3-Axis NanoMax Stage
Stage Specifications| Item # | MAX301, MAX302, and MAX303 |
|---|
| Travel | 4 mm | | Load Capacity | 2.2 lbs (1 kg) | | Thermal Stability | 1 µm/°C | | Weight | 1.65 lbs (0.75 kg) | | Deck Height | 2.46" (62.5 mm) | | Optical Axis Height | 2.95" (75 mm) |
Features- 4 mm Travel Per Axis
- Flexure Design Ensures Smooth Continuous Motion with No Friction
- Compact Design
- Enhanced Long-Term Stability
- All Adjusters Tied to a Common Ground and Side Mounted
- Piezo and Feedback Cables Included
NanoMax Parallel Flexure Stages
The patented MAX300 series parallel flexure designs advantages are readily apparent when it is implemented in alignment applications requiring sub-micron resolution, or better. Typically, with a multi-axis stacked stage, touching one of the two drives that are not referenced to “ground” will result in unwanted motion within the assembly. With each of the drives in a NanoMax series stage coupled directly to the base of the stage, these adverse effects are eliminated. Modular Drive Options Allow the Stage to be Configured in the Field in Less Than One Minute
Whether the application is a multimode fiber launch using the DRV004 modular thumbscrews or an automated alignment using the DRV001 Stepper motor drives, the same NanoMax stage can be reconfigured on the fly. The NanoMax modular design provides the ability to upgrade or downgrade in the field, at any time, in a matter of minutes. Please see below for the range of available drive options. Closed-Loop Internal Piezoelectric Actuators
The MAX301 and MAX302 feature internal piezoelectric actuators built directly into the body of the stage, providing a 20 µm travel range with a positional resolution of 20 nm. The MAX301 also has three strain gauge displacement sensors which provide a voltage signal that is linearly proportional to the displacement of the piezoelectric element. This signal is used to compensate for the hysteresis, creep, and thermal drift that is inherent in all piezoelectric elements. If driven by a closed-loop controller (such as the BPC303, MPZ601, or TPZ001 and TSG001 combination), the piezoelectric actuator can be controlled in a feedback mode that improves the positional resolution from 20 nm to 5 nm. Also, the hysteresis, creep, and drift associated with piezos can be monitored and compensated via this closed loop control. The modular design allows for the piezo travel to be increased by fitting an additional piezo extender in series with the DRV001 stepper motor actuators. Furthermore, when the stage is coupled with the BNT001/IR , MNA601/IR or TNA001/IR NanoTrak controllers, the system becomes a powerful auto alignment solution that maintains optical throughput and eliminates decreased coupling efficiency due to thermal drift or other external forces. PAA622 cables are included with the MAX301, and all other closed-loop piezoelectric stages. Easy Alignment of Accessories
The central keyway in the top platform allows rapid system reconfiguration while maintaining accessory alignment. A wide range of accessories are available to mount items such as microscope objectives, collimation packages, wave guides, fiber and much more. If options are required for mounting components off center, the grooved top plate can be replaced with the RB13P1 adapter plate which has an array of 1/4"-20 (M6) and 8-32 (M4) mounting holes (see image at top of page). In addition multiple adapter plates are also available to mount the NanoMax series stages to a wide range of other Thorlabs rotation and long travel linear stages. Combined, these features make the MAX300 flexure stage a solid platform for alignment applications that require high stability and repeatability.
|
Common Specifications| Item # | MAX301, MAX302, and MAX303 |
|---|
| Travel | 4 mm | | Load Capacity (Max) | 2.2 lbs (1 kg) | | Recommended Load Capacity | <1.54 lb (<0.7 kg) | | Thermal Stability | 1 µm/°C | | Weight | 1.65 lbs (0.75 kg) | | Deck Height | 2.46" (62.5 mm) | | Optical Axis Height | 2.95" (75 mm) | | Differential Adjuster Specifications | | Coarse Adjustment | 0.5 mm/rev | | Fine Adjustment (with Vernier) | 50 µm/rev (300 µm Range) |
Arcuate Cross Talk SpecificationsThe measured maximum cross talk to the Z axis, when a movement is demanded in X or Y is <88 µm.
The table below shows the theoretical amount of cross talk to the Z axis, for movement at various X positions (Y axis at zero).
Cross talk at Y axis positions (with X at zero) would be the same. | X axis position (mm) | 0.0 | 0.5 | 1.0 | 1.5 | 2.0 | 2.5 | 3.0 | 3.5 | 4.0 | | Arcuate Motion in Z axis (µm) | 80.0 | 45.0 | 20.0 | 5.0 | 0.0 | 5.0 | 20.0 | 45.0 | 80.0 |
The measured maximum cross talk to the X and Y axes, when a movement is demanded in Z is <66 µm.
The table below shows the typical amount of cross talk to the X axis, for movement at various Z axis positions (Y axis at zero).
