Thorlabs Inc.
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Piezoelectric Actuators

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OVERVIEW

Features

  • Open- and Closed-Loop Designs
  • 150 V or 100 V Max Drive Voltage
  • Strain Gauge Pre-Amp Circuit Compatible with TSG001 Reader

Thorlabs' piezoelectric actuators are multilayer devices used for nano- and micro-positioning. As the voltage applied to the actuator goes from 0 to the maximum drive voltage, the piezo will expand longitudinally. The AE series of open-loop piezoelectric actuators offers maximum displacements from 4.6 µm to 17.4 µm. Piezoelectric devices, such as these actuators, exhibit hysteresis, thus the displacement of the actuator is not solely based on voltage applied. Due to this, Thorlabs also offers the PZS001, which is the AE0505D16F piezoelectric actuator with an attached strain gauge. As the actuator extends, the resistance of the strain gauge is affected. This allows for a closed-loop system to be implemented when proper drive electronics are chosen. For more information on strain gauges, please see our StrainGauge Tutorial.

Many strain gauges, including Thorlabs', require an amplifier to increase their weak signal. The AMP002 is a compact printed circuit board specifically designed to amplify the output of a full bridge strain gauge.

Integration
The recommended method for attaching a mechanical load to a piezo-electric actuator is to use a room temperature epoxy, such as the F120 epoxy sold by Thorlabs. It is important that the mechanical load be centered on the piezoelectric actuator's end face to avoid applying a torque. If the actuator is incorporated into a design that calls for a preload, it is recommended that the preload does not exceed 50% of the specified clamping force. Note that the low voltage actuator (AE050D18F) has a reduced maximum preload equal to 22.5 lb (100 N).

The red lead on the piezoelectric actuator must be connected to the high side of the voltage source used to drive the actuator. Do not reverse bias the piezoelectric actuator since this will destroy the device. Piezoelectric actuators should not be used in liquid, in the presence of combustible gasses or liquids, or cleaned with organic solvents.

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SPECS

Item #AE0203D04FAE0203D08FAE0505D08FAE0505D16F
and PZS001
AE0505D18F
Maximum Drive Voltage
(Not Recommended for Continuous Operation)
150 Volts100 Volts
Displacement at Maximum Drive Voltage4.6 ± 1.5 μm9.1 ± 1.5 μm9.1 ± 1.5 μm17.4 ± 2.0 μm15.0 ± 1.5 μm
Recommended Drive Voltage Limit
for Continuous Operation
100 VoltsNot Specified
Displacement at Recommended Drive
Voltage Limit
3.0 ± 1.5 µm6.1 ± 1.5 µm6.1 ± 1.5 µm11.6 ± 2.0 µmNot Specified
Resonant Frequency
(No Mechanical Load)
261 kHz138 kHz138 kHz69 kHz69 kHz
Operating Temperature Range of the Actuator-25 to 85 °C-20 to 85 °C
Capacitance @ 1 KHz, 1 VRMS0.09 µF ± 20%0.18 µF ± 20%0.75 µF ± 20%1.40 µF ± 20%1.60 µF ± 20%
Clamping Force (Blocking Force)45 lb (200 N)45 lb (200 N)191 lb (850 N)191 lb (850N)192 lb (853 N)
Maximum Recommended Preload22.5 lb (100 N)22.5 lb (100 N)95.5 lb (425 N)95.5 lb (425 N)22.5 lb (100 N)
Actuator End Face Area3.5 mm x 4.5 mm3.5 mm x 4.5 mm6.5 mm x 6.5 mm6.5 mm x 6.5 mm6.5 mm x 6.5 mm
Length Along Actuating Axis5 mm10 mm10 mm20 mm18 mm

The PZS001 is an AE0505D16F piezo-electric actuator with an attached full bridge strain gauge.

