Video Measurement System, Multisensor

High-Speed, Non-Contact 3-Axis Coordinate Measurement
Superior Stability and Accuracy from Granite Base and Gantry
Multisensor: Video, Touch, and Laser Sensors
High-Accuracy Air or Mechanical Bearings

VSA463

Video Measurement System
305 mm x 305 mm x 200 mm Range
Shown with Coaxial Light and Touch Probe

VSA713

Video Measurement System
711 mm x 610 mm x 200 mm Range
Shown with Adjustable Quadrant Light

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Overview
Base Systems
Video Configurations
Accessories
Specs
Feedback

Exploring the Options?

Thorlabs' Multisensor Video Systems are customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, please use the Contact Me button below and to the left. Our Measurement Systems Team is happy to help and can provide system recommendations based on your needs.

In the Budgetary Phase?

System prices vary based on the exact components. Through our conversations, we can ensure your system quote is tailored to your requirements.

OEM or Custom Projects?

Click here to learn about our OEM capabilities.

Ike Jariel
General Manager
Thorlabs Measurement Systems

I'm Happy to Assist!

Want a System Demo?

Inspection Applications

Circuit Boards
Electronics
Semiconductors
Computer Components
Manufacturing
Solar Panels
Gaskets
Stampings
Medical Devices

Features

XYZ Measuring Range Options:
- 305 mm x 305 mm x 200 mm (Linear Motor)
- 460 mm x 305 mm x 200 mm (Linear or Servo Motor)
- 711 mm x 610 mm x 200 mm (Linear or Servo Motor)
- 965 mm x 760 mm x 200 mm (Linear Motor)
- 1270 mm x 915 mm x 200 mm (Linear Motor)
All Systems Offer CNC and Manual Operation
High-Resolution Video Sensors for High-Contrast Imaging
Laser and Tactile Probes for Multisensor Metrology
Multiple LED Options to Highlight Surface and Edge Features
Stable Granite Base Ensures High Accuracy and Repeatability
Floor-Standing, Ergonomic Workstation for Simple and Convenient Operation
Advanced, Feature-Rich M3 MetLogix^®a Metrology Control Software

This video outlines the features, options, and accessories for our line of VideoMic^® video measurement systems.

Build Your Coordinate Measuring Machine

Select a Base System (Required, See Base Systems tab for Details)
Select Video System Options (Required, See Video Configurations tab for Details)
- Camera, Zoom Lens, Lighting, and Software
Select Additional Sensors and Accessories (Optional, See Accessories tab for Details)
- Touch Probes, Laser Sensors, Glass Platen, Software, and CPU Upgrades

Thorlabs' VideoMic^® video measuring systems provide high-speed, non-contact 3-axis coordinate measurement with industry-leading accuracy. These multisensor measuring machines can easily verify critical dimensions on first articles, production samples, or entire runs. Automated inspection protocols utilize the system's large field of view and high-resolution sensors to easily inspect large volumes of parts sequentially or simultaneously. With tolerance reports and export utilities, thresholds can be set to enable timely corrections to a production process or, when necessary, interruption of production to minimize scrap. With over 1000 systems installed worldwide, each system has a long lifetime, is completely modular, and can easily scale with the demands of any quality assurance or production facility.

Seven base systems are available, each utilizing a granite, split-axis base and gantry; see the Base Systems tab for details. Item numbers beginning with VSA utilize balanced linear motors with air bearings to position each axis of travel, while item numbers beginning with VSM utilize servo-driven ground-ball-screws to position each axis of travel. Each of the three motor axes and associated encoders are bonded directly onto the granite to create a system that is extremely accurate, stable, and resistant to environmental factors.

Once a base system is selected, Thorlabs offers a wide selection of CCD cameras, zoom lenses, and lights to customize the video system to the demands of the application. For further details, see the Video Configurations tab above. A number of optional accessories are also available to increase the versatility and functionality of the system. These include Renishaw^®b tactile probes; laser sensors; a hinged, pneumatic glass platen; a touch screen monitor; statistical process control software; and import/export utilities. See the Accessories tab for additional details about these options.

Please contact TMS-Sales@thorlabs.com for help selecting or customizing a base system or to inquire about other options.

MetLogix is a registered trademark of MetLogix, Inc.
Renishaw is a registered trademark of Renishaw plc.

Exploring the Options?

Our base systems can be customized to meet the needs of your application. If you would like a custom system, e.g. longer travel range, or would like to discuss our options, please contact me. Our team can provide system recommendations based on your needs.

Ike Jariel
General Manager
Measurement Systems

Base System Options^a
Base System Item #	VSA303	VSA463	VSM463	VSA713	VSM713	VSA963	VSA1273
Stage Bearings	Air	Air	Mechanical	Air	Mechanical	Air	Air
Stage Motors	Linear	Linear	Servo	Linear	Servo	Linear	Linear
XY Measuring Range	305 mm x 305 mm (12" x 12")	460 mm x 305 mm (18" x 12")		711 mm x 610 mm (28" x 24")		965 mm x 760 mm (38" x 30")	1270 mm x 915 mm (50" x 36")
Z Measuring Range	200 mm (8")
Typical Unit Dimensions

For complete specifications, please see the Specs tab.

Click to Enlarge
A VSA713 Video CMM System with the Hood Removed
(Shown with a Subset of Video System Options and Accessories: 12X Zoom Lens System and 0.67X Extension Tube, 1.3 MP Camera, Motorized Quadrant Light, Ring Light, Profile Light, M3 Software, and a Pneumatic Glass Platen)

Base System Features

All base CMM systems utilize a split-axis gantry design wherein the Y-axis (stage) extends below a granite bridge that supports both the X- and Z-axes (imaging system and lights) of travel. Granite, a material commonly used in quality control and metrology departments, provides a number of advantages for long-travel stages, such as those utilized in our video CMM systems. Granite will resist changes in environmental temperature due to its low coefficient of thermal expansion; exhibits minimal warping over time, particularly over longer distances; and can be made extremely flat to create a near-ideal 2D plane.

Small and large format systems are offered to support any application. The smallest format, offering an XY measuring range of 305 mm x 305 mm (12" x 12"), is ideal for facilities with lower volumes or smaller parts to be inspected. Our largest format, offering an XY measuring range of 1270 mm x 915 mm (50" x 36"), is designed for high-volume, high-throughput facilities with large or small parts to inspect.

Click to Enlarge
VSA Series' Non-Contact Magnetic Track Shown Above the Gold 0.10 µm Encoder

Granite-Bonded Translator and Encoder
Each motor axis and associated encoder are bonded directly onto the granite, with the X- and Z-axes engineered onto the gantry and the Y-axis built onto the base. This geometry reduces the amount of machined components throughout the closed-loop control system, which increases the stiffness of the system and reduces the working distance of the Y-axis stage off the base and camera system off the gantry. Decreasing the working distance results in a compact design that reduces the Abbe error for enhanced positioning performance.

Each axis is center-driven to reduce the influence of off-axis forces. This reduces wear and tear and improves the overall functionality of motors in each axis. When air bearings are used, a granite center guide can be seen under the Y-axis stage that the air bearings float on, as shown in the image to the right. This guide must be offset to the side in order to properly center-drive the stage when using this bearing type.

Motor and Bearing Options
Base item numbers beginning with VSA utilize balanced, non-contact, magnetic linear motors with air bearings to position each axis of travel, while item numbers beginning with VSM utilize brushless, servo-driven ground-ball-screws to position each axis of travel. Both options will position the stages accurately, quietly, and quickly.

Click to Enlarge
VSA series systems include frictionless air bearings that do not wear or require lubrication. A clean source of pressurized air or nitrogen is required.

Air bearings will not wear, do not require lubrication, and do not generate any particulates during use and thus will require less long-term maintenance. Air bearings are not recommended for unclean environments where dust, dirt, debris, or other fluids may be present. They will also require a source of clean, pressurized air or nitrogen. It is recommended to lubricate the mechanical bearings and rails periodically.

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Each control panel includes a joystick and trackball for control. The trackball provides a superior feel for smaller, precision movements.

Ergonomic Workstation Design
Each VideoMic^® system includes a workstation that can be rotated or vertically adjusted for most operator heights. The workstation has a 21.5" LCD monitor, keyboard, mouse, and control panel. The control panel, shown in detail in the image to the left, includes a joystick and trackball to manually position the stage and camera, an emergency stop switch, a power button to turn the entire system on or off, two sets of three buttons to configure the actions of the joystick or trackball, and enter/ok buttons for selecting data.

Joystick and Trackball
The joystick and trackball can both be used at any time to control the motion of the stage and the camera system mounted on the gantry. When to use one or the other is operator dependent; however, the trackball is designed to minimize the signal delay between its movement and the system's response, allowing operators to have a high level of precise control over their actions. The joystick can be configured for two or three axis adjustments. If a three-axis joystick is chosen, rotating the handle left or right will translate the Z-axis position of the camera assembly.

