|In micromanufacturing, imaging is becoming an increasingly important part of the industry, with non-contact inspection and robotic manipulation essential in today’s production environments. High magnification is necessary to view micro devices during assembly, while a large viewing area is required for monitoring the workspace layout and guiding the robotic manufacturing systems. Adaptive Scanning Optical Microscopy (ASOM) has been found to be an ideal solution for many microelectronics applications, by combining a large field of view with high-speed scanning to allow real-time observation and adjustments during microassembly. ASOM has the added advantage of being relatively inexpensive when compared to lithographic lens designs. Recently ASOM was demonstrated for real-time tracking of microrobotic manipulators (silicon microgrippers). It was shown that ASOM may be used to track two independently moving microgrippers working in a large robotic workspace. The ability to track independently allows manipulation of parts and helps to avoid collisions.
In addition to micromanipulation, ASOM is ideal for quality control (QC) of microelectronic devices. The 1.5 µm resolution and high field provided by Thorlabs’ ASM9600 allows non-contact observation of surface defects and contaminants as demonstrated in the images below. The fast steering mirror provides rapid data collection up to 50,000 by 50,000 pixel image mosaic in less than 20 seconds.
Figure 1: The figures shown here represent an image of the surface of a Thorlabs DC310C CCD camera taken with the ASM9600 in the reflective illumination mode. This system provides high resolution visualization of the entire camera, as well as individual circuit components in a single scan
Figure 2: These image show an 8-bit microprocessor monitored for surface defects and contaminants using the Thorlabs ASM600 in reflective mode.
Reference: Potsaid et al., Proceedings of IEEE International Conference on Robotics and Automation (ICRA), 1024-1029, 2006.