Diffraction-Limited Performance for Beam Diameters up to 70% of Clear Aperture
Long Working Distance
Large Entrance Aperture of >5 mm
Infinite Conjugate Design
RMS-Threaded Housing
Air-Spaced Design
These all-refractive UV Achromatic MicroSpot Focusing Objectives are designed for use with UV excimer lasers and other ultraviolet sources. The lens elements in these objectives are made from the highest quality, lowest absorption, excimer-grade fused silica and CaF2 available. These lenses are available with either narrowband or broadband AR coatings (see the Specs tab for details).
Our microscope objectives can be mounted directly to our fiber launch systems, or they can be mounted to any of our flexure stages using a HCS013 RMS mount. Alternatively, these microscope objectives can be easily mounted in our cage system, lens tubes, or other SM1 compatible optomechanics using an SM1A3 adapter.
Broadband AR Coating, Broadband Design LMU Series Focusing Objectives
Item #
Ma
WDb (mm)
EFLc (mm)
NAd
TFSe (um)
EAf (mm)
AR Coating Rangeg
Damage Threshold (20 ns Pulses @ 20 Hz)
Max Reflectivity per Lens Surface
LMU-5X-UVB
5
35
40
0.13
3
10
240-360 nm
50 MW/cm2
1.5%
LMU-5X-NUV
5
35
40
0.13
3
10
325-500 nm
50 MW/cm2
1.0%
LMU-20X-UVB
20
4
10
0.40
1
8
240-360 nm
50 MW/cm2
1.5%
LMU-20X-NUV
20
4
10
0.40
1
8
325-500 nm
50 MW/cm2
1.0%
LMU-40X-UVB
40
1
5
0.50
1
5
240-360 nm
50 MW/cm2
1.5%
LMU-40X-NUV
40
1
5
0.50
1
5
325-500 nm
50 MW/cm2
1.0%
Broadband AR Coating, Narrowband Design LMU Series Focusing Objectives
Item #
Ma
WDb (mm)
EFLc (mm)
NAd
TFSe (um)
EAf (mm)
AR Coating Rangeg
Damage Threshold (20 ns Pulses @ 20 Hz)
Max Reflectivity per Lens Surface
LMU-3X-UVB
3
49
60
0.08
5
10
240-360 nm
50 MW/cm2
1.5%
LMU-3X-NUV
3
49
60
0.08
5
10
325-500 nm
50 MW/cm2
1.0%
LMU-10X-UVB
10
15
20
0.25
2
10
240-360 nm
50 MW/cm2
1.5%
LMU-10X-NUV
10
15
20
0.25
2
10
325-500 nm
50 MW/cm2
1.0%
LMU-15X-UVB
15
8.5
13
0.32
1
8.5
240-360 nm
50 MW/cm2
1.5%
LMU-15X-NUV
15
8.5
13
0.32
1
8.5
325-500 nm
50 MW/cm2
1.0%
Narrowband AR Coating, Narrowband Design LMU Series Focusing Objectives
Item #
Ma
WDb (mm)
EFLc (mm)
NAd
TFSe (um)
EAf (mm)
AR Coating Rangeg
Damage Threshold (20 ns Pulses @ 20 Hz)
Max Reflectivity per Lens Surface
LMU-3X-193
3
49
60
0.08
5
10
192-194 nm
100 MW/cm2
0.5%
LMU-3X-248
3
49
60
0.08
5
10
240-260 nm
200 MW/cm2
0.5%
LMU-3X-266
3
49
60
0.08
5
10
255-280 nm
500 MW/cm2
0.35%
LMU-3X-351
3
49
60
0.08
5
10
340-370 nm
500 MW/cm2
0.25%
LMU-10X-193
10
15
20
0.25
2
10
192-194 nm
100 MW/cm2
1.5%
LMU-10X-248
10
15
20
0.25
2
10
240-260 nm
200 MW/cm2
0.5%
LMU-10X-266
10
15
20
0.25
2
10
255-280 nm
500 MW/cm2
0.35%
LMU-10X-351
10
15
20
0.25
2
10
340-370 nm
500 MW/cm2
0.25%
LMU-15X-193
15
8.5
13
0.32
1
8.5
192-194 nm
100 MW/cm2
1.5%
LMU-15X-248
15
8.5
13
0.32
1
8.5
240-260 nm
200 MW/cm2
0.5%
LMU-15X-266
15
8.5
13
0.32
1
8.5
255-280 nm
500 MW/cm2
0.35%
LMU-15X-351
15
8.5
13
0.32
1
8.5
340-370 nm
500 MW/cm2
0.25%
a Magnification b Working Distance c Effective Focal Length - Please note the effective focal length (EFL) changes with wavelength and is specified at the operating wavelength. d Numerical Aperture e Theoretical Focal Spot size assuming the entrance aperture is filled and the input beam profile is Gaussian. f Entrance Aperture g Using the LMU objectives outside of the AR coating range is not recommended because of surface reflections that can create ghost images and significantly reduce the overall transmission through the optic.
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Posted Comments:
Poster: klee
Posted Date: 2009-10-15 10:23:07.0
A response from Ken at Thorlabs to cjohansson: The link is working now.
Poster: cjohansson
Posted Date: 2009-10-15 09:26:27.0
the link to "visible imaging objectives" in the selection guide is broken.
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These 5X, 20X, and 40X objectives are based on an optical design for broadband use that minimizes the focal shift as wavelength changes. Due to this design, they are ideal for focusing or collecting polychromatic light, making them better suited for use in spectrometry, wafer inspection, medical applications, or any other application where a broadband source must be focused.
UV Microspot Focusing Objectives - Broadband AR Coating, Narrowband Design
These 3X, 10X, and 15X objectives have a narrowband optical design, which is best for deep UV applications and micromachining. They have a broadband coating, making them ideal for sharply focusing one wavelength, while allowing other wavelengths to be transmitted slightly out of focus. We also offer narrowband-coated versions of these objectives below.
UV MicroSpot Focusing Objectives - Narrowband AR Coating, Narrowband Design
AR Coated for 192 - 194 nm, 240 - 260 nm, 255 - 280 nm, or 340 - 370 nm
3X, 10X, or 15X Magnifications Available
0.08, 0.25, or 0.32 Numerical Apertures
These 3X, 10X, and 15X objectives have a narrowband optical design, which is best for deep UV applications and micromachining. The narrowband coating allows for a significantly higher damage threshold than their broadband-coated counterparts featured above.