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Single-Axis Flexure Stages: 5 mm Travel


  • Differential Adjusters
  • Optional 20 μm Piezo Drive for Open- or Closed-Loop Operation
  • Mounting Plate & Angle Bracket Accessories

NFL5DP20S

Shown with NFL5P1 Baseplate (Not Included)

NFL5P2

Angle Bracket

NFL5P1

Base Plate

Typical XZ
Configuration

Related Items


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Key Specifications
Item # NFL5D NFL5DP20 NFL5DP20S
Actuator(s) Differential
Micrometer
Diff. Micrometer &
Open-Loop Piezo
Diff. Micrometer &
Closed-Loop Piezo
Coarse Adjuster Travel 5 mm (0.20")
Coarse Adjuster Resolution 0.5 mm per Revolution
Fine Adjuster Travel 300 µm
Fine Adjuster Resolution 50 µm per Revolution
Load Capacity Horizontal: 1 kg (2.2 lbs)
Vertical: 0.5 kg (1.1 lbs)
Piezo Travel N/A 20 µm 20 µm
Piezo Resolution
(Theoretical)
N/A 0.6 nm 0.6 nmb
Piezo Voltage N/A 0 - 75 V 0 - 75 V
  • Refer to the Specs tab for complete specifications.
  • Closed-Loop Operation Using Strain Gauge Position Sensor
Single-Axis Flexure Stage Selection Guide
1.5 mm Travel
5 mm Travel

Features

  • Differential Adjuster Translation Range: 5 mm
  • Optional 20 μm Piezo Drive
    • NFL5DP20(/M): Open-Loop Operation
    • NFL5DP20S(/M): Strain Gauge for Closed-Loop Operation
  • Compact Size: 3.00" (75 mm) Square, 1.18" (30 mm) Thick
  • XYZ-Configurable
  • NFL5DP20(/M) Open-Loop Stage Available Bundled with KPZ101 Controller (See Bundle Tab for Details)

When stability is of the utmost importance, the NanoFlex™ 5 mm travel single-axis compound flexure stages provide ultra smooth translation for applications that are intolerant to the errors inherent in linear bearings. The compound linear symmetrical flexure design ensures true linear motion with zero cross talk over the full range of translation. This is achieved without the use of parts that require controlled contact to maintain their function; all the motion results from the flexing of various structural components within the translator. These features provide uncompromised performance, even when used in harsh environments.

These stages can be stacked in a 2-axis or 3-axis configuration using the optional base plate NFL5P1(/M) and angle bracket NFL5P2(/M) described below. A 3 m long piezo drive cable (SMC to SMC) as well as a 3 m long feedback cable (LEMO to LEMO) are supplied where applicable. See the Pin Diagrams tab for connector details.

See the Specs tab above for more detailed information on the stages, including compatible controllers. We offer the NFL5DP20(/M) stage bundled with a controller at a discounted price below. See the Bundle tab for more information on this bundle. A power supply is not included; compatible power supplies are sold separately below.

Item # NFL5D NFL5DP20 NFL5DP20S
Stage Specifications
Manual Travel Range 5 mm (0.20") 5 mm (0.20") 5 mm (0.20")
Maximum Stage Load Capacity Horizontal: 1 kg (2.2 lbs)
Vertical: 0.5 kg (1.1 lbs)
Horizontal: 1 kg (2.2 lbs)
Vertical: 0.5 kg (1.1 lbs)
Horizontal: 1 kg (2.2 lbs)
Vertical: 0.5 kg (1.1 lbs)
Stage Mounting Surface Dimensions 75 mm x 75 mm (2.95" x 2.95") 75 mm x 75 mm (2.95" x 2.95") 75 mm x 75 mm (2.95" x 2.95")
Stage Height 30 mm (1.18") 30 mm (1.18") 30 mm (1.18")
Manual Drive Specifications
Drive Type Differential Micrometer Differential Micrometer Differential Micrometer
Coarse Adjustment Pitch 0.5 mm 0.5 mm 0.5 mm
Fine Adjustment Range 300 µm 300 µm 300 µm
Fine Adjustment Pitch 50 µm 50 µm 50 µm
Piezo Specifications
Voltage N/A 0 to 75 V 0 to 75 V
Position Sensor for Closed-Loop Operation N/A N/A Strain Gauge
Travel Range N/A 20 µm 20 µm
Theoretical Resolution N/A 0.6 nma 0.6 nma (Closed-Loop Operation)
Capacitance N/A 3.6 µF 3.6 µF
Connector N/A Male SMC Male SMC
Feedback Connector N/A N/A Male 7 Pin LEMO
Cable Length N/A SMC: 3 m (9.84') SMC: 3 m (9.84')
LEMO: 3 m (9.84')
Recommended Controllers N/A KPZ101, MDT694B, or MPZ601 BPC301, MPZ601,
or KPZ101 and KSG101
  • When Driven by the KPZ101, BPC301 or MPZ601 Controllers