Control Buttons
A set of three equivalent control buttons are included under both the joystick and track ball. From left to right these are a Z-axis toggle, axis lock, and fine position toggle. The light under each will turn green when a specific button is active. The Z-axis toggle will switch the joystick or trackball function from X/Y to Z. If a three-axis joystick is chosen this will only affect the trackball. The axis lock button is used to toggle between single-axis linear motions. The fine position toggle reduces the responsivity of the joystick and trackball to aid in fine positioning of the system. The enter and ok buttons are used to quickly access the software controls, allowing operators to quickly select data points (measurement positions) and create inspection protocols.

Emergency Stop
This button will cut power to the entire machine and should only be used in case of emergency.

Customize Your Video System

Exploring the Options?

Thorlabs' Multisensor Video Systems are customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, please contact me. Our Measurement Systems Team is happy to help and can provide system recommendations based on your needs.

Ike Jariel
General Manager
Thorlabs Measurement Systems

A customized video CMM system requires the selection of surface and/or profile lights, a camera, a zoom lens system, and a metrology software package. Click on the expandable sections below to browse all of our options to customize your system.

Thorlabs' video system inspecting a metal stamping. A motorized quadrant light was used to illuminate the surface of the stamping.

Lighting Options

Click for Details
Each Lighting Option Shown Installed on
Thorlabs' VideoMic CMM

LED Lighting Options

Ring Light for Surface Illumination
Coaxial Light for Surface Illumination with Reduced Reflections
Quadrant Light for Dark Field Illumination and Variable Angle of Incidence
Rear Light for Profile Illumination

Each VideoMic^® Video Measuring System can be customized with any combination of surface and/or profile lights: Ring, Coaxial, Quadrant, and Rear. Each LED-based lighting option has a lifetime greater than 10 000 hours. All lights are controlled through the software, either manually or programmatically as part of an inspection routine. When the lights are adjusted manually in the software, they are adjusted one at a time. A close-up of each light mounted on a video system can be seen to the right. For assistance selecting lighting options or for questions, please contact TMS-Sales@thorlabs.com.

Surface Lights
Surface lights include our ring, coaxial, and quadrant light fixtures. The ring light has 40 LEDs and is mounted to the end of the zoom lens. This makes it ideal for illuminating the surface features of a part under inspection. For on-axis lighting, which is ideal for imaging highly reflective surfaces and for eliminating shadows, we offer a coaxial light that mounts to the side of our 6.5X or 12X zoom lens. This will require a zoom lens that includes a coaxial input.

Our quadrant light has 96 LEDs that are mounted around its 92 mm (3.63") inner diameter. This allows the LEDs to illuminate at a shallow angle to the surface, minimizing glare. The quadrant light is always mounted alongside the zoom lens system, as shown in the image to the right. It can be fixed in that location, or motorized so that it can be translated along the Z axis independently from the camera and lens system.

Profile Light
Our profile light is situated below the glass on the stage and is connected to the X axis of travel, i.e. it moves with the camera. The profile light's intensity can be controlled directly through the metrology software. This light is required to perform many of the functions supported by our video systems, including edge detection, through-bore detection, and viewing transparent media.

Lighting Options	Ring	Coaxial	Quadrant	Profile
Lighting Style	Top	Top	Top	Bottom
Angle of Incidence (AOI)	Off-Axis, High AOI	On-Axis	Off-Axis, Low AOI	N/A, Profile Light
Translation^a	N/A	N/A	Optional Z-Axis	N/A
LED Control	Manual or Programmatic Software Control
Applications	Near Coaxial Illumination Near Uniform Illumination Reduce Shadow Effects Surface Feature Analysis	Reduce Reflections Shadow-Free Image Highly Reflective Objects Surface Feature Analysis	Dark Field Illumination Edge Illumination Directionalized Illumination Surface Feature Analysis	Profile Lighting Tapped Holes and Bores Etching and Engravings Transparent Media
Light Source	LED
Color	White, 5500 K
Lifetime	>10 000 hr

Additional Control Independent of Camera (Gantry XZ) and Stage Movement

Camera Options

Click to Enlarge
Click Here for Full-Size Image*
10 kΩ resistor and diode surface mounted to a circuit board, imaged using a low-magnification objective with reflected illumination from a ring light and color camera.

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1.3 MP Camera

Camera Options

1.3 MP CCD Color Camera with 1/3" Optical Format
5 MP CCD Color Camera with 2/3" Optical Format

Thorlabs offers a 1.3 MP and a 5 MP CCD color camera for use in our video CMMs. The 1.3 MP option offers a high-quality ICX424AQ sensor with a 1/3" optical format and speeds up to 40 fps. It is ideal for quickly imaging a large number of products fixed on the video stage. The 5 MP option offers a high 2536 x 2068 pixel resolution ICX625AQ sensor with a 2/3" optical format, making it ideal for detailed inspections of small items. The 5 MP camera will operate at a slower, 15 fps speed and will have a increased FOV, comparatively.

Specifications for our 1.3 MP and 5 MP cameras can be found below, with plots to the right of the table showing each camera's sensitivity to wavelengths in the visible spectra.

For assistance selecting the appropriate camera for your application, please contact TMS-Sales@thorlabs.com.

*The full-size download of the circuit board image to the right should be viewed using ThorCam, ImageJ, or other scientific imaging software. It may not be displayed correctly in general-purpose image viewers.

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5 MP Camera Response with Included IR Filter

Click to Enlarge
1.3 MP Camera Response with Included IR Filter

Camera Options	1.3 MP	5 MP
Sensor Type	Interline SXGA Progressive Color CCD: ICX424AQ	Interline QSXGA Progressive Color CCD: ICX625AQ
Pixels (H x V)	1348 x 976	2536 x 2068
Active Pixels (H x V)	1280 x 966	2448 x 2058
Imaging Area (H x V)	4.8 mm x 3.6 mm	8.4 mm x 7.1 mm
Pixel Size	3.75 µm x 3.75 µm	3.45 µm x 3.45 µm
Optical Format	1/3"	2/3"
Frame Rate	40 fps	15 fps
Filter	IR Cut-On Filter
Video Output Format	Digital 8, 10, or 12 bit Raw Data or RGB 8 bit

Zoom Lens System Options

Click to Enlarge
Transmission does not include an auxiliary lens or extension tube. An AR coating minimizes reflections in the visible spectra (about 400 - 700 nm).

Click for Details
Motorized Zoom Lens System Shown with 12X Zoom Lens and 0.67X Auxiliary Lens

Zoom Lens System Options

12X Optical Zoom Lens System
- 0.25X to 2.0X Auxiliary Lenses
- 0.5X to 3.3X Extension Tubes
6.5X Optical Zoom Lens System
- 0.25X to 2.0X Auxiliary Lenses
- 0.5X to 5X Extension Tubes
Each can be Equipped with a Coaxial Light Input Port

A zoom lens system consists of three modules: the zoom lens, an auxiliary lens, and an extension tube. The zoom lens provides the base 6.5X or 12X optical magnification. The auxiliary lens is attached to the end of the zoom lens housing to increase or decrease the base magnification, while the extension tube positions the camera at the image plane with or without additional magnification.

Each module can be viewed in the first three columns of the below tables. Specifications, including system magnification and field of view, can be found by reading horizontally across from your selection. Note that field of view is dependent on the camera format being used.

The most popular system options are highlighted in green. Please contact TMS-Sales@thorlabs.com if a telecentric zoom lens is needed.

Zoom Lenses with Coaxial Light Input
Specifications for a 12X and 6.5X system with a side-mounted coaxial light input will be the same as those in the below tables; however the transmission may drop slightly due to the additional beamsplitter the light must pass through. Additionally, the 0.25X, 0.5X, and 0.75X auxiliary lenses are not compatible with this zoom lens version. The internal coaxial light will illuminate a circular area of 14 mm and 11 mm in diameter for the 12X and 6.5X zoom lenses, respectively. Any field of view (FOV) larger than these values will have darkened corners.

