• 4 mm Travel Per Axis
• Flexure Design Ensures Smooth Continuous Motion with No Friction
• Compact Design
• Enhanced Long-term Stability
• All Adjusters Tied to a Common Ground and Side Mounted
• Piezo and Feedback Cables Included

The patented MAX341/M parallel flexure designs advantages are readily apparent when it is implemented in alignment applications requiring sub-micron resolution, or better. Typically, with a multi-axis stacked stage, touching one of the two drives that are not referenced to “ground” will result in unwanted motion within the assembly. With each of the drives in a NanoMax series stage coupled directly to the base of the stage, these adverse effects are eliminated.

The DRV001 actuators supplied with the MAX34/M stages are capable of 60 nm step increments and speeds as high as 4mm/sec, as well as providing bidirectional repeatability of 500 nm. Ceramic tipped high precision limit switches provide a high repeatability ideal for homing the motors. This is critical for auto alignment applications that rely on a highly repeatable zero point.

The MAX341/M features internal piezoelectric actuators built directly into the body of the stage, providing a 20µm travel range with a positional resolution of 20nm. The MAX341/M also has three strain gauge displacement sensors which provide a voltage signal that is linearly proportional to the displacement of the piezoelectric element. This signal is used to compensate for the hysteresis, creep, and thermal drift that is inherent in all piezoelectric elements. If driven by a closed-loop controller (such as the BPC203, MPZ601, or TPZ001 and TSG001 combination), the piezoelectric actuator can be controlled in a feedback mode that improves the positional resolution from 20nm to 5nm. Also, the hysteresis, creep, and drift associated with piezos can be monitored and compensated via this closed loop control. The modular design allows for the piezo travel to be increased by fitting an additional piezo extender in series with the DRV001 stepper motor actuators.

Furthermore, when the stage is coupled with the BNT001 , MNA601 or TNA001 NanoTrak controllers, the system becomes a powerful auto alignment solution that maintains optical throughput and eliminates decreased coupling efficiency due to thermal drift or other external forces.

• Travel: 4 mm
• Max Load Capacity: 1 kg
• Recommended Load Capacity: <0.7 kg
• Thermal Stability: 1 µm/°C
• Weight: 0.75 kg
• Deck Height: 62.5 mm
• Optical Axis Height: 75 mm
• Piezo Specs
• Piezo Range: 20 µm
• Piezo Resolution: (Theoretical) 20 nm (5 nm with strain gage)
• Piezo Bidirectional Repeatability: 0.2 µm Open Loop, 0.05 µm Closed Loop
• Absolute On-Axis Accuracy: 1.0 µm
• Resonant Frequency
• No Load: 375 Hz
• With 275 g Load: 200 Hz
• With 575 g Load: 150 Hz
• Compatible Piezo Controllers BPC203, MPZ601, TPZ001 and TSG001 (Need to use Together), MNA601, BNT001
• Stepper Motor Specs
• Stepper Motor Type: DRV001
• Backlash: <7 µm
• Max Acceleration: 4 mm/sec2
• Max Velocity: 2.5 mm/sec
• Velocity Stability: ±0.04 mm/sec
• Min Achievable Incremental Movement: 60 nm
• Bidirectional Repeatability: 500 nm
• Home Location Accuracy: ± 1.5 µm
• Pitch
• X-Axis: 0.015°
• Y-Axis: 0.015°
• Z-Axis: 0.0047°
• Yaw
• X-Axis: 0.0034°
• Y-Axis: 0.0034°
• Z-Axis: 0.0032°
• Speed Range: 20 µm-4 mm/sec
• Limit Switches: Ceramic Tip Mechanical
• Manual Over Ride
• Compatible Stepper Motor Controllers: BSC103, MST601