• 140 (Milti DM) aluminum coated actuator
• 3.5 µm Maximum Actuator Displacement
• 400 µm Center-to-Center Actuator Spacing and Low Inter-Actuator Coupling Results in High Spatial Resolution
• Actuator Stroke with Zero Hysteresis
• 14 Bit Drive Electronics Yields Sub-Nanometer Repeatability
• Compact Driver Electronics with Built-In High Voltage Power Supply Suitable for Benchtop or OEM Integration
• Operating Wavelengths 400 - 1100 nm
• Protective Window with 6° Wedge and Broadband Antireflection Coating (400 - 1100 nm)

DM140-35-UP01 has an aluminum coated deformable mirror with 140 electrostatic actuators designed for use in the 400 - 1100 nm range. The aluminum plated mirror is capable of changing shape in order to correct a highly distorted incident wavefront. Each package includes the deformable mirror, driver, and control software. Micro-electro-mechanical (MEMS) deformable mirrors are currently the most widely used technology in wavefront shaping applications given their versatility, maturity of technology, and the high resolution wavefront correction that they afford.

The DM140-35-UP01 DMs, which are fabricated using polysilicon surface micromachining fabrication methods, offer sophisticated aberration compensation in easy-to-use packages. The mirror consists of an aluminum plated mirror membrane that is deformed by 140 electrostatic actuators (i.e., a 12 x 12 actuator array with four inactive corner actuators), each of which can be individually controlled. These actuators provide 3.5 µm stroke over a compact area. There is a protective 6o wedge in front of the mirror with a broadband AR coating for the 400-1100 nm range (Please contact tech support if you have an interest in a different coating range).

• Actuator Array: 12 x 12
• Actuator Stroke: 3.5 µm
• Actuator Pitch: 400 µm
• Clear Aperture: 4.4 mm x 4.4 mm
• Mirror Coating: Aluminum
• Average Step Size: <1 nm
• Hysteresis: None
• Fill Factor: >99%
• Mechanical Response Time: <100 µs (~3.5 kHz)
• Surface Quality: <20 nm (RMS)
• Driver Specifications
• Frame Rate: 8 kHz (34 kHz bursts)
• Resolution: 14 Bit
• Driver Dimension: 9.0” x 7.0” x 2.5” (229 mm x 178 mm x 64 mm)
• Computer Interface: USB 2.0