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- High-Performance Measurement System in a Compact Footprint
- High-Speed, Non-Contact 3-Axis Coordinate Measurement
- Multisensor: Video, Touch, and Laser Sensors
- Easy & Automated Part Inspection
VSM303
Benchtop Measurement System
305 mm x 305 mm x 200 mm Range
Dimensionally-Accurate Images of an 800 μm Pinhole (Left) and a Printed Circuit Board (Right) at 0.7X Magnification
As Shown at IMTS 2024
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Exploring the Options?
Thorlabs' Benchtop Multisensor Video System is customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, I'd be pleased to provide system recommendations based on your needs.
In the Budgetary Phase?
System prices vary based on the exact components. Through our conversations, we can ensure your system quote is tailored to your requirements.
OEM or Custom Projects?
Click here to learn about our OEM capabilities.
Ike Jariel
General Manager
Thorlabs Measurement Systems
I'm Happy to Assist!
Want a System Demo?
Contact us to demo a system in our showroom or remotely.
Inspection Applications
- Circuit Boards
- Electronics
- Semiconductors
- Computer Components
- Manufacturing
- Solar Panels
- Gaskets
- Stampings
- Medical Devices
Features
- XYZ Measuring Range of 305 mm x 305 mm x 100 mm*
- Large Field of View and Motorized Zoom Lens Capabilities
- Powerful and User-Friendly Metrology Software
- 0.1 µm Linear Encoder Resolution
- CNC and Manual Operation
- High-Resolution Video Sensors for High-Contrast Imaging
- Laser and Tactile Probes for Multisensor Metrology
- Multiple LED Options to Highlight Surface and Edge Features
- Ergonomic Benchtop Workstation
- Advanced, Feature-Rich M3 MetLogix®† Metrology Control Software
Thorlabs’ new VSM303 Benchtop Video Measuring System delivers high-speed, non-contact 3-axis coordinate measurement with industry-leading accuracy within a compact footprint of 30.5" x 35" x 32.5" (775 mm x 890 mm x 825 mm). Despite its reduced size, performance remains at the top of its class, much like our large format VideoMic® machines. This benchtop multisensor measuring instrument provides the same exceptional capability as our large-format systems to verify critical dimensions on first articles, production samples, or entire runs. Automated inspection protocols, application driven optical arrangements, and high-resolution sensors allow for efficient inspection of a diverse range of part types and forms. Tolerance reports and export utilities enable you to make timely production process corrections if necessary, or otherwise provide you the confidence and trust that your product specifications are being met.
Thorlabs offers a wide selection of CMOS cameras, zoom lenses, and lights to customize the video system to the demands of the application. For further details, see the Video Configurations tab above. A number of optional accessories are also available to increase the versatility and functionality of the system. These include Renishaw®‡ tactile probes; laser sensors; a touch screen monitor; statistical process control software; and import/export utilities. See the Accessories tab for additional details about these options.
Please contact TMS-Sales@thorlabs.com for help customizing a measurement system or to inquire about other options.
*This measurement system is under development and all specifications are subject to change.
†MetLogix is a registered trademark of MetLogix, Incorporated.
‡Renishaw is a registered trademark of Renishaw plc.
Exploring the Options?
Thorlabs' Benchtop Multisensor Video System is customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, I'd be pleased to provide system recommendations based on your needs.
Ike Jariel
General Manager
Thorlabs Measurement Systems
Click to View Specifications:
Specifications for our base system as well as our video system options and select accessories are available below. The most popular options are highlighted in green.
For complete details on all of the ways that Thorlabs' Video Systems can be customized, please see the Video Configurations and Accessories tabs or contact us using the link to the right.
Base System
Our Benchtop Video CMM System comes with brushless servos as a standard.
