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Piezoelectric Actuators


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Piezoelectric Actuators

Features

  • Open- and Closed-Loop Designs
  • 150 V or 100 V Max Drive Voltage
  • Strain Gauge Pre-Amp Circuit Compatible with TSG001 Reader

Thorlabs' piezoelectric actuators are multilayer devices used for nano- and micro-positioning. As the voltage applied to the actuator goes from 0 to the maximum drive voltage, the piezo will expand longitudinally. The AE series of open-loop piezoelectric actuators offers maximum displacements from 4.6 µm to 17.4 µm. Piezoelectric devices, such as these actuators, exhibit hysteresis, thus the displacement of the actuator is not solely based on voltage applied. Due to this, Thorlabs also offers the PZS001, which is the AE0505D16F piezoelectric actuator with an attached strain gauge. As the actuator extends, the resistance of the strain gauge is affected. This allows for a closed-loop system to be implemented when proper drive electronics are chosen. For more information on strain gauges, please see our StrainGauge Tutorial.

Many strain gauges, including Thorlabs', require an amplifier to increase their weak signal. The AMP002 is a compact printed circuit board specifically designed to amplify the output of a full bridge strain gauge.

Integration
The recommended method for attaching a mechanical load to a piezo-electric actuator is to use a room temperature epoxy, such as the F120 epoxy sold by Thorlabs. It is important that the mechanical load be centered on the piezoelectric actuator's end face to avoid applying a torque. If the actuator is incorporated into a design that calls for a preload, it is recommended that the preload does not exceed 50% of the specified clamping force. Note that the low voltage actuator (AE050D18F) has a reduced maximum preload equal to 22.5 lb (100 N).

The red lead on the piezoelectric actuator must be connected to the high side of the voltage source used to drive the actuator. Do not reverse bias the piezoelectric actuator since this will destroy the device. Piezoelectric actuators should not be used in liquid, in the presence of combustible gasses or liquids, or cleaned with organic solvents.

Item #AE0203D04FAE0203D08FAE0505D08FAE0505D16F
and PZS001
AE0505D18F
Maximum Drive Voltage
(Not Recommended for Continuous Operation)
150 Volts100 Volts
Displacement at Maximum Drive Voltage4.6 ± 1.5 μm9.1 ± 1.5 μm9.1 ± 1.5 μm17.4 ± 2.0 μm15.0 ± 1.5 μm
Recommended Drive Voltage Limit
for Continuous Operation
100 VoltsNot Specified
Displacement at Recommended Drive
Voltage Limit
3.0 ± 1.5 µm6.1 ± 1.5 µm6.1 ± 1.5 µm11.6 ± 2.0 µmNot Specified
Resonant Frequency
(No Mechanical Load)
261 kHz138 kHz138 kHz69 kHz69 kHz
Operating Temperature Range of the Actuator-25 to 85 °C-20 to 85 °C
Capacitance @ 1 KHz, 1 VRMS0.09 µF ± 20%0.18 µF ± 20%0.75 µF ± 20%1.40 µF ± 20%1.60 µF ± 20%
Clamping Force (Blocking Force)45 lb (200 N)45 lb (200 N)191 lb (850 N)191 lb (850N)192 lb (853 N)
Maximum Recommended Preload22.5 lb (100 N)22.5 lb (100 N)95.5 lb (425 N)95.5 lb (425 N)22.5 lb (100 N)
Actuator End Face Area3.5 mm x 4.5 mm3.5 mm x 4.5 mm6.5 mm x 6.5 mm6.5 mm x 6.5 mm6.5 mm x 6.5 mm
Length Along Actuating Axis5 mm10 mm10 mm20 mm18 mm

The PZS001 is an AE0505D16F piezo-electric actuator with an attached full bridge strain gauge.