12X Zoom Lens System Specifications

Zoom Lens	Auxiliary Lens Options	Extension Tube Options	System Optical Magnification	Field of View^a (mm) (High - Low)	Matching Pixel Size^b (µm) (Low - High)	Working Distance (mm)	Resolving Limit (µm) (Low - High)	Depth of Field (Low - High)
12X	0.25X^c	0.5X	0.07 - 0.87	1/3": 85.71 - 6.89	2.33 - 5.8	341	66.66 - 13.34	20.00 - 0.80
		0.67X	0.10 - 1.17	2/3": 72.00 - 9.35^d 1/3": 61.73 - 5.10	3.33 - 7.80
		1.00X	0.15 - 1.75	2/3": 75.88 - 6.28 1/3": 41.38 - 3.42	5.00 - 11.67
		1.33X	0.19 - 2.33	2/3": 57.89 - 4.72 1/3": 31.57 - 2.57	6.33 - 15.54
		2.0X	0.29 - 3.50	2/3": 37.94 - 3.14 1/3": 20.69 - 1.71	9.67 - 23.34
		3.3X	0.48 - 5.78	2/3": 22.99 - 1.90 1/3": 12.54 - 1.04	16.59 - 40.53
	0.50X^c	0.5X	0.14 - 1.75	1/3": 42.85 - 3.42	2.59 - 5.82	165	37.04 - 6.66	6.17 - 0.19
		0.67X	0.19 - 2.35	2/3": 36.0 - 4.68^d 1/3": 30.87 - 2.55	3.60 - 7.68
		1.00X	0.29 - 3.50	2/3": 37.94 - 3.14 1/3": 20.69 - 1.71	5.38 - 11.45
		1.33X	0.39 - 4.66	2/3": 18.96 - 1.57 1/3": 10.34 - 0.85	7.22 - 15.51
		2.0X	0.58 - 7.00	2/3": 18.97 - 1.57 1/3": 10.34 - 0.86	10.74 - 22.89
		3.3X	0.96 - 11.55	2/3": 11.50 - 0.95 1/3": 6.27 - 0.52	16.64 - 50.60
	0.75X^c	0.5X	0.22 - 2.62	1/3": 27.27 - 2.29	2.61 - 5.81	108	23.80 - 4.44	2.55 - 0.09
		0.67X	0.29 - 3.52	2/3": 24.3 - 3.12^d 1/3": 20.58 - 1.70	3.45 - 7.73
		1.00X	0.44 - 5.25	2/3": 25.30 - 2.09 1/3": 13.79 - 1.14	5.24 - 11.52
		1.33X	0.58 - 6.98	2/3": 18.96- 1.57 1/3": 10.34 - 0.85	6.90 - 15.49
		2.0X	0.87 - 10.50	2/3": 12.64 - 1.05 1/3": 6.89 - 0.57	10.35 - 23.05
		3.3X	1.44 - 17.33	2/3": 7.67 - 0.63 1/3": 4.18 - 0.35	16.62 - 46.34
	None (1.0X)	0.5X	0.29 - 3.49	1/3": 20.69 - 1.72	2.68 - 5.82	86	18.52 - 3.34	1.39 - 0.05
		0.67X	0.39 - 4.69	2/3": 18.20 - 2.34^d 1/3": 15.44 - 1.28	3.42 - 7.74
		1.00X	0.58 - 7.00	2/3": 18.79 - 1.57 1/3": 10.34 - 0.86	5.09 - 11.55
		1.33X	0.77 - 9.31	2/3": 14.28 - 1.18 1/3": 7.79 - 0.64	7.13 - 5.54
		2.0X	1.16 - 14.00	2/3": 9.49 - 0.78 1/3": 5.18 - 0.43	10.17 - 23.10
		3.3X	1.91 - 23.10	2/3": 5.75 - 0.48 1/3": 3.13 - 0.26	16.60 - 40.54
	1.5X	0.5X	0.43 - 5.23	1/3": 13.95 - 1.14	2.65 - 5.85	50	12.34 - 2.24	0.64 - 0.02
		0.67X	0.58 - 7.04	2/3": 12.20 - 1.55^d 1/3": 10.29 - 0.85	3.45 - 7.78
		1.00X	0.87 - 10.50	2/3": 12.64 - 1.05 1/3": 6.89 - 0.57	5.18 - 11.60
		1.33X	1.16 - 14.00	2/3": 9.48 - 0.78 1/3": 5.17 - 0.44	7.15 - 15.68
		2.0X	1.74 - 21.00	2/3": 6.33 - 0.52 1/3": 3.45 - 0.29	10.74 - 23.34
		3.3X	2.87 - 34.65	2/3": 3.83 - 0.323 1/3": 2.09 - 0.17	16.62 - 40.77
	2.0X	0.5X	0.58 - 6.98	1/3": 10.34 - 0.85	2.61 - 5.79	37	9.00 - 1.66	0.35 - 0.01
		0.67X	0.78 - 9.38	2/3": 9.10 - 1.17^d 1/3": 7.72 - 0.64	3.42 - 7.79
		1.00X	1.16 - 14.00	2/3": 9.49 - 0.78 1/3": 5.18 - 0.43	5.09 - 11.62
		1.33X	1.54 - 18.60	2/3": 7.14 - 0.59 1/3": 3.89 - 0.32	6.93 - 15.43
		2.0X	2.32 - 28.00	2/3": 4.75 - 0.40 1/3": 2.59 - 0.22	10.17 - 23.24
		3.3X	3.83 - 46.20	2/3": 2.88 - 0.24 1/3": 1.57 - 0.13	16.56 - 36.04
FOV values are measured diagonally where Horizontal FOV = Diagonal FOV x 0.8 and Vertical FOV = Diagonal FOV x 0.6. FOV values will change depending on the camera format chosen; values for 1/3" and 2/3" camera formats are provided. Matching pixel size (MPS) is that which will permit the minimum feature size to overlap two pixels, where MPS = 1/2 x (Feature Size x System Magnification) These options are not compatible with a zoom lens that has a coaxial light input. Vignetting occurs at zoom settings less than 0.9X

6.5X Zoom Lens System Specifications

Zoom Lens	Auxiliary Lens Options	Extension Tube Options	System Optical Magnification	Field of View (mm) (High - Low)	Matching Pixel Size (µm) (Low - High)	Working Distance (mm)	Resolving Limit (µm) (Low - High)	Depth of Field (Low - High)
6.5X	0.25X	0.5X	0.09 - 0.56	2/3": 91.40 - 19.52 1/3": 68.64 - 10.64	2.50 - 5.19	300	55.56 - 18.52	13.89 - 1.54
		0.67X	0.12 - 0.75	2/3": 93.62 - 14.66 1/3": 51.12 - 8.04	3.33 - 6.95
		1.00X	0.18 - 1.13	2/3": 62.84 - 9.76 1/3": 34.52 - 9.76	5.00 - 10.46
		1.33X	0.23 - 1.51	2/3": 47.25 - 7.34 1/3": 25.80 - 4.0	6.65 - 13.91
		2.0X	0.35 - 2.25	2/3": 31.42 - 4.88 1/3": 17.16 - 2.66	15.29 - 28.93
		3.3X	0.58 - 3.71	2/3": 19.04 - 2.96 1/3": 10.40 - 1.61	16.59 - 40.53
		5.0X	0.88 - 5.62	2/3": 12.56 - 1.96 1/3": 6.88 - 1.08	24.45 - 52.04
	0.50X	0.5X	0.18 - 1.13	2/3": 45.70 - 9.76 1/3": 34.32 - 5.32	2.73 - 5.38	175	30.30 - 9.52	4.13 - 0.41
		0.67X	0.23 - 1.50	2/3": 46.81 - 7.33 1/3": 25.56 - 4.00	3.48 - 7.14
		1.00X	0.35 - 2.25	2/3": 31.43 - 4.89 1/3": 17.16 - 2.67	5.30 - 10.71
		1.33X	0.47 - 3.03	2/3": 23.63 - 3.68 1/3": 12.90 - 2.01	7.05 - 14.24
		2.0X	0.70 - 4.50	2/3": 15.71 - 2.44 1/3": 8.58 - 1.33	10.61 - 21.42
		3.3X	1.16 - 7.43	2/3": 9.52 - 1.48 1/3": 5.20 - 0.81	15.44 - 39.08
		5.0X	1.75 - 11.25	2/3": 6.29 - 0.98 1/3": 3.43 - 0.53	26.51 - 53.55
	0.75X	0.5X	0.26 - 1.69	2/3": 30.50 - 6.52 1/3": 22.86 - 3.56	2.55 - 5.32	113	19.62 - 6.28	1.73 - 0.18
		0.67X	0.35 - 2.25	2/3": 31.21 - 4.89 1/3": 17.04 - 2.67	3.43 - 7.08
		1.00X	0.53 - 3.38	2/3": 20.95 - 3.26 1/3": 11.43 - 1.78	5.20 - 10.63
		1.33X	0.70 - 4.54	2/3": 15.75 - 2.45 1/3": 8.59 - 1.34	6.92 - 14.13
		2.0X	1.05 - 6.75	2/3": 10.48 - 1.63 1/3": 5.72 - 0.89	10.30 - 21.23
		3.3X	1.73 - 11.14	2/3": 6.35 - 0.99 1/3": 3.46 - 0.54	15.36 - 33.31
		5.0X	2.63 - 16.88	2/3": 4.19 - 0.65 1/3": 2.29 - 0.35	25.74 - 53.09
	None (1.0X)	0.5X	0.35 - 2.25	2/3": 22.90 - 4.89 1/3": 17.16 - 2.67	2.54 - 5.28	92	14.50 - 4.70	0.95 - 0.10
		0.67X	0.47 - 3.00	2/3": 23.40 - 3.65 1/3": 12.77 - 2.01	3.41 - 7.04
		1.00X	0.70 - 4.50	2/3": 15.71 - 2.44 1/3": 8.58 - 1.33	5.08 - 10.55
		1.33X	0.93 - 6.05	2/3": 11.81 - 1.83 1/3": 6.45 - 1.00	6.76 - 14.03
		2.0X	1.40 - 9.00	2/3": 7.86 - 1.22 1/3": 4.29 - 0.67	10.15 - 21.11
		3.3X	2.31 - 14.85	2/3": 4.76 - 0.74 1/3": 2.60 - 0.40	15.29 - 29.11
		5.0X	3.50 - 22.50	2/3": 3.14 - 0.49 1/3": 1.72 - 0.27	25.38 - 52.76
	1.5X	0.5X	0.53 - 3.38	2/3": 15.00 - 3.26 1/3": 11.43 - 1.78	2.60 - 5.32	51	9.80 - 3.14	0.43 - 0.04
		0.67X	0.70 - 4.50	2/3": 15.60 - 2.44 1/3": 8.52 - 1.33	3.43 - 7.09
		1.00X	1.05 - 6.75	2/3": 10.48 - 1.63 1/3": 5.72 - 0.89	5.15 - 10.63
		1.33X	1.40 - 9.08	2/3": 7.88 - 1.22 1/3": 4.3 - 0.67	6.85 - 14.14
		2.0X	2.10 - 13.50	2/3": 5.24 - 0.81 1/3": 2.86 - 0.44	10.29 - 21.26
		3.3X	3.47 - 22.28	2/3": 3.18 - 0.49 1/3": 1.73 - 0.27	15.29 - 28.92
		5.0X	5.25 - 33.75	2/3": 2.10 - 0.33 1/3": 1.14 - 0.18	25.73 - 53.16
	2.0X	0.5X	0.70 - 4.50	2/3": 11.40 - 2.44 1/3": 8.58 - 1.33	2.54 - 5.29	36	7.24 - 2.34	0.24 - 0.02
		0.67X	0.94 - 6.00	2/3": 11.70 - 1.83 1/3": 6.39 - 1.00	3.41 - 7.05
		1.00X	1.40 - 9.00	2/3": 7.86 - 1.22 1/3": 4.29 - 0.67	5.08 - 10.58
		1.33X	1.86 - 12.10	2/3": 5.91 - 0.92 1/3": 3.22 - 0.50	6.76 - 14.07
		2.0X	2.80 - 18.00	2/3": 3.93 - 0.61 1/3": 2.15 - 0.33	10.15 - 21.15
		3.3X	4.62 - 29.70	2/3": 2.38 - 0.37 1/3": 1.30 - 0.14	15.30 - 28.70
		5.0X	7.00 - 45.00	2/3": 1.57 - 0.24 1/3": 0.86 - 0.13	25.38 - 52.88
FOV values are measured diagonally where Horizontal FOV = Diagonal FOV x 0.8 and Vertical FOV = Diagonal FOV x 0.6. FOV values will change depending on the camera format chosen; values for 1/3" and 2/3" camera formats are provided. Matching pixel size (MPS) is that which will permit the minimum feature size to overlap two pixels, where MPS = 1/2 x (Feature Size x System Magnification) These options are not compatible with a zoom lens that has a coaxial light input. Vignetting occurs at zoom settings less than 0.9X