| Specificationsa | ||
|---|---|---|
| XYZ Control | ||
| Stage Bearings | Mechanical | |
| Stage Motors | Linear | |
| Measurement Travel Range | X-Y | 305 mm x 305 mm (12" x 12") |
| Z | 100 mm (4") | |
| Accuracyb | X-Y (E2) |
(2.5 + 5L/1000) µm |
| Z (E1) |
(2.5 + 5L/1000) µm | |
| Velocity | X-Y | 150 mm/s |
| Z | 150 mm/s | |
| Repeatability | Z | ±3 µm (±0.00012") at High Magnification |
| Optical Encoder Resolution | 0.1 µm | |
| Unit Dimensions | ||
| Footprintc | Width | 775 mm (30.5") |
| Depth | 890 mm (35") | |
| Total Height | 825 mm (32.5") | |
| Approximate Weight (Uncrated / Crated) |
90 kg (200 lbs) / 122 kg (270 lbs) | |
| General | ||
| Operating Temperature | Range | 20 ± 0.5 °C (67 - 69 °F) |
| Rate | 0.25 °C/hr (0.5 °F/hr) | |
| Relative Humidity (Non-Condensing) |
30% - 80% | |
| Line Voltage | 115 / 230 VAC, 50 / 60 Hz, Single Phase, 1.0 kW | |
| Camera Specifications | ||
|---|---|---|
| Resolution | 1.3 MP | 5 MP |
| Sensor Type | onsemi®* PYTHON 1300 CMOS Color: NOIP1SE1300A-QDI | Sony®† IMX264 CMOS Color: MX264LQR-C |
| Pixels (H x V) |
1280 x 1024 | 2456 x 2054 |
| Imaging Area (H x V) |
6.14 mm x 4.92 mm | 8.47 mm x 7.09 mm |
| Pixel Size | 4.80 µm x 4.80 µm | 3.45 µm x 3.45 µm |
| Optical Format | 1/2" | 2/3" |
| Frame Rate | 88 fps | 22 fps |
†Sony® is a registered trademark of the Sony Group Corporation.
Click to Enlarge
5 MP Camera
CMOS Cameras
Specifications for our 1.3 MP and 5 MP camera can be found to the right. The most popular option is highlighted in green.
Click to Enlarge
Transmission does not include an auxiliary lens or extension tube. An AR coating minimizes reflections in the visible spectra (about 400 - 700 nm).
Zoom Lenses
A zoom lens system consists of three modules: the zoom lens, an auxiliary lens, and an extension tube. Each module can be viewed in the first three columns of the below tables. Specifications of the entire three part system, including system magnification and field of view, can be found by reading horizontally across from your selection. Note that field of view is dependant on the camera format being used.
The most popular system options are highlighted in green. Please contact TMS-Sales@thorlabs.com if a telecentric zoom lens is required.
Zoom Lenses with Coaxial Light Input
Specifications for a 12X and 6.5X system with a side-mounted coaxial light input will be the same as those in the below tables, however the transmission may drop slightly due to the additional beamsplitter the light must pass though. Additionally, the 0.25X, 0.5X, and 0.75X auxiliary lenses are not compatible with this zoom lens version. The internal coaxial light will illuminate a circular area of 14 mm and 11 mm in diameter for the 12X and 6.5X zoom lenses, respectively. Any field of view (FOV) larger than these values will have darkened corners.
| 12X Zoom Lens System Specifications |
|---|
| 6.5X Zoom Lens System Specifications |
|---|
| Probe Body Options | ||
|---|---|---|
| Series | TP20 | TP200 |
| Sensor Type | Kinematic | Strain Gauge |
| Application | Auto or Manual CMM, Suitable for Most Applications | Auto or Manual CMM with High Accuracy |
| Renishaw Stylus Range |
M2 Threaded | |
| Module Changing Racks | Manual and Motorized | |
Renishaw®* Tactile Probes
Thorlabs' video systems are compatible with most Renishaw TP20 and TP200 series 3-axis, touch-trigger probes. These are sold as a kit that is preconfigured onto the video system. Each kit includes a probe body, probe module, and an optional manual or motorized module changing rack.
Specifications for a selection of Renishaw's probe modules can be found below. Please contact TMS-Sales@thorlabs.com for help in selecting system options or to inquire about other options. The most popular option is highlighted in green.