Piezo Drive Input

SMC Male

NFL5DP20 and NFL5DP20S

SMA Male

Nominal maximum input voltage: 75 V
Absolute maximum input voltage: 100 V

Pin Designation
1 +15 V
2 Oscillator +
3 0 V
4 Signal Out -
5 Signal Out +
6 -15 V
7 Travel

Displacement Sensor

7 Pin LEMO Male

NFL5DP20S Only

LEMO Male

Item # KPZNFL5(/M)
NFL5DP20(/M) Stage Specifications
Drive Type Differential Micrometer & Piezo
Travel Range 5 mm (0.20")
Load Capacity Horizontal: 1 kg (2.2 lbs)
Vertical: 0.5 kg (1.1 lbs)
Coarse Adjustment Pitch 0.5 mm
Fine Adjustment Range 300 µm
Fine Adjustment Pitch 50 µm
Piezo Travel Range 20 µm
Piezo Resolution 0.6 nm
Piezo Voltage 0 to 75 V
KPZ101 Controller Specifications
Drive Voltage 0 to 150 V
Drive Current, Max, Continuous 7.5 mA
Stability 100 ppm Over 24 hrs
(After 30 min Warm-Up)
Noise <2 mVRMS
Typical Piezo Capacitance 1 to 10 µF
Bandwidth 1 kHz (1 µF Load, 1 Vp-p)
External Input (SMA Male) 0 to 10 V
Output Monitor (SMA Male) 0 to 10 V
USB Port USB 2.0a
  • The USB 3.0 port is compatible with a USB 2.0 Micro B connector if the Micro B connector is plugged into the shaded region depicted in this diagram. A USB 3.0 type A to type Micro B cable is included with the KPZ101.

Stage and Controller Bundle

The KPZNFL5(/M) bundle includes the NFL5DP20(/M) stage, KPZ101 K-Cube piezo controller, USB cable, piezo drive cable, and NFL5P1(/M) mounting plate. The stage provides 5 mm of total translation via a differential micrometer. For finer adjustment, the piezo drive offers 20 µm of translation with 0.6 nm resolution. This bundle is offered at 10% savings over the individual components.

K-Cube Piezo Controller

The KPZ101 can be controlled by its top panel for standalone operation or through its PC interface. The KPZ101 connects to a PC via a mini USB port (USB cable included) and utilizes Thorlabs' Kinesis® software or former generation APT™ software. The Kinesis software features an intuitive graphical user interface (GUI) that allows the unit to be controlled completely via a PC. For more demanding applications, customers can utilize ActiveX® or .NET programming to create their own software for Thorlabs' line of K-Cubes. See the Motion Control Software tab for more information.

Power Supplies

The KPZ101 does not include a power supply as our customers have varying needs. Please see the compatible power supplies below.

Thorlabs offers two platforms to drive our wide range of motion controllers: our Kinesis® software package or the legacy APT™ (Advanced Positioning Technology) software package. Either package can be used to control devices in the Kinesis family, which covers a wide range of motion controllers ranging from small, low-powered, single-channel drivers (such as the K-Cubes™ and T-Cubes™) to high-power, multi-channel, modular 19" rack nanopositioning systems (the APT Rack System).

The Kinesis Software features .NET controls which can be used by 3rd party developers working in the latest C#, Visual Basic, LabVIEW™, or any .NET compatible languages to create custom applications. Low-level DLL libraries are included for applications not expected to use the .NET framework. A Central Sequence Manager supports integration and synchronization of all Thorlabs motion control hardware.

Kinesis Software
Kinesis GUI Screen
APT Software
APT GUI Screen

Our legacy APT System Software platform offers ActiveX-based controls which can be used by 3rd party developers working on C#, Visual Basic, LabVIEW™, or any Active-X compatible languages to create custom applications and includes a simulator mode to assist in developing custom applications without requiring hardware.