AMP002 Pin Connections

D-type Male

DB9_Male

PINFunction
1Oscillator Input
2+ 15 V Input Supply
3- 15 V Input Supply
40 V Supply
5Amplifier Output
60 V Supply
7ID Resistor Connection
8-9N/C

Piezo Driver Bandwidth Tutorial

Knowing the rate at which a piezo is capable of changing lengths is essential in many high-speed applications. The bandwidth of a piezo controller and stack can be estimated if the following is known:

  1. The maximum amount of current the controllers can produce. This is 0.5 A for our BPC Series Piezo Controllers, which is the driver used in examples below.
  2. The load capacitance of the piezo. The higher the capacitance, the slower the system.
  3. The desired signal amplitude (V), which determines the length that the piezo extends.
  4. The absolute maximum bandwidth of the driver, which is independent of the load being driven.

To drive the output capacitor, current is needed to charge it and to discharge it. The change in charge, dV/dt, is called the slew rate. The larger the capacitance, the more current that is needed.

Piezo Equation 1

So for example, for a 100 µm stack, having a capacitance of 20 µF, being driven by a BPC Series piezo controller with a maximum current of 0.5 A, the slew rate is given by

Piezo Equation 2

Hence, for an instantaneous voltage change from 0 V to 75 V, it would take 3 ms for the output voltage to reach 75 V.

Note: For these calculations, it is assumed that the absolute maximum bandwidth of the driver is much higher than the bandwidths calculated, and thus, driver bandwidth is not a limiting factor. Also please note that these calculations only apply for open-loop systems. In closed-loop mode, the slow response of the feedback loop puts another limit on the bandwidth.

Sinusoidal Signal

The bandwidth of the system usually refers to the system's response to a sinusoidal signal of a given amplitude. For a piezo element driven by a sinusoidal signal of peak amplitude A, peak-to-peak voltage Vpp, and frequency f, we have:

Piezo Equation 3

A diagram of voltage as a function of time is shown to the right. The maximum slew rate, or voltage change, is reached at t = 2nπ, (n=0, 1, 2,...) at point a in the diagram to the right:

Piezo Equation 4

From the first equation, above:

Piezo Equation 5

Thus,
Piezo Equation 6

For the example above, the maximum full-range (75 V) bandwidth would be:

Piezo Equation 7

For a smaller piezo stack with 10 times lower capacitance, the results would be 10 times better, or about 1060 Hz. Or, if the peak-to-peak signal is reduced to 7.5 V (10% max amplitude) with the 100 µm stack, again, the result would be 10 times better at about 1060 Hz.

Triangle Wave Signal

For a piezo actuator driven by a triangle wave of max voltage Vpeak and minimum voltage of 0, the slew rate is equal to the slope, or:

Piezo Equation 8

or, since f = 1/T:

Equation 9

Square Wave Signal

For a piezo actuator driven by a square wave of max voltage Vpeak and minimum voltage of 0, the slew rate limits the minimum rise and fall time. In this case, the slew rate is equal to the slope while the signal is rising or falling. If tr is the minimum rise time, then:

Equation 11

or

Equation 12

 