*Renishaw is a registered trademark of Renishaw plc.
| TP20 Series Probe Options and Specificationsa | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Module | Sense Direction | Pre-Travel Variation |
Unidirectional Repeatability |
Trigger Force (N) (Stylus Lengtha) |
Overtravel Force (N) (Stylus Lengtha) |
Overtravel Displacement |
Repeatability of Stylus Changing |
|||||
| XYb | Z | XY | +Z | -Z | XY (deg.) | +Z (mm) | -Z (mm) | |||||
| Low Force (LF) | ±X, ±Y, +Z | ±0.60 µm | ±0.35 µm | 0.055 | 0.65 | 0.09 | 1.15 | N/A | ±14 | 3.1 | N/A | Motorized: ±0.50 μm Manual: ±1.0 μm |
| Standard Force (SF) | ±0.80 µm | ±0.35 µm | 0.08 | 0.75 | 0.2 - 0.3 | 3.5 | N/A | ±14 | 4 | N/A | ||
| Medium Force (MF) |
±1.00 µm | ±0.50 µm | 0.10 (25 mm) |
1.9 (25 mm) |
0.2 - 0.4 (25 mm) |
7 (25 mm) |
N/A | ±14 | 3.7 | N/A | ||
| Extended Force (EF) | ±2.00 µm | ±0.65 µm | 0.10 (50 mm) |
3.2 (50 mm) |
0.2 - 0.5 (50 mm) |
10 (50 mm) |
N/A | ±14 | 2.4 | N/A | ||
| 6 Way (6W) | ±X, ±Y, ±Z | ±1.50 µm | ±1.00 µm | 0.14 | 1.60 | 0.25 | 2.5 | 9 | ±14 | 4.5 | 1.5 | |
| TP200 Series Probe Options and Specifications | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Module | Sense Direction |
Unidirectional Repeatability |
XY Form Measurement Deviation |
XYZ Form Measurement Deviation |
Trigger Force (N) | Overtravel Forcea (N) | Repeatability of Stylus Changing |
|||||
| Trigger 1 | Trigger 2 | Trigger 1 | Trigger 2 | Trigger 1 | Trigger 2 | XYb | Z | XY | Z | |||
| Low Force (LF) | ±X, ±Y, ±Z | ±0.40 µm | ±0.50 µm | ±0.80 µm | ±0.90 µm | ±1 µm | ±1.4 µm | 0.02 | 0.07 | 0.1 - 0.15 | 1.6 | Motorized: ±0.50 μm Manual: ±1.0 μm |
| Standard Force (SF) | 0.2 - 0.4 | 4.9 | ||||||||||
| Extended Overtravel (EO) |
0.2 - 0.4 | 4.9 | ||||||||||
Laser Sensors
| Triangulation Displacement Sensor Specifications | |||
|---|---|---|---|
| Measuring Range | 25 mm | 50 mm | |
| Measuring Range Spread | Start (SMR) | 25 mm | 35 mm |
| Mid (MMR) | 27.5 mm | 60 mm | |
| End (EMR) | 50 mm | 85 mm | |
| Linearityb | ≤ ±0.08% | ≤ ±0.08% | |
| Repeatability at Measuring Rate | 1 µm | 2 µm | |
| Measuring Rate | 2 kHz | ||
| Spot Diameter (±10%) | SMR | 100 x 140 µm | 90 x 120 µm |
| MMR | 120 x 130 µm | 230 x 240 µm | |
| EMR | 390 x 500 µm | 630 x 820 µm | |
| Minimum | 55 x 50 µm | 70 x 65 µm | |
| Laser Power | <1 mW | ||
| Laser Color | Red (670 nm) | ||
| Laser Safety Class | Class 2 in Accordance with DIN EN 60825-1 : 2008-05 |
||
The Triangulation Displacement Sensor is selected based on its measurement range. Please contact TMS-Sales@thorlabs.com for help in selecting system options or to inquire about other options. The most popular option is highlighted in green.
Customize Your Video System
Exploring the Options?
Thorlabs' Benchtop Multisensor Video System is customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, I'd be pleased to provide system recommendations based on your needs.
Ike Jariel
General Manager
Thorlabs Measurement Systems
A customized video CMM system requires the selection of surface and/or profile lights, a camera, a zoom or bi-telecentric lens system, and a metrology software package. Click on the expandable sections below to browse all of our options to customize your system.
Lighting Options
LED Lighting Options
- Ring Light for Surface Illumination
- Coaxial Light for Surface Illumination with Reduced Reflections
- Quadrant Light for Dark Field Illumination and Variable Angle of Incidence
- Rear Light for Profile Illumination
Each VideoMic® Video Measuring System can be customized with any combination of surface and/or profile lights: Ring, Coaxial, Quadrant, and Rear. Each LED-based lighting option has a lifetime greater than 10 000 hours. All lights are controlled through the software, either manually or programmatically as part of an inspection routine. When the lights are adjusted manually in the software, they are adjusted one at a time. A close-up of each light mounted on a video system can be seen to the right. For assistance selecting lighting options or for questions, please contact TMS-Sales@thorlabs.com.