Software

Click to Enlarge
M3 Software GUI

M3 MetLogix^® Metrology Software

Program custom routines that control movement, lighting, fixtures, and more.
The Microsoft Windows^® environment is used with on-line help to ease training.
Programs can be automatically created from CAD data or by recording steps while manually measuring a part.
Enhanced video edge detection (VED) for selective feature measurement.
Versatile video edge detection tools such as linewidth, circle, center-of-mass, and buffer that speed the measuring process.
The system reports position and size of features, allowing optimization of the user’s fabrication process.
Tolerancing to Cartesian, as well as True Position, LMC, and MMC is provided.

Each VideoMic^® Video Measuring System includes the M3 MetLogix^® software package. The software supports 2-axis measurements in X and Y, as well as precision Z-axis measurements. Please note that it cannot obtain volumetric 3-axis measurements. Video edge detection (VED) tools permit the calculation of radius, diameter, distance, and angle measurements, as well as auto-alignment of parts under inspection. Unit conversions and nonlinear error corrections are standard.

Integral motion control software permits automatic and semi-automatic measurement and inspection routines as well as graphic interactive part mapping. The system takes full advantage of touch-screen capabilities thereby enhancing the learning process. This package is required if using our triangulation laser sensor.

Optional Accessories

Exploring the Options?

Thorlabs' Multisensor Video Systems are customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, please contact me. Our Measurement Systems Team is happy to help and can provide system recommendations based on your needs.

Ike Jariel
General Manager
Thorlabs Measurement Systems

Thorlabs' video measuring machines can be enhanced with the addition of tactile touch-trigger probes and non-contact laser probes in a single machine. This multisensor capability increases the flexibility of the system, allowing it to precisely measure and inspect the most complex parts without the need to switch systems. Our selection of accessories can be viewed by clicking on the expandable sections below.

Thorlabs video system inspecting a production item with a Renishaw^® touch-trigger probe.

Renishaw^® Tactile Probe Options

Probe Body Options
Series	TP20	TP200	SP600
Sensor Type	Kinematic	Strain Gauge	Scanning
Application	Auto or Manual CMM, Suitable for Most Applications	Auto or Manual CMM with High Accuracy	High-Speed, Contact Form Scanning and Fast Point Measurement Applications
Renishaw Stylus Range	M2 Threaded	M2 Threaded	M3 Threaded
Module Changing Racks	Manual and Motorized

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A Renishaw TP20 Kinematic Touch-Trigger Probe Shown Mounted Within a Thorlabs Video System

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A Selection of LF, SF, and MF Probe Module and M2 Styli with Varying Tip Styles

Renishaw^® Tactile Probe Options

TP20 Series 3-Axis, Kinematic Touch-Trigger Probes
TP200 Series 3-Axis, Strain Gauge Touch-Trigger Probes
SP600 Series 3-Axis Scanning Probes

Thorlabs' video measuring systems are compatible with most Renishaw TP20 and TP200 series 3-axis, touch-trigger probes and SP600 series 3-axis scanning probes. These are sold as a kit that is preconfigured onto the video system. Each kit includes a probe body, probe module, stylus, and an optional manual or motorized module changing rack. When mounted onto a video measurement system, the probe assembly can be configured to stay in a fixed location or be motorized so that the system can be retracted when not in use.

TP20 Series
The TP20 series design is modeled on a spring-loaded kinematic arrangement where three rods are each resting within two ball-bearings that are spaced approximately 120° apart. When the stylus contacts a part, an internal spring will resist the slight force but still allow the ball-seats to deflect and pivot. This deflection will trigger a signal to the system to stop the measurement and record the signal.

TP200 Series
The TP200 series uses a similar kinematic mechanism as the TP20 series to retain the stylus; however, it does not utilize that mechanical movement to trigger an event. Instead, a set of silicon-based strain gauges is placed above the kinematic mechanism. These gauges will measure the force of the stylus in any direction and trigger a measurement once the force surpasses a preset value.

SP600 Series
The SP600 scanning probes are ideal for prismatic or complex components. Unlike the previously mentioned touch-trigger probes that collect discrete data points along a chosen path, scanning probes are carefully dragged across a surface to quickly obtain a large set of data points. They provide continuous deflection output that can be combined with the machine's position to determine the location of the surface. The tip of the stylus will tend to degrade faster using this method.

Specifications for a selection of Renishaw's probe modules can be found below. Please contact TMS-Sales@thorlabs.com for help customizing a system or to inquire about other options.

TP20 Series Probe Options and Specifications^a
Module	Sense Direction	Pre-Travel Variation	Unidirectional Repeatability	Trigger Force (N) (Stylus Length^a)		Overtravel Force (N) (Stylus Length^a)			Overtravel Displacement			Repeatability of Stylus Changing
Module	Sense Direction	Pre-Travel Variation	Unidirectional Repeatability	XY^b	Z	XY	+Z	-Z	XY (deg.)	+Z (mm)	-Z (mm)	Repeatability of Stylus Changing
Low Force (LF)	±X, ±Y, +Z	±0.60 µm	±0.35 µm	0.055	0.65	0.09	1.15	N/A	±14	3.1	N/A	Motorized: ±0.50 μm Manual: ±1.0 μm
Standard Force (SF)		±0.80 µm	±0.35 µm	0.08	0.75	0.2 - 0.3	3.5	N/A	±14	4	N/A
Medium Force (MF)		±1.00 µm	±0.50 µm	0.10 (25 mm)	1.9 (25 mm)	0.2 - 0.4 (25 mm)	7 (25 mm)	N/A	±14	3.7	N/A
Extended Force (EF)		±2.00 µm	±0.65 µm	0.10 (50 mm)	3.2 (50 mm)	0.2 - 0.5 (50 mm)	10 (50 mm)	N/A	±14	2.4	N/A
6 Way (6W)	±X, ±Y, ±Z	±1.50 µm	±1.00 µm	0.14	1.60	0.25	2.5	9	±14	4.5	1.5

For stylus lengths of 10 mm, unless stated otherwise in parenthesis by the specification, and velocities of 480 mm/min.
Low Force Direction

TP200 Series Probe Options and Specifications
Module	Sense Direction	Unidirectional Repeatability		XY Form Measurement Deviation		XYZ Form Measurement Deviation		Trigger Force (N)		Overtravel Force^a (N)		Repeatability of Stylus Changing
Module	Sense Direction	Trigger 1	Trigger 2	Trigger 1	Trigger 2	Trigger 1	Trigger 2	XY^b	Z	XY	Z	Repeatability of Stylus Changing
Low Force (LF)	±X, ±Y, ±Z	±0.40 µm	±0.50 µm	±0.80 µm	±0.90 µm	±1 µm	±1.4 µm	0.02	0.07	0.1 - 0.15	1.6	Motorized: ±0.50 μm Manual: ±1.0 μm
Standard Force (SF)										0.2 - 0.4	4.9
Extended Overtravel (EO)										0.2 - 0.4	4.9

At a displacement of 0.50 mm.
Low Force Direction

SP600 Series Scanning Probe Options and Specifications
Module	Sense Direction	Measurement Range	Overtravel Range	Resolution	Spring Rate	Damping
SP600	±X, ±Y, ±Z	±1 mm^a	X, Y and -Z Protected by Kinematic Joint.	0.1 µm - 1 µm	120 gmf/mm in X, Y, Z (Nominal)	20% in X,Y,Z (Typical)

In all axes and orientations with a 50 mm long, 4.6 g stylus.