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Posted Comments:
Poster: jlow
Posted Date: 2013-01-14 13:44:00.0
Response from Jeremy at Thorlabs: The spec sheet for the AE0505D18F can be found at http://www.thorlabs.com/Thorcat/8600/AE0505D18F-SpecSheet.pdf. The maximum drive voltage for this is +100V. Do not apply a negative voltage to this. The resonant frequency is dependent on the mechanical load that you are putting on the piezo. With no mechanical load, the resonant frequency is at 69kHz. The piezo bandwidth will most likely be limited by the slew rate of the driver. We have a small tutorial for this located at http://www.thorlabs.com/NewGroupPage9.cfm?ObjectGroup_ID=61, under the "Piezo Bandwidth" tab.
Poster: eomjonghyun
Posted Date: 2013-01-11 01:31:36.36
Hi My name is Jeremy belonging into GIST in Korea. I am testing the vibration of PZT. I have PZT, the model number is AE0505D18F. I drive this PZT with AC signal from my function generator and PZT driver(MDT694A). I wonder which conditions driving PZT are required, such as frequency, dirving voltage(for PZT diriver and Vpeak of AC signal from function generator) Would you recommend the appropriate conditions for PZT driving? Best, Jeremy
Poster: jjurado
Posted Date: 2011-08-17 09:15:00.0
Response from Javier at Thorlabs to last poster: We currently do not have experimental data regarding the minimum achievable incremental movement that can be achieved when using the PZS001 piezo stack with the AMP001 amplifier and the TSG001 strain gauge reader. Testing this would require measurement equipment with resolution better than the nanometer-level feedback that can be achieved with the TSG001. Please contact us at techsupport@thorlabs.com if you have any further questions or comments.
Poster:
Posted Date: 2011-08-11 11:49:04.0
What is the minimum displacement that strain guage can measure for PZS001. (Using AMP001 & TSG001).
Poster: jjurado
Posted Date: 2011-02-25 10:05:00.0
Response from Javier at Thorlabs to hadmack: Thank you for submitting your request. Our piezo stacks are not rated for operation in vacuum, and we currently cannot offer special vacuum-compatible versions. Eegarding the strain gauge feedback, it is not recommended to wire two gauges in parallel, as it would not be possible to get a stable feedback from such a system. However, you could use use one strain gage and have one piezo act as the closed feedback loop and the other stack as a slave. I will contact you directly for further support.
Poster: hadmack
Posted Date: 2011-02-23 23:31:35.0
Are these piezo stacks vacuum compatible? Is it possible to order a vacuum compatible version? Do you offer any smaller piezos with a strain gauge? If I need double the 17um range of the PZS001 I could stack two in series and wire in parallel. But what about the strain gauges? Can these be wired in parallel as well or should I only employ one piezo for half of the total stack and allow this to compensate the linearity of the combined stack? Thanks.
Poster: qinyanding
Posted Date: 2010-12-07 11:05:55.0
Ive got three PZS001 for my laborary. As I want to do some simulation about the piezo stack together with my application, I need to know all the specifications and parameters about the piezo material. Would you please do me a favor by telling me the material of PZS001, so that I can look its parameters up in our database? Or, if possible, would you please directly send me all the piezo parameters? Thanks!
Poster: Thorlabs
Posted Date: 2010-12-07 10:13:43.0
Response from Javier at Thorlabs to qinyanding: The PZS001 uses an AE0505D16F piezo electric actuator. You can click on the "Specs" tab to view all the specs for this item. I will contact you directly in case you have any additional questions.
Poster: TechnicalMarketing
Posted Date: 2007-10-17 10:59:32.0
Thank you for informing us of the difficulties you had when looking for piezo stacks. We have implemented some changes that should make this easier. Please feel free to contact us if you have any further issues.
Poster: acable
Posted Date: 2007-10-15 16:39:38.0
When i searched on "piezo stack" these products didnt come up. I then guessed at the part number and got the search result to send me to the last page for that product (the page that comes up when i click on the part number in the price box). My problem was that i then didnt see a "View Other Products in this Family" link, i had to go out and come through the visual navigation which is a lot of clicks.
Poster: technicalmarketing
Posted Date: 2007-09-10 10:35:58.0
Dear hrglnabi In order to monitor the strain gauge on the PZS001 with the TSG001 you need an amplification circuit. Thorlabs has recently released an AMP001 amplification circuit for this purpose. The AMP001 web presentation has not been completed yet, but information about the product can be found on page 403 of the volume 19 catalog and the part can be purchased by contacting one of our sales representatives. The manual included with the AMP001 includes a circuit schematic detailing how to connect the PZS001 to the TSG001 with the use of the AMP001.
Poster: hrglnabi
Posted Date: 2007-09-09 10:37:08.0
Dear Sir/Madam Is there any documentation that clearly explains how to connect the PZS001 to TSG001. Thanks
Poster: norman.lippok
Posted Date: 2007-08-30 22:44:33.0
How accurate can the AE0505D18 Piezo be employed? How much displacement for 1V...is it 0.15um/V? Whats the smallest displacement for this Piezo? Thank you.
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100 V Piezoelectric Actuator
  Low-Voltage Design
  15 µm ± 10% Maximum Displacement
  6.5 x 6.5 x 18 mm Package