Surface Lights
Surface lights include our ring, coaxial, and quadrant light fixtures. The ring light has 40 LEDs and is mounted to the end of the zoom lens. This makes it ideal for illuminating the surface features of a part under inspection. For on-axis lighting, which is ideal for imaging highly reflective surfaces and for eliminating shadows, we offer a coaxial light that mounts to the side of our 6.5X or 12X zoom lens. This will require a zoom lens that includes a coaxial input.
Our quadrant light has 96 LEDs that are mounted around its 92 mm (3.63") inner diameter. This allows the LEDs to illuminate at a shallow angle to the surface, minimizing glare. The quadrant light is always mounted alongside the zoom lens system, as shown in the image to the right. It can be fixed in that location, or motorized so that it can be translated along the Z axis independently from the camera and lens system.
Profile Light
Our profile light is situated below the glass on the stage and is connected to the X axis of travel, i.e. it moves with the camera. The profile light's intensity can be controlled directly through the metrology software. This light is required to perform many of the functions supported by our video systems, including edge detection, through-bore detection, and viewing transparent media.
| Lighting Options | Ring | Coaxial | Quadrant | Profile |
|---|---|---|---|---|
| Lighting Style | Top | Top | Top | Bottom |
| Angle of Incidence (AOI) | Off-Axis, High AOI | On-Axis | Off-Axis, Low AOI | N/A, Profile Light |
| Translationa |
N/A | N/A | Optional Z-Axis | N/A |
| LED Control | Manual or Programmatic Software Control | |||
| Applications | Near Coaxial Illumination Near Uniform Illumination Reduce Shadow Effects Surface Feature Analysis |
Reduce Reflections Shadow-Free Image Highly Reflective Objects Surface Feature Analysis |
Dark Field Illumination Edge Illumination Directionalized Illumination Surface Feature Analysis |
Profile Lighting Tapped Holes and Bores Etching and Engravings Transparent Media |
| Light Source | LED | |||
| Color | White, 5500 K | |||
| Lifetime | >10 000 hr | |||
Camera Options
| Camera Options | 1.3 MP | 5 MP |
|---|---|---|
| Sensor Type | onsemi PYTHON 1300 CMOS Color: NOIP1SE1300A-QDI | Sony IMX264 CMOS Color: MX264LQR-C |
| Pixels (H x V) |
1280 x 1024 | 2456 x 2054 |
| Imaging Area (H x V) |
6.14 mm x 4.92 mm | 8.47 mm x 7.09 mm |
| Pixel Size | 4.80 µm x 4.80 µm | 3.45 µm x 3.45 µm |
| Optical Format | 1/2" | 2/3" |
| Frame Rate | 88 fps | 22 fps |
Camera Options
- 1.3 MP CMOS Color Camera with 1/2" Optical Format
- 5 MP CMOS Color Camera with 2/3" Optical Format
Thorlabs offers a 1.3 MP and a 5 MP CMOS color camera for use in our video CMMs. The 1.3 MP option offers a high-quality onsemi®* PYTHON 1300 sensor with a 1/2" optical format and speeds up to 88 fps. It is ideal for quickly imaging a large number of products fixed on the video stage. The 5 MP option offers a high 2456 x 2054 pixel resolution Sony®† IMX264LQR-C sensor with a 2/3" optical format, making it ideal for detailed inspections of small items. The 5 MP camera will operate at a slower, 22 fps speed and will have an increased FOV, comparatively.
Specifications for our 1.3 MP and 5 MP cameras can be found to the right.
For assistance selecting the appropriate camera for your application, please contact TMS-Sales@thorlabs.com.
*onsemi® is a registered trademark of Semiconductor Components Industries, LLC.
†Sony® is a registered trademark of the Sony Group Corporation.
Click to Enlarge
5 MP Camera
Click to Enlarge
Click Here for Full-Size Image
Thorlabs' P800K 800 μm Pinhole Image Captured at 0.7X with a 5 MP Camera in Our Benchtop Video Measurement System
Click to Enlarge
Click Here for Full-Size Image
Printed Circuit Board Image Captured at 0.7X with a 5 MP Camera in Our Benchtop Video Measurement System
Zoom Lens System Options
Click to Enlarge
Transmission does not include an auxiliary lens or extension tube. An AR coating minimizes reflections in the visible spectra (about 400 - 700 nm).
