacuum-compatible actuator.

The image above shows the Z825BV actuator fitted to a custom, vacuum-compatible version of the PT1 translation stage. To order vacuum-compatible versions of our stages and mirror mounts, please contact Technical Support.

The vacuum-compatible actuators are each shipped with a 1.6' (0.5 m) vacuum compatible flat ribbon cable with IDC connector. This cable has a 0.05" (1.27 mm) pitch, 28 AWG stranded conductors and Fluorinated Ethylene Propylene (FEP) insulation. A converter cable for use with the KDC101 controller is also supplied, but this is not vacuum compatible and should only be used outside the chamber.

The KDC101 DC Servo Controller is the ideal driver for this actuator. Please note that previous-generation TDC001 units purchased before March 2009 will require a firmware upgrade before they can be used with this motor. An upgrade is included with the latest APT software, which can be downloaded here.

Item # Z806V Z812BV
Z812V
Z825BV
Travel 6.0 mm 12.0 mm 25.0 mm
Absolute On-Axis Accuracy 42 µm 95 µm 130 µm
Percentage Accuracy (Max) 0.82% 0.75% 0.52%
Backlash <8 µm
Bidirectional Repeatability <1.5 µm
Home Location Accuracy <2 µm
Homing Repeatability ±1.0 µm
Operating Temperature Range 41 to 104 °F (5 to 40 °C)
Vacuum Rating 10-6 Torr
Weight 0.134 kg
Limit Switch Lifetime >100,000 Cycles
Vertical Load Capacity <4.0 kg (Recommended)
4.5 kg (Max)
Horizontal Load Capacity <7.5 kg (Recommended)
9 kg (Max)
Velocity (Max)a 2.6 mm/s
Acceleration (Max) 4 mm/s2
Motor Coil Temperature 85 °C
Achievable Incremental Movement (Min.) 0.05 µm
Repeatable Incremental Movement (Min.) 0.2 µm
  • At 2.6 mm/s, velocity ripple and distortion of the acceleration/deceleration profile may occur. For improved control, the max velocity should be limited to 2.3 mm/s.

How to Calculate the Linear Displacement per Encoder Count

For these vacuum-compatible actuators, there are 512 encoder counts per revolution of the motor. The output shaft of the motor goes into a 67:1 planetary gear head. This requires the motor to rotate 67 times to rotate the 1.0 mm pitch lead screw one revolution. The end result is the lead screw advances by 1.0 mm.

The linear displacement of the actuator per encoder count is given by

512 x 67 = 34,304 encoder counts per revolution of the lead screw,

whereas the linear displacement of the lead screw per encoder count is given by

1.0 mm / 34,304 counts = 2.9 x 10-5 mm (29 nm).

Connector Pin Out

Schematic
Connector_Image
PinDescriptionPinDescription
1Motor (+ve) (12 V)6Motor (-ve) (12 V)
2Vcc (5 V)7Limit Ground
3Encoder Channel A8Reverse Limit
4Encoder Channel B9Forward Limit
5Ground10Reserved for Future Use

Posted Comments:
gruning  (posted 2017-06-06 18:23:05.84)
Hello, I'm currently looking for vacuum compatible motorized translation stages and actuators for mirror mounts. I only found vacuum compatibility down to 10^-6 Torr however I need 10^-7 mbar (7.5x10^-8 Torr). Are you able to provide motorized elements down to this pressure ? Thank you. Regards
bwood  (posted 2017-06-07 06:28:15.0)
Response from Ben at Thorlabs: Thank you for your question. Unfortunately, the motors used in these actuators is limited to 10^-6 Torr, and so we can't provide a motor for lower vacuum levels at this moment in time. However, we will note this requirement with our engineers, to inform future projects.

Vacuum-Compatible DC Motor Actuators

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal Price Available
Z806V Support Documentation
Z806VVacuum-Compatible 6 mm Motorized DC Actuator, 1/4"-80 Thread Fitting
$926.29
Today
Z812BV Support Documentation
Z812BVVacuum-Compatible 12 mm Motorized Actuator, 3/8" Barrel Fitting
$926.29
5-8 Days
Z812V Support Documentation
Z812VVacuum-Compatible 12 mm Motorized Actuator, 1/4"-80 Thread
$926.29
Today
Z825BV Support Documentation
Z825BVVacuum-Compatible 25 mm Motorized Actuator with Ø3/8" Barrel Fitting
$938.20
Today

Re-greasing Kit

  • 1.5 cc Syringe of Apiezon 100 Grease
  • Convenient, Inexpensive Package that Reduces Waste
  • Prolongs Lifetime of Actuator
  • Ready to Dispense
  • Vacuum Compatible to 10-9 Torr

This Apiezon grease has excellent anti-seize properties. It contains PTFE for maximum lubricity and is ideal for re-lubricating the lead screw threads of our ZST, ZFS, and Z8 series actuators described above. It is supplied in a syringe for easy application and is recommended both for general use and for vacuum applications down to 10-9 Torr. It has an optimal working range of 10 to 30 °C (50 to 86 °F).

Note: It is recommended that the lead screws of the Z8, ZFS, and ZST motors are lubricated every 50,000 cycles or 6 months, whichever comes first.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal Price Available
GKZ8 Support Documentation
GKZ8Grease Kit for Z8, ZFS, and ZST Actuators
$15.48
Today
Log In  |   My Account  |   Contact Us  |   Privacy Policy  |   Home  |   FAQ  |   Site Index
Regional Websites: West Coast US | Europe | Asia | China | Japan
Copyright © 1999-2020 Thorlabs, Inc.
Sales: 1-973-300-3000
Technical Support: 1-973-300-3000


High Quality Thorlabs Logo 1000px:Save this Image