Features
- 10 mm Scale with 50 µm Divisions
- Scales Centered on a 3” × 1” Microscope Slide
- Calibrate Microscope Eyepiece Reticles and Magnification
- Chrome-Plated on Glass Substrates
- Positive Resolution Test Target
Thorlabs’ R1L3S1P stage micrometer is used for calibrating imaging devices, such as microscopes, when precise measurements are necessary. The R1L3S1P is a positive slide with a 10 mm scale and 50 µm divisions. It is made in our semiconductor device production facility in Jessup, Maryland. We use contact photolithography with a mask aligner to define the pattern on the glass substrate. Once the pattern is defined, we then chemically etch the substrates and clean them in a class 100 cleanroom. The finished device is then checked with a critical dimension (CD) tool that is calibrated to NIST-traceable standards.
Specifications
- Scale: 10 mm Scale with 50 µm Divisions
- Flatness: <50 µm
- Design: Chrome-on-Glass
- Substrate: Soda Lime Glass
- Chrome Thickness: 0.120 µm
- Substrate Thickness: 0.06” (1.5 mm)
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