Click for Details
Motorized Zoom Lens System Shown with 12X Zoom Lens and 0.67X Auxiliary Lens
Zoom Lens System Options
- 12X Optical Zoom Lens System
- 0.25X to 2.0X Auxiliary Lenses
- 0.5X to 3.3X Extension Tubes
- 6.5X Optical Zoom Lens System
- 0.25X to 2.0X Auxiliary Lenses
- 0.5X to 5X Extension Tubes
- Each can be Equipped with a Coaxial Light Input Port
A zoom lens system consists of three modules: the zoom lens, an auxiliary lens, and an extension tube. The zoom lens provides the base 6.5X or 12X optical magnification. The auxiliary lens is attached to the end of the zoom lens housing to increase or decrease the base magnification, while the extension tube positions the camera at the image plane with or without additional magnification.
Each module can be viewed in the first three columns of the below tables. Specifications, including system magnification and field of view, can be found by reading horizontally across from your selection. Note that field of view is dependent on the camera format being used.
The most popular system options are highlighted in green. Please contact TMS-Sales@thorlabs.com if a telecentric zoom lens is needed.
Zoom Lenses with Coaxial Light Input
Specifications for a 12X and 6.5X system with a side-mounted coaxial light input will be the same as those in the below tables; however the transmission may drop slightly due to the additional beamsplitter the light must pass through. Additionally, the 0.25X, 0.5X, and 0.75X auxiliary lenses are not compatible with this zoom lens version. The internal coaxial light will illuminate a circular area of 14 mm and 11 mm in diameter for the 12X and 6.5X zoom lenses, respectively. Any field of view (FOV) larger than these values will have darkened corners.
| 12X Zoom Lens System Specifications |
|---|
| 6.5X Zoom Lens System Specifications |
|---|
Bi-Telecentric Lens Options
| Bi-Telecentric Lens Options | 0.128X | 0.243X |
|---|---|---|
| Magnification Tolerance | ±1% | |
| Working Distancea | 179.0 mm | 97.9 mm |
| C-Mount Flange Focal Distance | 17.5 mm | |
| Image Diagonal | 11 mm (2/3" Format) | |
| Max Distortion | 0.16% | 0.10% |
| Depth of Fieldb | ±15 mm | ±11 mm |
| System f/# | f/7 | f/8 |
| Field of View (2/3" Format Sensor)c | 85.9 mm | 45.3 mm |
| Telecentricity | 0.03° | |
| Modulation Transfer Function (MTF)d | >55% | >51% |
| Coherent Transfer Function (CTF)d | >67% | >63% |
| Image NA | 0.071 | 0.062 |
| Object NA | 0.0091 | 0.015 |
| Average Transmittancee | 94% Over 460 - 630 nm | |
Bi-Telecentric Lens Options
- 0.128X Bi-Telecentric Lens for Sensor Formats Up to 2/3"
- 0.243X Bi-Telecentric Lens for Sensor Formats Up to 2/3"
- Provide Constant Magnification Independent of Object Location
Thorlabs offers its own line of bi-telecentric lenses for machine vision applications. These lenses offer magnification in both image and object space that is independent of distance (within the depth of field) or the position in the field of view. This attribute is ideal for machine vision applications: when measuring dimensions, a telecentric lens will yield the same measurement regardless of changes in object distance or position.
Click to Enlarge
0.128X Bi-Telecentric Lens
Software
Click to Enlarge
M3 Software GUI
M3 MetLogix®* Metrology Software
- Program custom routines that control movement, lighting, fixtures, and more.
- The Microsoft Windows® environment is used with on-line help to ease training.
- Programs can be automatically created from CAD data or by recording steps while manually measuring a part.
- Enhanced video edge detection (VED) for selective feature measurement.
- Versatile video edge detection tools such as linewidth, circle, center-of-mass, and buffer that speed the measuring process.
- The system reports position and size of features, allowing optimization of the user’s fabrication process.
- Tolerancing to Cartesian, as well as True Position, LMC, and MMC is provided.
