|Item #||MAX300 Series|
|Stepper Motor Type||DRV001|
|Max Acceleration||4 mm/s2|
|Max Velocity||2.5 mm/s|
|Min Achievable Incremental Movement||60 nm|
|Bidirectional Repeatability||500 nm|
|Absolute On-Axis Accuracy||1.0 µm|
|Home Location Accuracy||±1.5 µm|
- 4 mm Travel Per Axis
- Flexure Design
- Ensures Smooth Continuous Motion with No Friction
- Compact Design
- Enhanced Long-term Stability
- All Adjusters Tied to a Common Ground and Side Mounted
- Piezo and Feedback Cables Included
NanoMax Parallel Flexure Stages
The patented MAX300 series parallel flexure designs advantages are readily apparent when it is implemented in alignment applications requiring sub-micron resolution, or better. Typically, with a multi-axis stacked stage, touching one of the two drives that are not referenced to “ground” will result in unwanted motion within the assembly. With each of the drives in a NanoMax series stage coupled directly to the base of the stage, these adverse effects are eliminated.
Stepper Motor Drives
The DRV001 actuators supplied with the MAX341, and 343 stages are capable of 60 nm step increments and speeds as high as 4mm/sec, as well as providing bidirectional repeatability of 500 nm. Ceramic tipped high precision limit switches provide a high repeatability ideal for homing the motors. This is critical for auto alignment applications that rely on a highly repeatable zero point.
Closed-Loop Internal Piezoelectric Actuators
The MAX341 features internal piezoelectric actuators built directly into the body of the stage, providing a 20 µm travel range with a positional resolution of 20 nm. The MAX341 also has three strain gauge displacement sensors which provide a voltage signal that is linearly proportional to the displacement of the piezoelectric element. This signal is used to compensate for the hysteresis, creep, and thermal drift that is inherent in all piezoelectric elements. If driven by a closed-loop controller (such as the BPC303, MPZ601, or TPZ001 and TSG001 combination), the piezoelectric actuator can be controlled in a feedback mode that improves the positional resolution from 20 nm to 5 nm. Also, the hysteresis, creep, and drift associated with piezos can be monitored and compensated via this closed loop control. The modular design allows for the piezo travel to be increased by fitting an additional piezo extender in series with the DRV001 stepper motor actuators.
Furthermore, when the stage is coupled with the BNT001/IR , MNA601/IR or TNA001/IR NanoTrak controllers, the system becomes a powerful auto alignment solution that maintains optical throughput and eliminates decreased coupling efficiency due to thermal drift or other external forces. PAA622 cables are included with the MAX341 and all other closed-loop piezoelectric Nanomax stages.
Easy Alignment of Accessories
The central keyway in the top platform allows rapid system reconfiguration while maintaining accessory alignment. A wide range of accessories are available to mount items such as microscope objectives, collimation packages, wave guides, fiber and much more. If options are required for mounting components off center, the grooved top plate can be replaced with the RB13P1 adapter plate which has an array of 1/4"-20 (M6) and #8-32 (M4) mounting holes (see image at top of page).
In addition multiple adapter plates are also available to mount the NanoMax series stages to a wide range of other Thorlabs rotation and long travel linear stages.
Combined, these features make the MAX300 flexure stage a solid platform for alignment applications that require high stability and repeatability.