Cross talk to Y axis positions (with X axis at zero) would be the same. | Z axis position (mm) | 0.0 | 0.5 | 1.0 | 1.5 | 2.0 | 2.5 | 3.0 | 3.5 | 4.0 | | Arcuate Motion in X axis (µm) | 57.1 | 32.1 | 14.3 | 3.6 | 0.0 | 3.6 | 14.3 | 32.1 | 57.1 |
Piezo Stage Specifications |
Displacement Sensor7 Pin LEMO MaleMAX301 ONLY | Pin | Designation |
|---|
| 1 | +15 V | | 2 | Oscillator + | | 3 | 0 V | | 4 | Signal Out - | | 5 | Signal Out + | | 6 | -15 V | | 7 | Travel |
Piezo Drive InputSMC MaleMAX301 & MAX302 
Nominal maximum input voltage:75 V
Absolute maximum input voltage:100 V |
Loading...
|
|
A choice of drives are available for use with our NanoMax MAX300 series stages. Simply unscrew the existing drive and fit the new drive as shown to the right. The drives are summarized below. For more detailed information please see the associated product pages:
Stepper Motor Drive, Differential Micrometers and Thumbscrew Drives, In-line Piezo Actuators. | Item # | DRV001 |
|---|
| Motor Type | 2 Phase Stepper | | Travel Range (on MAX300) | 4 mm (0.16 ") | | Lead Screw Pitch | 1 mm | | Bidirectional Repeatability | 500 nm | | Minimum Incremental Movement | 60 nm | | Micro Steps per Revolution of Leadscrew | 25,600 | | Limit Switches | Ceramic Tipped Mechanical | | Speed Range | Up to 4 mm/sec | | Compatible Controllers | BSC201 or MST601 |
Stepper Motor Drive The DRV001 Modular Stepper Motor Actuator is ideal for short travel stages such as the MAX300 series flexure stages. This actuator is capable of speeds as high as 4 mm/s and is capable of handling a load capacity of up to 48 lbs (22 kg). Bidirectional repeatability is 0.5 μm. | Item # | DRV3 |
|---|
| Travel Range (on MAX300) | Coarse: 4 mm (0.16")
Fine: 300 µm | | Fine Drive Resolution | 100 nm (Calculated) | | Coarse Adjustment | 500 µm per revolution | | Fine Adjustment | 50 µm per revolution |
Differential Micrometer DRV3 The DRV3 is a compact differential adjuster. Two large knobs are provided for coarse and fine adjustment. The coarse adjustment provides 4 mm of travel at 500 μm per revolution, while the fine adjustment provides 300 µm travel at 50 µm per revolution. | Item # | DRV004 |
|---|
| Travel Range (on MAX300) | 4 mm (0.16") | | Resolution | 1.0 µm (Calculated) | | Adjustment | 500 µm per revolution |
Thumbscrew Drive DRV004 This thumbscrew drive is ideal for applications that do not require the accuracy of differential actuators. The large diameter knurled knob provides excellent sensitivity with around 1µm resolution over the 4 mm adjustment range, with 500 µm of travel per revolution. | Item # | DRV120 and DRV181 |
|---|
| Travel Range | DRV120: 20 µm
DRV181: 80 µm | | Piezo Drive Voltage | 0 to 75 VDC | | Resolution | DRV120: 5 nm
DRV181: 20 nm | | Compatible Controllers | BPC301
MPZ601
TPZ001 (with TSG001 for DRV120) |
Inline Piezo Extenders These Piezo Actuators have been designed to add additional travel range and control to our NanoMax Flexure Stages and are ideal for applications requiring high-resolution movements over a small range. Piezo actuators can be used to upgrade a previously purchased, non-piezo equipped stage, and fit to the stepper motor or manual drive as shown to the right. The DRV120 offers 20 µm of travel with position feedback sensing. The DRV181 offers 80 µm travel without feedback and provides a convenient electrical feedthrough for daisy chaining multiple piezo extenders together using a single controller. PAA622 piezo feedback cables are included with all closed loop piezoelectric Nanomax stages.
|
DRV001 Motor Connector PinsD-type Male| Pin | Description | Pin | Description |
|---|
| 1 | Limit Switch Ground | 7 | Motor Phase A+ | | 2 | Not Connected | 8 to 12 | Reserved For Future Use | | 3 | CW Limit Switch | 13 | + 5 V | | 4 | Motor Phase B- | 14 | Reserved For Future Use | | 5 | Motor Phase B+ | | 6 | Motor Phase A- | 15 | Earth GND |
Displacement Sensor7 Pin LEMO Male| Pin | Designation |
|---|
| 1 | +15 V | | 2 | Oscillator + | | 3 | 0 V | | 4 | Signal Out - | | 5 | Signal Out + | | 6 | -15 V | | 7 | Travel |
Piezo Drive InputSMC Male
Nominal maximum input voltage:70 V |
Loading...
|
Additional 3-Axis Stages and Flexure Platforms
|
( 0)
NanoMax300 with Interchangeable Actuators