Laser Sensor Options

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Triangulation laser being used to measure the surface flatness of Thorlabs optic mount's front plate.

Laser Sensor Options

Conoscopic Holography Laser Sensor
Triangulation Displacement Laser Sensor

Thorlabs offers two types of laser sensors: a conoscopic holography sensor (CHS) and a triangulation displacement sensor (TDS). Each option provides high-precision distance, surface contour, 2D profile, and thickness measurements.

The conoscopic laser transmits the output beam along the same optical axis as the returned signal. This co-linearity is ideal for measuring blind holes or surfaces with large angles but requires a shorter standoff distance (i.e., distance from the target). There are also applications that will not need the higher precision measurement values obtained from the CHS, for example when characterizing surface defects. In contrast, the TDS determines the target's position by measuring the reflected light from the target's surface using an internal CCD detector. This light collection is not co-linear, i.e. there is a fixed angle between the beam output and the collection optic. This design allows the sensor to have a larger standoff.

The CHS utilizes interchangeable objectives at the output port that determine the measuring range of the sensor. Two of the more popular objectives are specified below; other options are available if the application requires it. The TDS does not use an objective, but is chosen by its direct measurement range. Please contact TMS-Sales@thorlabs.com for help in selecting system options or to inquire about other options.

Triangulation Displacement Sensor Specifications
Measuring Range		25 mm	50 mm
Measuring Range Spread	Start (SMR)	25 mm	35 mm
	Mid (MMR)	27.5 mm	60 mm
	End (EMR)	50 mm	85 mm
Linearity^b		≤ ±0.08%	≤ ±0.08%
Repeatability at Measuring Rate		1 µm	2 µm
Measuring Rate		2 kHz
Spot Diameter (±10%)	SMR	100 x 140 µm	90 x 120 µm
	MMR	120 x 130 µm	230 x 240 µm
	EMR	390 x 500 µm	630 x 820 µm
	Minimum	55 x 50 µm	70 x 65 µm
Laser Power		<1 mW
Laser Color		Red (670 nm)
Laser Safety Class		Class 2 in Accordance with DIN EN 60825-1 : 2008-05

Other measurement ranges are available. Please contact TMS-Sales@thorlabs.com to inquire about other options.
Linearity is the largest deviation from a best-fit straight line over the measurement range. It is specified as a percentage over the full measurement range.

Conoscopic Holography Sensor Specifications
Included Objective Effective Focal Length^a	25 mm	50 mm
Measuring Range	1.8 mm	8 mm
Standoff^b	14 mm	44 mm
Linearity^b	±0.17%	±0.08%
Repeatability	0.06 µm	0.10 µm
X Laser Spot Size	27 µm	37 µm
Angular Coverage	150°	170°
Measurement Frequency	≤3000 Hz
Color	Red
Laser Safety Class	Class 2, IEC 60825-1:2007^b
Compatible Software	IK500

The objective is interchangeable and other objectives are available. Please contact
TMS-Sales@thorlabs.com to inquire about other options.
Distance from the probe to the middle of the object under inspection's working range.
Linearity is the largest deviation from a best-fit straight line over the measurement range. It is specified as a percentage over the full measurement range.
Complies with 31CFR 1040.10 and 1040.11 Class II - FDA

Fixturing Options

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Rotary Fixture
Thorlabs' y-axis-platform-mounted rotary stage rotates a part under inspection while measurements are being obtained.

Fixturing Component Options

Rotary Stage Fixture
Pneumatic Glass Platen

Thorlabs offers numerous options for fixing an object in place during inspection with our video coordinate measuring machines (CMMs). Fixturing is the process of securing an object prior to scanning with a CMM. Doing so allows for repeatable, accurate, and fast measurement scans of a large number of items from a production run.

Rotary Stage Fixture
Our rotary stage rotates a part under inspection during the measurement process. It is useful for measuring parts such as shafts, screws, gears, or other cylindrical objects, where you don't want to re-fixture a part to take measurements from a different side. It is mounted onto the y-axis stage of the VSA or VSM video system.

A wide selection of motorized rotation mounts and stages are also available that can be mounted directly to our fixture plates. This would facilitate the creation of a motorized, modular fixturing system that could repeatably rotate and position items quickly and accurately.

A pneumatic glass platen being opened to remove a calibration target.

Pneumatic Glass Platen
A pneumatic, hinged, glass platen can be added to any stage to secure smaller objects or circuit boards up to 0.20" (5.1 mm) thick. Based on the model the platen can be configured to automatically open as part of a software routine or by manually lifting the glass panel. If an automated quadrant light is being used, then the system will be programmed to clear the quadrant light whenever the platen is raised, preventing an unwanted collision.

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Pneumatic Glass Platen
A pneumatic glass platen shown closed and open.

Objective Options

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Thorlabs' TL1X-SAP 1X Objective with Included Case

Long-Working-Distance Objective Options

1X, 5X, 10X, 20X, or 50X Magnification
Variety of Options to Support Use from 240 nm to 656 nm
Suitable for Brightfield Observation

Thorlabs offers apochromat objectives with 1X, 5X, 10X, 20X, or 50X magnification. They are designed to be used with a 200 mm focal length tube lens and feature a flat field of focus and chromatic correction in the visible range. The long working distance provides a wide space between the lens surface and the object making them ideal for machine vision applications. The TL1X-SAP 1X Objective also offers a telecentric design with a removeable waveplate to minimize back reflections.

Each objective is engraved with its class, magnification, numerical aperture, a zero (noting that it is to be used to image a sample without a cover glass) and the tube lens focal length for which the specified magnification is valid. If the case shipped with each of these objectives is lost or broken, Thorlabs offers an objective case (Item #s OC2M26 and OC24) that can be used as a replacement.

For additional information about these objectives, including a tutorial that defines the properties of an objective, please see our complete presentation.

Item #	Wavelength Range	M^a	WD	EFL	NA	EA	Typical Transmission	OFN	PFL	AR Coating Reflectance
LMUL-10X-UVB	240 - 360 nm	10X	20.0 mm	20 mm	0.25	10.0 mm	Raw Data	24	95.0 mm	<1.5% per Surface (240 - 360 nm)
LMUL-20X-UVB		20X	15.3 mm	10 mm	0.36	7.2 mm	Raw Data
LMUL-50X-UVB		50X	12.0 mm	4 mm	0.42	3.4 mm	Raw Data
TL1X-SAP^b	420 - 700 nm	1X	8.0 mm	200 mm	0.03	23.4 mm	Raw Data	22	95.0 mm	R_avg < 0.5% per Surface @ 0° AOI (420 - 700 nm)
MY5X-802	436 - 656 nm	5X	34.0 mm	40 mm	0.14	11.2 mm		24	95 mm	Not Available
MY10X-803		10X	34.0 mm	20 mm	0.28	11.2 mm
MY20X-804		20X	20.0 mm	10 mm	0.42	8.4 mm
MY50X-805		50X	13.0 mm	4 mm	0.55	4.4 mm

When Used with a 200 mm Focal Length Tube Lens
Specifications are for the objective with the included wave plate attached.

M = Magnification
WD = Working Distance
EFL = Effective Focal Length

PFL = Parfocal Length
NA = Numerical Aperture
OFN = Optical Field Number

CPU Software and Hardware Upgrades

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A Monitor can be placed on a control unit or on the hood of a system. A touch screen monitor can be used if the M3 Metrology Software package is selected.

CPU Software and Hardware Upgrades

Import and Export Software Utilities
Statistical Process Control EXCEL^®-Based^a Software Package
Touch Screen Monitor and/or Hood-Mounted Monitor
Color Printer and Printer Shelf

Thorlabs offers upgrades to the included LCD monitor and software. Please contact TMS-Sales@thorlabs.com for questions about any of these options.

Import and Export Software Utilities
These file conversion utilities are used to import and export a broader range of file types that include CAD, artwork, as well as drill and rout files.

Statistical Process Control (SPC) Software Package
An SPC program includes tools and procedures to take control of process behaviors, internal system errors, and production issues. This is an EXCEL-based package that can be added to any video system.

Monitor Options and System Placement
A standard 21.5" LCD monitor is included with each base system. It can be mounted on the workstation above the operator control pad or onto the hood of the system, as shown to the right. It will only be mounted onto the hood by request. The monitor can also be upgraded to include a touch screen or to be a larger 30" diagonal size; note that touch capabilities are only possible when using the M3 metrology software.

Color Printer and Printer Shelf
A color printer can be provided to physically archive video images and measurement reports. A shelf for the printer is available that mounts to the side of the video system, behind the workstation.

EXCEL is a registered trademark of Microsoft Corporation.

Exploring the Options?