By providing these common software platforms, Thorlabs has ensured that users can easily mix and match any of the Kinesis and APT controllers in a single application, while only having to learn a single set of software tools. In this way, it is perfectly feasible to combine any of the controllers from single-axis to multi-axis systems and control all from a single, PC-based unified software interface.

The software packages allow two methods of usage: graphical user interface (GUI) utilities for direct interaction with and control of the controllers 'out of the box', and a set of programming interfaces that allow custom-integrated positioning and alignment solutions to be easily programmed in the development language of choice.

A range of video tutorials is available to help explain our APT system software. These tutorials provide an overview of the software and the APT Config utility. Additionally, a tutorial video is available to explain how to select simulator mode within the software, which allows the user to experiment with the software without a controller connected. Please select the APT Tutorials tab above to view these videos, which are also available on the software CD included with the controllers.

Software

Kinesis Version 1.14.12

The Kinesis Software Package, which includes a GUI for control of Thorlabs' Kinesis and APT™ system controllers.

Also Available:

  • Communications Protocol
Software Download

Software

APT Version 3.21.3

The APT Software Package, which includes a GUI for control of Thorlabs' APT™ and Kinesis system controllers.

Also Available:

  • Communications Protocol
Software Download
Item # NF15AP25 NFL5D NFL5DP20 NFL5DP20S
Manual Translation Travel Range (Resolution) 1.5 mm (2 μm) 5 mm (1 μm)
Piezo Translation Travel Range
(Theoretical Resolution)
25 μm (0.76 nm) - 20 μm (0.6 nm) 20 μm (0.6 nm)
Closed-Loop Piezoelectric Position Sensor No No No Yes
# of Translation Axis Per Stage 1
Multi-Axis Stackable Design Yes
Maximum Stage Load Horizontal: 0.5 kg (1.1 lbs)
Vertical: 0.25 kg (0.55 lbs)
Horizontal: 1 kg (2.2 lbs)
Vertical: 0.5 kg (1.1 lbs)
Stage Mounting Surface Dimensions 1.18" x 1.18"
(30 mm x 30 mm)
2.95" x 2.95"
(75 mm x 75 mm)
Stage Height 0.49" (13 mm) 1.18" (30 mm)

Thorlabs offers an extensive selection of single-axis translation stages and multi-axis flexure translation stages. The 3-axis flexure translation stages are similar to the single axis stages in that they have a manual adjustment range of (4 mm) and a piezoelectric translation range of (20 μm).


