• Range of Motion:
• X, Y, Z: 0.16"
• x, y, z: 6°
• Optional Piezoelectric Actuators for Closed Loop Operation
• High Stiffness Flexure Design: 1 N•m in X and Z, 0.5 N•m in Y
• High Resonant Frequency: >130 Hz (±10%)
• Monolithic, Single Moving Platform Design
• Patented Parallel Flexure Mechanism with Fixed Drives
• Common Pivot Point for all Degrees-of-Freedom Simplifies Alignment Routines
• Low Maintenance Mechanism for Low Total Cost of Ownership
• Stepper Motor Actuators, Giving 1.8° Step Angle and 23 N.cm of Holding Torque

A powerful tool for nanopositioning, the MAX606 offers two innovative features: a common point of rotation and a patented design that allows all actuators to be connected to a common ground. For complex, multiaxis positioning, parallel flexure stages that incorporate three or more degrees of freedom into a single compact unit provide significantly improved performance over serialized stacks of translation stages. Thorlabs patented parallel flexure technology lies at the heart of the MAX606 nanopositioning stages.

• Resonant Frequency: >130 Hz (±10%), With no Load on the Stage
• RMS Repeatability: 30 nm over 30 µm 0.1% Over full travel range
• Stiffness
• X and Z: 1 N/µm
• Y: 0.5 N/µm
• Crosstalk, Max: 20 µm/mm of Travel
• Deck Height
• Moving Top Plate Height: 4.43"
• Accessory Beam Height: 4.92"
• Moving Top Plate Size: 2.75" x 2.36"
• Load Capacity: 2.2 lbs
• Travel
• Stepper Motor Range
• X, Y, Z: 0.16"
• x, y, z: 6°
• Resolution
• Stepper Motor Resolution
• X, Y, Z: 20 nm
• x, y, z: 0.1 arcsec
• Piezoelectric Actuator w/ Feedback
• X, Y, Z: 10 nm
• x, y, z: 0.03 arcsec
• Stepper Motor Drives: Hybrid Stepper Motor with 1.8° Step Angle and 23 N•cm of Holding Torque