Thorlabs' Multisensor Video Systems are customized to meet the demanding needs of your application. If you do not see a product or specification that you require or you are looking for assistance selecting a system, please contact me. Our Measurement Systems Team is happy to help and can provide system recommendations based on your needs.

Ike Jariel
General Manager
Thorlabs Measurement Systems

Specifications for each of our seven base systems as well as our video system options and select accessories are available below. The most popular options are highlighted in green.

For complete details on all of the ways that Thorlabs' Optek Video Systems can be customized, please see the Video System Options and Accessories tabs or contact us using the link to the right.

Base Systems

Our Video CMM System come in five base sizes. All are available with air bearings and linear motors as a standard, except for the VSM463 and VSM713, which include ball-bearings and a servo motor. The most popular option is highlighted in green below.

VideoMic^® Video Inspection Systems Specifications
Base System Item #^a		VSA303	VSA463	VSM463	VSA713	VSM713	VSA963	VSA1273
XYZ Control
Stage Bearings		Air	Air	Mechanical	Air	Mechanical	Air	Air
Stage Motors		Linear	Linear	Servo	Linear	Servo	Linear	Linear
Measurement (Travel) Range	X-Y	305 mm x 305 mm (12" x 12")	460 mm x 305 mm (18" x 12")		711 mm x 610 mm (28" x 24")		965 mm x 760 mm (38" x 30")	1270 mm x 915 mm (50" x 36")
Measurement (Travel) Range	Z	200 mm (8")
Accuracy^b	X-Y (E2)	(1.5 + 5L/1000) µm		(2.5 + 5L/1000) µm	(1.5 + 5L/1000) µm	(2.5 + 5L/1000) µm	(1.5 + 5L/1000) µm
Accuracy^b	Z (E1)	(1.5 + 5L/1000) µm
Velocity	X-Y	≤760 mm/s
Velocity	Z	150 mm/s
Repeatability	Z	±3 µm (±0.00012") at High Magnification
Granite	Flatness	≤0.005 mm (Over Any 700 mm Area)
	Roughness	Ra0.4 (Equivalent to RMS16)
	Waviness	≤0.001 mm / 100 mm x 100 mm
Unit Dimensions
Footprint	Width	870 mm (34")	1020 mm (40")		1270 mm (50")		1520 mm (60")	2140 mm (85")
Footprint	Depth	1020 mm (40")	1020 mm (40")		1630 mm (64")		1880 mm (74")	2350 mm (93")
Total Height		1730 mm (68")	1730 mm (68")		1730 mm (68")		1860 mm (73")	1800 mm (71")
Approximate System Weight (Crated / Uncrated)		885 kg (1950 lbs) / 590 kg (1300 lbs)	1043 kg (2300 lbs) / 726 kg (1600 lbs)		1630 kg (3600 lbs) / 1225 kg (2700 lbs)		2041 kg (4500 lbs) / 1588 kg (3500 lbs)	2994 kg (6600 lbs) / 2450 kg (5400 lbs)
Approximate Footprint Overhang^c	Control Station	Up to 635 mm (25")
Approximate Footprint Overhang^c	Printer Tray	Up to 280 mm (11")
Top Clearance		Allow for Approximately 1220 mm (48") for Servicing
Rear Clearance		Allow for Approximately 610 mm (24") for Servicing
Typical Unit Dimensions
General
Operating Temperature	Range	20 ± 0.5 °C (67° - 69 °F)
Operating Temperature	Rate	0.25 °C/hr (0.5 °F/hr)
Relative Humidity (Non-Condensing)		30% - 80%
Line Voltage		115 / 230 VAC, 50 / 60 Hz, Single Phase, 1.0 kW
Air Supply (Air Bearings Only)	Velocity	85 L/m (3 CFM) Dry Air		-	85 L/m (3 CFM) Dry Air	-	85 L/m (3 CFM) Dry Air
Air Supply (Air Bearings Only)	Pressure	7 - 8.25 Bar (100 - 120 PSI)			7 - 8.25 Bar (100 - 120 PSI)		7 - 8.25 Bar (100 - 120 PSI)

The base item number indicates the unit size, measurement range, and bearing/motor type of the chosen system. The magnification optics, camera, and lighting options can then be customized to suit a specific application. Contact TMS-Sales@thorlabs.com for help in selecting system options and specifications.
L is the point-to-point travel distance, or diagonal travel distance. This applies to a thermally stable system at 20 °C using a certified artifact, pixel value of 2 µm or less, evenly distributed load, and a standard measuring plane.
The control station includes the monitor, keyboard, mouse, and control pad; it is mounted at the front of the unit. The printer tray is an optional accessory that is mounted at the rear of the unit.

CCD Cameras

Specifications for our 1.3 MP and 5 MP camera can be found below, with plots to the right showing each cameras sensitivity to wavelengths in the visible spectra. The most popular option is highlighted in green.

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5 MP Camera Response with Included IR Filter

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1.3 MP Camera Response with Included IR Filter

Camera Specifications
Resolution	1.3 MP	5 MP
Sensor Type	Interline SXGA Progressive Color CCD: ICX424AQ	Interline QSXGA Progressive Color CCD: ICX625AQ
Pixels (H x V)	1348 x 976	2536 x 2068
Active Pixels (H x V)	1280 x 966	2448 x 2058
Imaging Area (H x V)	4.8 mm x 3.6 mm	8.4 mm x 7.1 mm
Pixel Size	3.75 µm x 3.75 µm	3.45 µm x 3.45 µm
Optical Format	1/3"	2/3"
Frame Rate	40 fps	15 fps
Filter	IR Cut-On Filter
Video Output Format	Digital 8, 10, or 12 bit Raw Data or RGB 8 bit

Click to Enlarge
Transmission does not include an auxiliary lens or extension tube. An AR coating minimizes reflections in the visible spectra (about 400 - 700 nm).

Zoom Lenses

A zoom lens system consists of three modules: the zoom lens, an auxiliary lens, and an extension tube. Each module can be viewed in the first three columns of the below tables. Specifications of the entire three part system, including system magnification and field of view, can be found by reading horizontally across from your selection. Note that field of view is dependant on the camera format being used.

The most popular system options are highlighted in green. Please contact TMS-Sales@thorlabs.com if a telecentric zoom lens is required.

Zoom Lenses with Coaxial Light Input
Specifications for a 12X and 6.5X system with a side-mounted coaxial light input will be the same as those in the below tables, however the transmission may drop slightly due to the additional beamsplitter the light must pass though. Additionally, the 0.25X, 0.5X, and 0.75X auxiliary lenses are not compatible with this zoom lens version. The internal coaxial light will illuminate a circular area of 14 mm and 11 mm in diameter for the 12X and 6.5X zoom lenses, respectively. Any field of view (FOV) larger than these values will have darkened corners.