Posted Comments:
ab177  (posted 2018-02-08 18:33:33.537)
Hello, I am assembling a multi-stack of translation stages where each has limited load capacity. Could you please tell me what is the weight of the NFL5DP20? Thanks, Art.
tfrisch  (posted 2018-02-09 04:22:39.0)
Hello, thank you for contacting Thorlabs. We list the weight in the drawing as 0.38kg. I will reach out to you to discuss this application.
chiwen.cheng  (posted 2017-09-25 17:43:03.733)
We have bought the NFL5DP20S/M and KPZ101. How could we get the relationship between voltage and displacement of Piezo? Do we need another strain gauge (KSG101) to read the real/absolute position? Many thanks
AManickavasagam  (posted 2017-09-26 05:38:12.0)
Response from Arunthathi at Thorlabs: Thank you for your question. Due to hysteresis you will not be able to achieve the Piezo versus displacement relationship. Hence you will need to buy the KSG101 which will measure the position accurately using the inbuilt strain gauge. Thanks.
jp  (posted 2014-06-16 15:31:43.27)
Hello, this is Junsong from Royal Institute of Technology, Sweden. How is the relationship between the voltage and the displacement of the Piezo? Is there a equation? For my experiment, I need to know the equation between them. Thanks very much.
rcapehorn  (posted 2014-06-17 11:32:34.0)
Response from Rob at Thorlabs: Thank you for your question. Due to the inherent nature of piezos having a hysteresis motion, the absolute position cannot be found from the voltage input. To achieve position information you would need to use one of the closed loop versions that uses a strain gauge, NFL5DP20S. I have emailed you with more details if you require.
dbcole  (posted 2014-03-07 10:03:24.203)
We’re looking to purchase this bundle and had a couple of questions. I’m not a piezo expert, so please forgive my incomplete knowledge. Can the piezo be driven by a sinusoidal signal in order to modulate the position sinusoidally? And if so, is there a maximum drive frequency? Also, can the device displacement be changed in a unidirectional manner over its 20um range at a given linear velocity?
cdaly  (posted 2014-03-07 11:52:42.0)
Response from Chris at Thorlabs: Thank you for your feedback. Yes, the piezo can be driven with a sinusoidal voltage in order to modulate the displacement, but this will require an input from a 0-10 V analog source such as a function generator or a DAQ card. The maximum frequency would depend on the depth of modulation required (peak to peak voltage) and the capacitance of the stage. For instance, if you were to modulate over the full 150 V (20 um) range of the stage, the maximum frequency would be roughly 8.8 Hz, This can be found using the equation f=I/(pi*V*C), where I is the max current for the controller (7.5mA), V is the voltage range of modulation and C is the capacitance of the stage (1800nF). This value may also be affected by the load present on the stage as well. The displacement of a piezo is inherently mostly linear, but there will be some deviation.
jlow  (posted 2012-12-13 09:27:00.0)
Response from Jeremy at Thorlabs: Unfortunately this is not possible on the NFL5D. The reason for this is because of the way this stage is designed (it does not have the typical barrel mount). If you are looking for a long travel piezo stage, how about adding on our PAS or PAZ series piezo actuator to our LNR50 series stages? You can find these at http://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=2295.
lbassett  (posted 2012-12-07 20:23:24.58)
Is it possible to replace the differential adjuster on the NFL5D with a longer-travel piezo actuator such as the DRV181 (80µm) or PAS015 (100µm)?
Greg  (posted 2009-01-26 11:31:06.0)
Response from Greg at Thorlabs to melsscal: Thank you for taking the time to ask us questions via our website. The PAA100 is a suitable cable for the piezo driver (SMC), while the PAA622 is the strain gauge cable (LEMO). The TPZNF5 (/M) and TSGNF5 (/M) come with the NF5P1 (/M) mounting plate. The T-Cubes come with mounting plates as well. I updated the webpage to clear this up. Also, the bundles are now detailed in tabs so that they are easier to learn about.
melsscal  (posted 2009-01-17 09:21:54.0)
Does the TSGNF5/M COMES WITH/INCLUDES THREE BASE PLATE LIKE NF5P2 - ONE EACH FOR NF5DP20S 5mm Travel Stage, TPZ001 Piezo Driver & TSG001 Strain Gauge Reader ?
melsscal  (posted 2009-01-17 08:25:03.0)
waht are the cables part no. which comes along with TSGN5/M as standard accessory ?we want to buy same extra as spare along with TSGN5/M.
melsscal  (posted 2009-01-17 08:16:26.0)
What are the part nos. of the suitable cables for SMC & LEMO ports of this stage ?

Single-Axis Flexure Stages: 5 mm Travel

The stages are supplied with a differential micrometer drive, which provides coarse and fine adjustment. An optional piezo drive is available, with or without strain gauge feedback for closed- and open-loop operation, respectively. The NFL5 series stage is ideal for a variety of applications, including interferometry, microscopy, and other precision nanopositioning applications.

See the Specs tab above for more detailed information, including compatible controllers. We offer the NFL5DP20(/M) stage bundled with a controller at a discounted price below. Compatible power supplies are sold separately below.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Imperial Price Available
NFL5D Support Documentation
NFL5DNanoFlex™ 5 mm Travel Translation Stage with Differential Drive, Imperial
$807.84
Today
NFL5DP20 Support Documentation
NFL5DP20NanoFlex™ 5 mm Travel Translation Stage with Diff. Drive and 20 µm Piezo Actuator, Imperial
$983.28
Today
NFL5DP20S Support Documentation
NFL5DP20SNanoFlex™ 5 mm Travel Translation Stage with Diff. Drive and Closed-Loop 20 µm Piezo Actuator, Imperial
$1,324.98
Lead Time
+1 Qty Docs Part Number - Metric Price Available
NFL5D/M Support Documentation
NFL5D/MNanoFlex™ 5 mm Travel Translation Stage with Differential Drive, Metric
$807.84
Today
NFL5DP20/M Support Documentation
NFL5DP20/MNanoFlex™ 5 mm Travel Translation Stage with Diff. Drive and 20 µm Piezo Actuator, Metric
$983.28
Today
NFL5DP20S/M Support Documentation
NFL5DP20S/MNanoFlex™ 5 mm Travel Translation Stage with Diff. Drive and Closed-Loop 20 µm Piezo Actuator, Metric
$1,324.98
5-8 Days

Open-Loop, Single-Axis Stage & Controller Bundle

  • NFL5DP20(/M) NanoFlex™ Flexure Stage Bundled with Piezo Driver and Base Plate
  • Includes USB and SMC Cables
  • Power Supply Sold Separately Below
  • 10% Savings Over Individual Components

The KPZNFL5(/M) bundle includes the KPZ101 K-Cube™ Piezo Driver, the ideal driver for the NFL5DP20(/M) stage, as well as the cables necessary for an open-loop piezo positioning system. The KPZNFL5(/M) bundle also includes a NF5P1(/M) base plate. Compatible power supplies for the KPZ101 are sold separately below.