Hide Pin Diagrams

PIN DIAGRAMS

AMP002 Pin Connections

D-type Male

DB9_Male

PINFunction
1Oscillator Input
2+ 15 V Input Supply
3- 15 V Input Supply
40 V Supply
5Amplifier Output
60 V Supply
7ID Resistor Connection
8-9N/C
Hide Piezo Bandwidth

PIEZO BANDWIDTH

Piezo Driver Bandwidth Tutorial

Knowing the rate at which a piezo is capable of changing lengths is essential in many high-speed applications. The bandwidth of a piezo controller and stack can be estimated if the following is known:

  1. The maximum amount of current the controllers can produce. This is 0.5 A for our BPC Series Piezo Controllers, which is the driver used in examples below.
  2. The load capacitance of the piezo. The higher the capacitance, the slower the system.
  3. The desired signal amplitude (V), which determines the length that the piezo extends.
  4. The absolute maximum bandwidth of the driver, which is independent of the load being driven.

To drive the output capacitor, current is needed to charge it and to discharge it. The change in charge, dV/dt, is called the slew rate. The larger the capacitance, the more current that is needed.

Piezo Equation 1

So for example, for a 100 µm stack, having a capacitance of 20 µF, being driven by a BPC Series piezo controller with a maximum current of 0.5 A, the slew rate is given by

Piezo Equation 2

Hence, for an instantaneous voltage change from 0 V to 75 V, it would take 3 ms for the output voltage to reach 75 V.

Note: For these calculations, it is assumed that the absolute maximum bandwidth of the driver is much higher than the bandwidths calculated, and thus, driver bandwidth is not a limiting factor. Also please note that these calculations only apply for open-loop systems. In closed-loop mode, the slow response of the feedback loop puts another limit on the bandwidth.

Sinusoidal Signal

The bandwidth of the system usually refers to the system's response to a sinusoidal signal of a given amplitude. For a piezo element driven by a sinusoidal signal of peak amplitude A, peak-to-peak voltage Vpp, and frequency f, we have:

Piezo Equation 3

A diagram of voltage as a function of time is shown to the right. The maximum slew rate, or voltage change, is reached at t = 2nπ, (n=0, 1, 2,...) at point a in the diagram to the right:

Piezo Equation 4

From the first equation, above:

Piezo Equation 5

Thus,
Piezo Equation 6

For the example above, the maximum full-range (75 V) bandwidth would be:

Piezo Equation 7

For a smaller piezo stack with 10 times lower capacitance, the results would be 10 times better, or about 1060 Hz. Or, if the peak-to-peak signal is reduced to 7.5 V (10% max amplitude) with the 100 µm stack, again, the result would be 10 times better at about 1060 Hz.

Triangle Wave Signal

For a piezo actuator driven by a triangle wave of max voltage Vpeak and minimum voltage of 0, the slew rate is equal to the slope, or:

Piezo Equation 8

or, since f = 1/T:

Equation 9

Square Wave Signal

For a piezo actuator driven by a square wave of max voltage Vpeak and minimum voltage of 0, the slew rate limits the minimum rise and fall time. In this case, the slew rate is equal to the slope while the signal is rising or falling. If tr is the minimum rise time, then:

Equation 11

or

Equation 12

 

Hide 100 V Piezoelectric Actuator

100 V Piezoelectric Actuator

 Low-Voltage Design
 15 µm ± 10% Maximum Displacement
 6.5 x 6.5 x 18 mm Package

This low-voltage actuator transforms electrical energy into precisely controlled mechanical displacements. The maximum displacement of 15 µm is achieved at the maximum input voltage (100 V). When mounting, avoid bending forces by centering the mechanical load on the piezoelectric end faces. If the actuator is incorporated into a design that calls for a preload, it is recommended that the preload not exceed 95 lbs.