Each VideoMic® Video Measuring System includes the M3 MetLogix® software package. The software supports 2-axis measurements in X and Y, as well as precision Z-axis measurements. Please note that it cannot obtain volumetric 3-axis measurements. Video edge detection (VED) tools permit the calculation of radius, diameter, distance, and angle measurements, as well as auto-alignment of parts under inspection. Unit conversions and nonlinear error corrections are standard.
Integral motion control software permits automatic and semi-automatic measurement and inspection routines as well as graphic interactive part mapping. The system takes full advantage of touch-screen capabilities thereby enhancing the learning process. This package is required if using our triangulation laser sensor.
*MetLogix is a registered trademark of MetLogix, Incorporated.
Optional Accessories
Exploring the Options?
Thorlabs' Benchtop Multisensor Video System is customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, I'd be pleased to provide system recommendations based on your needs.
Ike Jariel
General Manager
Thorlabs Measurement Systems
Thorlabs' video measuring machines can be enhanced with the addition of tactile touch-trigger probes and non-contact laser probes in a single machine. This multisensor capability increases the flexibility of the system, allowing it to precisely measure and inspect the most complex parts without the need to switch systems. Our selection of accessories can be viewed by clicking on the expandable sections below.
Renishaw® Tactile Probe Options
| Probe Body Options | ||
|---|---|---|
| Series | TP20 | TP200 |
| Sensor Type | Kinematic | Strain Gauge |
| Application | Auto or Manual CMM, Suitable for Most Applications | Auto or Manual CMM with High Accuracy |
| Renishaw Stylus Range |
M2 Threaded | M2 Threaded |
| Module Changing Racks | Manual and Motorized | |
Click to Enlarge
A Renishaw TP20 Kinematic Touch-Trigger Probe Shown Mounted Within a Thorlabs Video System
Click to Enlarge
A Selection of LF, SF, and MF Probe Module and M2 Styli with Varying Tip Styles
Renishaw®* Tactile Probe Options
- TP20 Series 3-Axis, Kinematic Touch-Trigger Probes
- TP200 Series 3-Axis, Strain Gauge Touch-Trigger Probes
Thorlabs' video measuring systems are compatible with most Renishaw TP20 and TP200 series 3-axis, touch-trigger probes. These are sold as a kit that is preconfigured onto the video system. Each kit includes a probe body, probe module, stylus, and an optional manual or motorized module changing rack. When mounted onto a video measurement system, the probe assembly can be configured to stay in a fixed location or be motorized so that the system can be retracted when not in use.
TP20 Series
The TP20 series design is modeled on a spring-loaded kinematic arrangement where three rods are each resting within two ball-bearings that are spaced approximately 120° apart. When the stylus contacts a part, an internal spring will resist the slight force but still allow the ball-seats to deflect and pivot. This deflection will trigger a signal to the system to stop the measurement and record the signal.
TP200 Series
The TP200 series uses a similar kinematic mechanism as the TP20 series to retain the stylus; however, it does not utilize that mechanical movement to trigger an event. Instead, a set of silicon-based strain gauges is placed above the kinematic mechanism. These gauges will measure the force of the stylus in any direction and trigger a measurement once the force surpasses a preset value.
Specifications for a selection of Renishaw's probe modules can be found below. Please contact TMS-Sales@thorlabs.com for help customizing a system or to inquire about other options.
*Renishaw is a registered trademark of Renishaw plc.