Please see the Bundle tab for more information on this bundle.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Imperial Price Available
KPZNFL5 Support Documentation
KPZNFL5NanoFlex™ 5 mm Travel Stage & KPZ101 Piezo Driver, Imperial
$1,450.44
Today
+1 Qty Docs Part Number - Metric Price Available
KPZNFL5/M Support Documentation
KPZNFL5/MNanoFlex™ 5 mm Travel Stage & KPZ101 Piezo Driver, Metric
$1,450.44
Today

NFL5 Series Mounting Adapters

The NFL5P1 and NFL5P2 are adapter plates designed for the NFL5 Series of translation stages. The NFL5P1 is a universal base plate with slots on the side that enable obstruction-free mounting onto an optical breadboard. This base is ideal for XY or XYZ multi-axis configurations where the standard counterbores in the middle of the stages are obstructed.

The NFL5P2 is an angle bracket that allows a NFL5 Series stage to be mounted vertically in 2-axis and 3-axis configurations.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Imperial Price Available
NFL5P1 Support Documentation
NFL5P1NanoFlex™ NFL5D Series Base Plate
$47.94
Today
NFL5P2 Support Documentation
NFL5P2NanoFlex™ NFL5D Series Angle Bracket
$98.94
Today
+1 Qty Docs Part Number - Metric Price Available
NFL5P1/M Support Documentation
NFL5P1/MNanoFlex™ NFL5D Series Base Plate, Metric Taps
$47.94
Today
NFL5P2/M Support Documentation
NFL5P2/MNanoFlex™ NFL5D Series Angle Bracket, Metric Taps
$98.94
5-8 Days

Compatible Power Supplies

  • ±15 V/5 V Power Supply
    • TPS002: For up to Two K-Cubes™ or T-Cubes™
  • USB Controller Hubs Provide Power and Communications
    • KCH301: For up to Three K-Cubes or T-Cubes
    • KCH601: For up to Six K-Cubes or T-Cubes
    • KAP101: Adapter Plate for Connecting 60 mm Wide T-Cubes to KCH Series Hubs
    • KAP102: Adapter Plate for Connecting 120 mm Wide T-Cubes to KCH Series Hubs

The TPS002 supplies power for up to two K-Cubes or T-Cubes. The cubes still need to be connected to a computer individually via a USB cable.

The KCH301 and KCH601 USB Controller Hubs each consist of two parts: the hub, which can support up to three (KCH301) or six (KCH601) K-Cubes or T-Cubes, and a power supply that plugs into a standard wall outlet. The hub draws a maximum current of 10 A; please verify that the cubes being used do not require a total current of more than 10 A. In addition, the hub provides USB connectivity to any docked K-Cube or T-Cube through a single USB connection.

A KAP101 or KAP102 Adapter Plate (sold separately) is required for each T-Cube to operate on the KCH301 or KCH601 controller hub. The KAP101 is designed to adapt 60 mm wide T-Cubes to the hubs, while the KAP102 is designed to adapt 120 mm wide T-Cubes to the hubs.

For more information on the USB Controller Hubs, see the full web presentation.

Please note that our KPS101 Power Supply is not compatible with the controller on this page since it does not offer reversible polarity.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal Price Available
TPS002 Support Documentation
TPS002±15 V/5 V Power Supply Unit for up to Two KPZ101, TNA001/IR, KPA101, KSG101, or TLD001 Modules
$110.16
Today
KCH301 Support Documentation
KCH301USB Controller Hub and Power Supply for Three K-Cubes or T-Cubes
$494.70
Today
KCH601 Support Documentation
KCH601USB Controller Hub and Power Supply for Six K-Cubes or T-Cubes
$598.74
Today
KAP101 Support Documentation
KAP101Adapter Plate for KCH Series Hubs and 60 mm Wide T-Cubes
$57.38
Today
KAP102 Support Documentation
KAP102Adapter Plate for KCH Series Hubs and 120 mm Wide T-Cubes
$62.48
Today
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