Part Number
Description
Price
Availability
AE0505D18F
Piezoelectric Actuator, Max Displacement 15 µm, 6.5 x 6.5 x 18 mm
$196.00
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Hide 150 V Piezoelectric Actuators

150 V Piezoelectric Actuators

 Maximum Displacements from 4.6 to 17.4 µm
 Fast Response Time: 1/3 Resonant Frequency
 Resonant Frequency up to 261 kHz (AE0203D04F)

These piezoelectric actuators transform electrical energy into precisely controlled mechanical displacements. They are ideal for applications requiring rapid, precise positional changes on the nanometer or micrometer scale. A room-temperature epoxy, such as Thorlabs' F120, is the recommended method for making connections to these piezoelectric stacks. When mounting, avoid bending forces and center the mechanical load on the piezoelectric end faces. If the actuator is incorporated into a design that calls for a preload, it is recommended that the preload not exceed 50% of the specified clamping force, which is 45 lbs for the AE0203 models and 190 lbs for the AE0505 models.

Part Number
Description
Price
Availability
AE0203D04F
Piezoelectric Actuator, Max Displacement 4.6 µm, 3.5 x 4.5 x 5 mm
$72.80
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AE0203D08F
Piezoelectric Actuator, Max Displacement 9.1 µm, 3.5 x 4.5 x 10 mm
$79.80
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AE0505D08F
Piezoelectric Actuator, Max Displacement 9.1 µm, 6.5 x 6.5 x 10 mm
$130.80
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AE0505D16F
Piezoelectric Actuator, Max Displacement 17.4 µm, 6.5 x 6.5 x 20 mm
$153.30
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Hide Piezo-Electric Actuator Fitted with a Strain Gauge

Piezo-Electric Actuator Fitted with a Strain Gauge

 AE0505D16F Actuator with Strain Gauge Attached
 Enables Closed-Loop Operation
 Wheatstone Bridge Configuration Eliminates Thermal Variances in Strain Gauge Resistance

The PZS001 is an AE0505D16F piezoelectric actuator with an attached full bridge strain gauge. The full bridge strain gauge is made by connecting four metallic strain gauges in a Wheatstone bridge configuration. Each individual strain gauge has a resistance of 350 ohm and a gauge factor of two. The feedback from the strain gauge is used by the controller to provide linear operation of the piezo-electric actuator. In order to use a strain gauge reader like the TSG001 to monitor the feedback, the strain gauge must first be connected to a pre-amplification circuit like the AMP002 listed below.

The smaller diameter red lead and the black lead are used to supply the input voltage to the strain gauge. The blue and yellow wires are used to monitor the output voltage of the strain gauge.

Part Number
Description
Price
Availability
PZS001
PZS001 - Piezo Stack With Strain Gauge Fitted
$175.00
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Hide Mounted Piezo Actuator

Mounted Piezo Actuator

 Mounted AE0505D08F Actuator
 150 V
 9.1 µm Max Displacement
 M12 x 1.25 Threaded Housing
 BNC Controller Connector

The TLK-PZT1 is an AE0505D08F piezo actuator in a M12 x 1.25 threaded mount. Although it has been designed for use with our Tunable Laser Kits, its housing allows it to be integrated into a number of applications.

Part Number
Description
Price
Availability
TLK-PZT1
Piezo Adjuster, 9.1 µm Travel
$270.00
3-5 Days
Hide Strain Gauge Pre-Amp Circuit

Strain Gauge Pre-Amp Circuit

The AMP002 is a pre-amplification circuit for full bridge strain gauges that also features a removable cover. The printed circuit board measures 1.6" x 2.25" (41 mm x 57 mm) and has four solder points for the full bridge strain gauge leads and a 9-pin D-type connector for connecting to a strain gauge reader. The cable required to connect the circuit to the TSG001 stand-alone strain gauge reader or the BPC Series of controllers is also included. The circuit contains two resistive pots, one to continuously vary the circuit's gain from 1 to 10,000 and the other to apply a DC offset that can be used to balance the full bridge strain gauge. This unit provides the required input voltage to the strain gauge circuit when connected to a Thorlabs strain gauge reader.

Part Number
Description
Price
Availability
AMP002
Strain Gauge Pre Amp Board with Cover
$161.50
Today