| TP20 Series Probe Options and Specificationsa | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Module | Sense Direction | Pre-Travel Variation |
Unidirectional Repeatability |
Trigger Force (N) (Stylus Lengtha) |
Overtravel Force (N) (Stylus Lengtha) |
Overtravel Displacement |
Repeatability of Stylus Changing |
|||||
| XYb | Z | XY | +Z | -Z | XY (deg.) | +Z (mm) | -Z (mm) | |||||
| Low Force (LF) | ±X, ±Y, +Z | ±0.60 µm | ±0.35 µm | 0.055 | 0.65 | 0.09 | 1.15 | N/A | ±14 | 3.1 | N/A | Motorized: ±0.50 μm Manual: ±1.0 μm |
| Standard Force (SF) | ±0.80 µm | ±0.35 µm | 0.08 | 0.75 | 0.2 - 0.3 | 3.5 | N/A | ±14 | 4 | N/A | ||
| Medium Force (MF) |
±1.00 µm | ±0.50 µm | 0.10 (25 mm) |
1.9 (25 mm) |
0.2 - 0.4 (25 mm) |
7 (25 mm) |
N/A | ±14 | 3.7 | N/A | ||
| Extended Force (EF) | ±2.00 µm | ±0.65 µm | 0.10 (50 mm) |
3.2 (50 mm) |
0.2 - 0.5 (50 mm) |
10 (50 mm) |
N/A | ±14 | 2.4 | N/A | ||
| 6 Way (6W) | ±X, ±Y, ±Z | ±1.50 µm | ±1.00 µm | 0.14 | 1.60 | 0.25 | 2.5 | 9 | ±14 | 4.5 | 1.5 | |
| TP200 Series Probe Options and Specifications | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Module | Sense Direction |
Unidirectional Repeatability |
XY Form Measurement Deviation |
XYZ Form Measurement Deviation |
Trigger Force (N) | Overtravel Forcea (N) | Repeatability of Stylus Changing |
|||||
| Trigger 1 | Trigger 2 | Trigger 1 | Trigger 2 | Trigger 1 | Trigger 2 | XYb | Z | XY | Z | |||
| Low Force (LF) | ±X, ±Y, ±Z | ±0.40 µm | ±0.50 µm | ±0.80 µm | ±0.90 µm | ±1 µm | ±1.4 µm | 0.02 | 0.07 | 0.1 - 0.15 | 1.6 | Motorized: ±0.50 μm Manual: ±1.0 μm |
| Standard Force (SF) | 0.2 - 0.4 | 4.9 | ||||||||||
| Extended Overtravel (EO) |
0.2 - 0.4 | 4.9 | ||||||||||
Laser Sensor
Triangulation Displacement Laser Sensor
Thorlabs offers a triangulation displacement sensor (TDS), which provides high-precision distance, surface contour, 2D profile, and thickness measurements.
The TDS determines the target's position by measuring the reflected light from the target's surface using an internal CCD detector. This light collection is not co-linear, i.e. there is a fixed angle between the beam output and the collection optic. This design allows the sensor to have a larger standoff.
The TDS does not use an objective, but is chosen by its direct measurement range. Please contact TMS-Sales@thorlabs.com for help in selecting system options or to inquire about other options.
Triangulation laser being used to measure the surface flatness of Thorlabs optic mount's front plate.
| Triangulation Displacement Sensor Specifications | |||
|---|---|---|---|
| Measuring Rangea | 25 mm | 50 mm | |
| Measuring Range Spread | Start (SMR) | 25 mm | 35 mm |
| Mid (MMR) | 27.5 mm | 60 mm | |
| End (EMR) | 50 mm | 85 mm | |
| Linearityb | ≤ ±0.08% | ≤ ±0.08% | |
| Repeatability at Measuring Rate | 1 µm | 2 µm | |
| Measuring Rate | 2 kHz | ||
| Spot Diameter (±10%) | SMR | 100 x 140 µm | 90 x 120 µm |
| MMR | 120 x 130 µm | 230 x 240 µm | |
| EMR | 390 x 500 µm | 630 x 820 µm | |
| Minimum | 55 x 50 µm | 70 x 65 µm | |
| Laser Power | <1 mW | ||
| Laser Color | Red (670 nm) | ||
| Laser Safety Class | Class 2 in Accordance with DIN EN 60825-1 : 2008-05 |
||
CPU Software and Hardware
CPU Software and Hardware Upgrades
- Import and Export Software Utilities
- Statistical Process Control EXCEL®-Baseda Software Package
- Touch Screen Monitor
Thorlabs offers upgrades to the included LCD monitor and software. Please contact TMS-Sales@thorlabs.com for questions about any of these options.
Import and Export Software Utilities
These file conversion utilities are used to import and export a broader range of file types that include CAD, artwork, as well as drill and rout files.
Statistical Process Control (SPC) Software Package
An SPC program includes tools and procedures to take control of process behaviors, internal system errors, and production issues. This is an EXCEL-based package that can be added to any video system.
Monitor Options and System Placement
A standard 24" LCD monitor is included with each base system. The monitor can also be upgraded to include a touch screen or to be a larger 30" diagonal size.
- EXCEL is a registered trademark of Microsoft Corporation.
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