12X Zoom Lens System Specifications

Zoom Lens	Auxiliary Lens Options	Extension Tube Options	System Optical Magnification	Field of View^a (mm) (High - Low)	Matching Pixel Size^b (µm) (Low - High)	Working Distance (mm)	Resolving Limit (µm) (Low - High)	Depth of Field (Low - High)
12X	0.25X^c	0.5X	0.07 - 0.87	1/3": 85.71 - 6.89	2.33 - 5.8	341	66.66- 13.34	20.00 - 0.80
		0.67X	0.10 - 1.17	2/3": 72.00 - 9.35^d 1/3": 61.73 - 5.10	3.33 - 7.80
		1.00X	0.15 - 1.75	2/3": 75.88 - 6.28 1/3": 41.38 - 3.42	5.00 - 11.67
		1.33X	0.19 - 2.33	2/3": 57.89 - 4.72 1/3": 31.57 - 2.57	6.33 - 15.54
		2.0X	0.29 - 3.50	2/3": 37.94 - 3.14 1/3": 20.69 - 1.71	9.67 - 23.34
		3.3X	0.48 - 5.78	2/3": 22.99 - 1.90 1/3": 12.54 - 1.04	16.59 - 40.53
	0.50X^c	0.5X	0.14 - 1.75	1/3": 42.85 - 3.42	2.59 - 5.82	165	37.04 - 6.66	6.17 - 0.19
		0.67X	0.19 - 2.35	2/3": 36.0 - 4.68^d 1/3": 30.87 - 2.55	3.60 - 7.68
		1.00X	0.29 - 3.50	2/3": 37.94 - 3.14 1/3": 20.69 - 1.71	5.38 - 11.45
		1.33X	0.39 - 4.66	2/3": 18.96 - 1.57 1/3": 10.34 - 0.85	7.22 - 15.51
		2.0X	0.58 - 7.00	2/3": 18.97 - 1.57 1/3": 10.34 - 0.86	10.74 - 22.89
		3.3X	0.96 - 11.55	2/3": 11.50 - 0.95 1/3": 6.27 - 0.52	16.64 - 50.60
	0.75X^c	0.5X	0.22 - 2.62	1/3": 27.27 - 2.29	2.61 - 5.81	108	23.80 - 4.44	2.55 - 0.09
		0.67X	0.29 - 3.52	2/3": 24.3 - 3.12^d 1/3": 20.58 - 1.70	3.45 - 7.73
		1.00X	0.44 - 5.25	2/3": 25.30 - 2.09 1/3": 13.79 - 1.14	5.24 - 11.52
		1.33X	0.58 - 6.98	2/3": 18.96- 1.57 1/3": 10.34 - 0.85	6.90 - 15.49
		2.0X	0.87 - 10.50	2/3": 12.64 - 1.05 1/3": 6.89 - 0.57	10.35 - 23.05
		3.3X	1.44 - 17.33	2/3": 7.67 - 0.63 1/3": 4.18 - 0.35	16.62 - 46.34
	None (1.0X)	0.5X	0.29 - 3.49	1/3": 20.69 - 1.72	2.68 - 5.82	86	18.52 - 3.34	1.39 - 0.05
		0.67X	0.39 - 4.69	2/3": 18.20 - 2.34^d 1/3": 15.44 - 1.28	3.42 - 7.74
		1.00X	0.58 - 7.00	2/3": 18.79 - 1.57 1/3": 10.34 - 0.86	5.09 - 11.55
		1.33X	0.77 - 9.31	2/3": 14.28 - 1.18 1/3": 7.79 - 0.64	7.13 - 5.54
		2.0X	1.16 - 14.00	2/3": 9.49 - 0.78 1/3": 5.18 - 0.43	10.17 - 23.10
		3.3X	1.91 - 23.10	2/3": 5.75 - 0.48 1/3": 3.13 - 0.26	16.60 - 40.54
	1.5X	0.5X	0.43 - 5.23	1/3": 13.95 - 1.14	2.65 - 5.85	50	12.34 - 2.24	0.64 - 0.02
		0.67X	0.58 - 7.04	2/3": 12.20 - 1.55^d 1/3": 10.29 - 0.85	3.45 - 7.78
		1.00X	0.87 - 10.50	2/3": 12.64 - 1.05 1/3": 6.89 - 0.57	5.18 - 11.60
		1.33X	1.16 - 14.00	2/3": 9.48 - 0.78 1/3": 5.17 - 0.44	7.15 - 15.68
		2.0X	1.74 - 21.00	2/3": 6.33 - 0.52 1/3": 3.45 - 0.29	10.74 - 23.34
		3.3X	2.87 - 34.65	2/3": 3.83 - 0.323 1/3": 2.09 - 0.17	16.62 - 40.77
	2.0X	0.5X	0.58 - 6.98	1/3": 10.34 - 0.85	2.61 - 5.79	37	9.00 - 1.66	0.35 - 0.01
		0.67X	0.78 - 9.38	2/3": 9.10 - 1.17^d 1/3": 7.72 - 0.64	3.42 - 7.79
		1.00X	1.16 - 14.00	2/3": 9.49 - 0.78 1/3": 5.18 - 0.43	5.09 - 11.62
		1.33X	1.54 - 18.60	2/3": 7.14 - 0.59 1/3": 3.89 - 0.32	6.93 - 15.43
		2.0X	2.32 - 28.00	2/3": 4.75 - 0.40 1/3": 2.59 - 0.22	10.17 - 23.24
		3.3X	3.83 - 46.20	2/3": 2.88 - 0.24 1/3": 1.57 - 0.13	16.56 - 36.04
FOV values are measured diagonally where Horizontal FOV = Diagonal FOV x 0.8 and Vertical FOV = Diagonal FOV x 0.6. FOV values will change depending on the camera format chosen; values for 1/3" and 2/3" camera formats are provided. Matching pixel size (MPS) is that which will permit the minimum feature size to overlap two pixels, where MPS = 1/2 x (Feature Size x System Magnification) These options are not compatible with a zoom lens that has a coaxial light input. Vignetting occurs at zoom settings less than 0.9X

6.5X Zoom Lens System Specifications

Zoom Lens	Auxiliary Lens Options	Extension Tube Options	System Optical Magnification	Field of View (mm) (High - Low)	Matching Pixel Size (µm) (Low - High)	Working Distance (mm)	Resolving Limit (µm) (Low - High)	Depth of Field (Low - High)
6.5X	0.25X	0.5X	0.09 - 0.56	2/3": 91.40 - 19.52 1/3": 68.64 - 10.64	2.50 - 5.19	300	55.56 - 18.52	13.89 - 1.54
		0.67X	0.12 - 0.75	2/3": 93.62 - 14.66 1/3": 51.12 - 8.04	3.33 - 6.95
		1.00X	0.18 - 1.13	2/3": 62.84 - 9.76 1/3": 34.52 - 9.76	5.00 - 10.46
		1.33X	0.23 - 1.51	2/3": 47.25 - 7.34 1/3": 25.80 - 4.0	6.65 - 13.91
		2.0X	0.35 - 2.25	2/3": 31.42 - 4.88 1/3": 17.16 - 2.66	15.29 - 28.93
		3.3X	0.58 - 3.71	2/3": 19.04 - 2.96 1/3": 10.40 - 1.61	16.59 - 40.53
		5.0X	0.88 - 5.62	2/3": 12.56 - 1.96 1/3": 6.88 - 1.08	24.45 - 52.04
	0.50X	0.5X	0.18 - 1.13	2/3": 45.70 - 9.76 1/3": 34.32 - 5.32	2.73 - 5.38	175	30.30 - 9.52	4.13 - 0.41
		0.67X	0.23 - 1.50	2/3": 46.81 - 7.33 1/3": 25.56 - 4.00	3.48 - 7.14
		1.00X	0.35 - 2.25	2/3": 31.43 - 4.89 1/3": 17.16 - 2.67	5.30 - 10.71
		1.33X	0.47 - 3.03	2/3": 23.63 - 3.68 1/3": 12.90 - 2.01	7.05 - 14.24
		2.0X	0.70 - 4.50	2/3": 15.71 - 2.44 1/3": 8.58 - 1.33	10.61 - 21.42
		3.3X	1.16 - 7.43	2/3": 9.52 - 1.48 1/3": 5.20 - 0.81	15.44 - 39.08
		5.0X	1.75 - 11.25	2/3": 6.29 - 0.98 1/3": 3.43 - 0.53	26.51 - 53.55
	0.75X	0.5X	0.26 - 1.69	2/3": 30.50 - 6.52 1/3": 22.86 - 3.56	2.55 - 5.32	113	19.62 - 6.28	1.73 - 0.18
		0.67X	0.35 - 2.25	2/3": 31.21 - 4.89 1/3": 17.04 - 2.67	3.43 - 7.08
		1.00X	0.53 - 3.38	2/3": 20.95 - 3.26 1/3": 11.43 - 1.78	5.20 - 10.63
		1.33X	0.70 - 4.54	2/3": 15.75 - 2.45 1/3": 8.59 - 1.34	6.92 - 14.13
		2.0X	1.05 - 6.75	2/3": 10.48 - 1.63 1/3": 5.72 - 0.89	10.30 - 21.23
		3.3X	1.73 - 11.14	2/3": 6.35 - 0.99 1/3": 3.46 - 0.54	15.36 - 33.31
		5.0X	2.63 - 16.88	2/3": 4.19 - 0.65 1/3": 2.29 - 0.35	25.74 - 53.09
	None (1.0X)	0.5X	0.35 - 2.25	2/3": 22.90 - 4.89 1/3": 17.16 - 2.67	2.54 - 5.28	92	14.50 - 4.70	0.95 - 0.10
		0.67X	0.47 - 3.00	2/3": 23.40 - 3.65 1/3": 12.77 - 2.01	3.41 - 7.04
		1.00X	0.70 - 4.50	2/3": 15.71 - 2.44 1/3": 8.58 - 1.33	5.08 - 10.55
		1.33X	0.93 - 6.05	2/3": 11.81 - 1.83 1/3": 6.45 - 1.00	6.76 - 14.03
		2.0X	1.40 - 9.00	2/3": 7.86 - 1.22 1/3": 4.29 - 0.67	10.15 - 21.11
		3.3X	2.31 - 14.85	2/3": 4.76 - 0.74 1/3": 2.60 - 0.40	15.29 - 29.11
		5.0X	3.50 - 22.50	2/3": 3.14 - 0.49 1/3": 1.72 - 0.27	25.38 - 52.76
	1.5X	0.5X	0.53 - 3.38	2/3": 15.00 - 3.26 1/3": 11.43 - 1.78	2.60 - 5.32	51	9.80 - 3.14	0.43 - 0.04
		0.67X	0.70 - 4.50	2/3": 15.60 - 2.44 1/3": 8.52 - 1.33	3.43 - 7.09
		1.00X	1.05 - 6.75	2/3": 10.48 - 1.63 1/3": 5.72 - 0.89	5.15 - 10.63
		1.33X	1.40 - 9.08	2/3": 7.88 - 1.22 1/3": 4.3 - 0.67	6.85 - 14.14
		2.0X	2.10 - 13.50	2/3": 5.24 - 0.81 1/3": 2.86 - 0.44	10.29 - 21.26
		3.3X	3.47 - 22.28	2/3": 3.18 - 0.49 1/3": 1.73 - 0.27	15.29 - 28.92
		5.0X	5.25 - 33.75	2/3": 2.10 - 0.33 1/3": 1.14 - 0.18	25.73 - 53.16
	2.0X	0.5X	0.70 - 4.50	2/3": 11.40 - 2.44 1/3": 8.58 - 1.33	2.54 - 5.29	36	7.24 - 2.34	0.24 - 0.02
		0.67X	0.94 - 6.00	2/3": 11.70 - 1.83 1/3": 6.39 - 1.00	3.41 - 7.05
		1.00X	1.40 - 9.00	2/3": 7.86 - 1.22 1/3": 4.29 - 0.67	5.08 - 10.58
		1.33X	1.86 - 12.10	2/3": 5.91 - 0.92 1/3": 3.22 - 0.50	6.76 - 14.07
		2.0X	2.80 - 18.00	2/3": 3.93 - 0.61 1/3": 2.15 - 0.33	10.15 - 21.15
		3.3X	4.62 - 29.70	2/3": 2.38 - 0.37 1/3": 1.30 - 0.14	15.30 - 28.70
		5.0X	7.00 - 45.00	2/3": 1.57 - 0.24 1/3": 0.86 - 0.13	25.38 - 52.88
FOV values are measured diagonally where Horizontal FOV = Diagonal FOV x 0.8 and Vertical FOV = Diagonal FOV x 0.6. FOV values will change depending on the camera format chosen; values for 1/3" and 2/3" camera formats are provided. Matching pixel size (MPS) is that which will permit the minimum feature size to overlap two pixels, where MPS = 1/2 x (Feature Size x System Magnification) These options are not compatible with a zoom lens that has a coaxial light input. Vignetting occurs at zoom settings less than 0.9X