This low-voltage actuator transforms electrical energy into precisely controlled mechanical displacements. The maximum displacement of 15 µm is achieved at the maximum input voltage (100 V). When mounting, avoid bending forces by centering the mechanical load on the piezoelectric end faces. If the actuator is incorporated into a design that calls for a preload, it is recommended that the preload not exceed 95 lbs.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
AE0505D18F Support Documentation AE0505D18F Piezoelectric Actuator, Max Displacement 15 µm, 6.5 x 6.5 x 18 mm $196.00
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150 V Piezoelectric Actuators
  Maximum Displacements from 4.6 to 17.4 µm
  Fast Response Time: 1/3 Resonant Frequency
  Resonant Frequency up to 261 kHz (AE0203D04F)

These piezoelectric actuators transform electrical energy into precisely controlled mechanical displacements. They are ideal for applications requiring rapid, precise positional changes on the nanometer or micrometer scale. A room-temperature epoxy, such as Thorlabs' F120, is the recommended method for making connections to these piezoelectric stacks. When mounting, avoid bending forces and center the mechanical load on the piezoelectric end faces. If the actuator is incorporated into a design that calls for a preload, it is recommended that the preload not exceed 50% of the specified clamping force, which is 45 lbs for the AE0203 models and 190 lbs for the AE0505 models.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
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AE0203D04F Support Documentation AE0203D04F Piezoelectric Actuator, Max Displacement 4.6 µm, 3.5 x 4.5 x 5 mm $72.80
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AE0203D08F Support Documentation AE0203D08F Piezoelectric Actuator, Max Displacement 9.1 µm, 3.5 x 4.5 x 10 mm $79.80
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AE0505D08F Support Documentation AE0505D08F Piezoelectric Actuator, Max Displacement 9.1 µm, 6.5 x 6.5 x 10 mm $130.80
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AE0505D16F Support Documentation AE0505D16F Piezoelectric Actuator, Max Displacement 17.4 µm, 6.5 x 6.5 x 20 mm $153.30
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Piezo-Electric Actuator Fitted with a Strain Gauge
  AE0505D16F Actuator with Strain Gauge Attached
  Enables Closed-Loop Operation
  Wheatstone Bridge Configuration Eliminates Thermal Variances in Strain Gauge Resistance

The PZS001 is an AE0505D16F piezoelectric actuator with an attached full bridge strain gauge. The full bridge strain gauge is made by connecting four metallic strain gauges in a Wheatstone bridge configuration. Each individual strain gauge has a resistance of 350 ohm and a gauge factor of two. The feedback from the strain gauge is used by the controller to provide linear operation of the piezo-electric actuator. In order to use a strain gauge reader like the TSG001 to monitor the feedback, the strain gauge must first be connected to a pre-amplification circuit like the AMP002 listed below.

The smaller diameter red lead and the black lead are used to supply the input voltage to the strain gauge. The blue and yellow wires are used to monitor the output voltage of the strain gauge.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
PZS001 Support Documentation PZS001 PZS001 - Piezo-Electric Actuator Fitted with a Strain Gauge $175.00
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Mounted Piezo Actuator
  Mounted AE0505D08F Actuator
  150 V
  9.1 µm Max Displacement
  M12 x 1.25 Threaded Housing
  BNC Controller Connector

The TLK-PZT1 is an AE0505D08F piezo actuator in a M12 x 1.25 threaded mount. Although it has been designed for use with our Tunable Laser Kits, its housing allows it to be integrated into a number of applications.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
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TLK-PZT1 Support Documentation TLK-PZT1 Piezo Adjuster, 9.1 µm Travel $270.00
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Strain Gauge Pre-Amp Circuit

The AMP002 is a pre-amplification circuit for full bridge strain gauges that also features a removable cover. The printed circuit board measures 1.6" x 2.25" (41 mm x 57 mm) and has four solder points for the full bridge strain gauge leads and a 9-pin D-type connector for connecting to a strain gauge reader. The cable required to connect the circuit to the TSG001 stand-alone strain gauge reader or the BPC Series of controllers is also included. The circuit contains two resistive pots, one to continuously vary the circuit's gain from 1 to 10,000 and the other to apply a DC offset that can be used to balance the full bridge strain gauge. This unit provides the required input voltage to the strain gauge circuit when connected to a Thorlabs strain gauge reader.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal/Imperial Price Available / Ships
AMP002 Support Documentation AMP002 Strain Gauge Pre Amp Board with Cover $161.50
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