Objectives

Specifications for our four objectives can be found below. Please contact TMS-Sales@thorlabs.com for help configuring a system or to inquire about other options.

Item #	Wavelength Range	M^a	WD	EFL	NA	EA	Typical Transmission	OFN	PFL	AR Coating Reflectance
LMUL-10X-UVB	240 - 360 nm	10X	20.0 mm	20 mm	0.25	10.0 mm	Raw Data	24	95.0 mm	<1.5% per Surface (240 - 360 nm)
LMUL-20X-UVB		20X	15.3 mm	10 mm	0.36	7.2 mm	Raw Data
LMUL-50X-UVB		50X	12.0 mm	4 mm	0.42	3.4 mm	Raw Data
TL1X-SAP^b	420 - 700 nm	1X	8.0 mm	200 mm	0.03	23.4 mm	Raw Data	22	95.0 mm	R_avg < 0.5% per Surface @ 0° AOI (420 - 700 nm)
MY5X-802	436 - 656 nm	5X	34.0 mm	40 mm	0.14	11.2 mm		24	95 mm	Not Available
MY10X-803		10X	34.0 mm	20 mm	0.28	11.2 mm
MY20X-804		20X	20.0 mm	10 mm	0.42	8.4 mm
MY50X-805		50X	13.0 mm	4 mm	0.55	4.4 mm

When Used with a 200 mm Focal Length Tube Lens
Specifications are for the objective with the included wave plate attached.

M = Magnification
WD = Working Distance
EFL = Effective Focal Length

PFL = Parfocal Length
NA = Numerical Aperture
OFN = Optical Field Number

Probe Body Options
Series	TP20	TP200	SP600
Sensor Type	Kinematic	Strain Gauge	Scanning
Application	Auto or Manual CMM, Suitable for Most Applications	Auto or Manual CMM with High Accuracy	High-Speed, Contact Form Scanning and Fast Point Measurement Applications
Renishaw Stylus Range	M2 Threaded	M2 Threaded	M3 Threaded
Module Changing Racks	Manual and Motorized

Renishaw^® Tactile Probes

Thorlabs' video systems are compatible with most Renishaw TP20 and TP200 series 3-axis, touch-trigger probes and SP600 series 3-axis scanning probes. These are sold as a kit that is preconfigured onto the video system. Each kit includes a probe body, probe module, and an optional manual or motorized module changing rack.

Specifications for a selection of Renishaw's probe modules can be found below. Please contact TMS-Sales@thorlabs.com for help in selecting system options or to inquire about other options. The most popular option is highlighted in green.

TP20 Series Probe Options and Specifications^a
Module	Sense Direction	Pre-Travel Variation	Unidirectional Repeatability	Trigger Force (N) (Stylus Length^a)		Overtravel Force (N) (Stylus Length^a)			Overtravel Displacement			Repeatability of Stylus Changing
Module	Sense Direction	Pre-Travel Variation	Unidirectional Repeatability	XY^b	Z	XY	+Z	-Z	XY (deg.)	+Z (mm)	-Z (mm)	Repeatability of Stylus Changing
Low Force (LF)	±X, ±Y, +Z	±0.60 µm	±0.35 µm	0.055	0.65	0.09	1.15	N/A	±14	3.1	N/A	Motorized: ±0.50 μm Manual: ±1.0 μm
Standard Force (SF)		±0.80 µm	±0.35 µm	0.08	0.75	0.2 - 0.3	3.5	N/A	±14	4	N/A
Medium Force (MF)		±1.00 µm	±0.50 µm	0.10 (25 mm)	1.9 (25 mm)	0.2 - 0.4 (25 mm)	7 (25 mm)	N/A	±14	3.7	N/A
Extended Force (EF)		±2.00 µm	±0.65 µm	0.10 (50 mm)	3.2 (50 mm)	0.2 - 0.5 (50 mm)	10 (50 mm)	N/A	±14	2.4	N/A
6 Way (6W)	±X, ±Y, ±Z	±1.50 µm	±1.00 µm	0.14	1.60	0.25	2.5	9	±14	4.5	1.5

For stylus lengths of 10 mm, unless stated otherwise, and velocities of 480 mm/min.
Low Force Direction

TP200 Series Probe Options and Specifications
Module	Sense Direction	Unidirectional Repeatability		XY Form Measurement Deviation		XYZ Form Measurement Deviation		Trigger Force (N)		Overtravel Force^a (N)		Repeatability of Stylus Changing
Module	Sense Direction	Trigger 1	Trigger 2	Trigger 1	Trigger 2	Trigger 1	Trigger 2	XY^b	Z	XY	Z	Repeatability of Stylus Changing
Low Force (LF)	±X, ±Y, ±Z	±0.40 µm	±0.50 µm	±0.80 µm	±0.90 µm	±1 µm	±1.4 µm	0.02	0.07	0.1 - 0.15	1.6	Motorized: ±0.50 μm Manual: ±1.0 μm
Standard Force (SF)										0.2 - 0.4	4.9
Extended Overtravel (EO)										0.2 - 0.4	4.9

At a displacement of 0.50 mm.
Low Force Direction

SP600 Series Scanning Probe Options and Specifications
Module	Sense Direction	Measurement Range	Overtravel Range	Resolution	Spring Rate	Damping
SP600	±X, ±Y, ±Z	±1 mm^a	X, Y and -Z Protected by Kinematic Joint.	0.1 µm - 1 µm	120 gmf/mm in X, Y, Z (Nominal)	20% in X,Y,Z (Typical)

In All Axes and Orientations with a 50 mm long, 4.6 g Stylus.

Laser Sensors

The Conoscopic Holography Laser Sensor utilizes interchangeable objectives at the output port that determine the measuring range of the sensor. Two of the more popular objectives are specified below; other options are available if the application requires it. The Triangulation Displacement Sensor does not use an objective, and is selected based on its measurement range. Please contact TMS-Sales@thorlabs.com for help in selecting system options or to inquire about other options. The most popular options are highlighted in green.

Triangulation Displacement Sensor Specifications
Measuring Range		25 mm	50 mm
Measuring Range Spread	Start (SMR)	25 mm	35 mm
	Mid (MMR)	27.5 mm	60 mm
	End (EMR)	50 mm	85 mm
Linearity^b		≤ ±0.08%	≤ ±0.08%
Repeatability at Measuring Rate		1 µm	2 µm
Measuring Rate		2 kHz
Spot Diameter (±10%)	SMR	100 x 140 µm	90 x 120 µm
	MMR	120 x 130 µm	230 x 240 µm
	EMR	390 x 500 µm	630 x 820 µm
	Minimum	55 x 50 µm	70 x 65 µm
Laser Power		< 1 mW
Laser Color		Red (670 nm)
Laser Safety Class		Class 2 in Accordance with DIN EN 60825-1 : 2008-05

Other measurement ranges are available. Please contact TMS-Sales@thorlabs.com to inquire about other options.
Linearity is the largest deviation from a best-fit straight line over the measurement range. It is specified as a percentage over the full measurement range.

Conoscopic Holography Sensor Specifications
Included Objective Effective Focal Length^a	25 mm	50 mm
Measuring Range	1.8 mm	8 mm
Standoff	14 mm	44 mm
Linearity^b	±0.17%	±0.08%
Repeatability	0.06 µm	0.10 µm
X Laser Spot Size	27 µm	37 µm
Angular Coverage	150°	170°
Measurement Frequency	≤3000 Hz
Color	Red
Laser Safety Class	Class 2, IEC 60825-1:2007^c
Compatible Software	IK500

The objective is interchangeable and other objectives are available. Please contact
TMS-Sales@thorlabs.com to inquire about other options.
Linearity is the largest deviation from a best-fit straight line over the measurement range. It is specified as a percentage over the full measurement range.
Complies with 31CFR 1040.10 and 1040.11 Class II - FDA

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