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Piezoelectric Drives & Actuators


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Piezoelectric Drives & Actuators

Item #PE4DRV517
Mounting BarrelØ9.5 mm (Ø3/8")
Micrometer Travel Range4 mm12.7 mm
Micrometer Resolution1 μm*1 μm
Piezo Travel Range15 μm30 μm
Piezo Resolution10 nm*10 nm**
Piezo Driving Voltage150 V75 V
Piezo Capacitance1.4 µF ± 20%7.2 µF

*Calculated
**When combined with the MDT694A Driver

The PE4 and DRV517 Piezo-Assisted Micrometers are manual micrometers with a piezo stack mounted in series with the leadscrew. Equipped with standard Ø9.5 mm (Ø3/8") mounting barrels that are compatible with a multitude of stages, these micrometers provide travel ranges of 4 mm and 12.7 mm, respectively.

PE4
The PE4 micrometer provides 4 mm of manual coarse travel via a 0.010" pitch leadscrew. The 150 V internal piezo stack provides 15 μm of open-loop piezo travel.

DRV517
The DRV517 has a 0.250 mm pitch leadscrew providing 1/2" of travel. The knob has clearly marked graduations every 5 μm while the main body is engraved with graduations every 1 mm. The 75 V in line piezo is equipped with a strain gauge that is capable of providing positional feedback over the 30 μm of piezo travel with 10 nm of resolution. A PAA622 piezo control cable is also included.

Piezo Driver Bandwidth Tutorial

Knowing the rate at which a piezo is capable of changing lengths is essential in many high-speed applications. The bandwidth of a piezo controller and stack can be estimated if the following is known:

  1. The maximum amount of current the controllers can produce. This is 0.5 A for our BPC Series Piezo Controllers, which is the driver used in examples below.
  2. The load capacitance of the piezo. The higher the capacitance, the slower the system.
  3. The desired signal amplitude (V), which determines the length that the piezo extends.
  4. The absolute maximum bandwidth of the driver, which is independent of the load being driven.

To drive the output capacitor, current is needed to charge it and to discharge it. The change in charge, dV/dt, is called the slew rate. The larger the capacitance, the more current that is needed.

Piezo Equation 1

So for example, for a 100 µm stack, having a capacitance of 20 µF, being driven by a BPC Series piezo controller with a maximum current of 0.5 A, the slew rate is given by

Piezo Equation 2

Hence, for an instantaneous voltage change from 0 V to 75 V, it would take 3 ms for the output voltage to reach 75 V.

Note: For these calculations, it is assumed that the absolute maximum bandwidth of the driver is much higher than the bandwidths calculated, and thus, driver bandwidth is not a limiting factor. Also please note that these calculations only apply for open-loop systems. In closed-loop mode, the slow response of the feedback loop puts another limit on the bandwidth.

Sinusoidal Signal

The bandwidth of the system usually refers to the system's response to a sinusoidal signal of a given amplitude. For a piezo element driven by a sinusoidal signal of peak amplitude A, peak-to-peak voltage Vpp, and frequency f, we have:

Piezo Equation 3

A diagram of voltage as a function of time is shown to the right. The maximum slew rate, or voltage change, is reached at t = 2nπ, (n=0, 1, 2,...) at point a in the diagram to the right:

Piezo Equation 4

From the first equation, above:

Piezo Equation 5

Thus,
Piezo Equation 6

For the example above, the maximum full-range (75 V) bandwidth would be:

Piezo Equation 7

For a smaller piezo stack with 10 times lower capacitance, the results would be 10 times better, or about 1060 Hz. Or, if the peak-to-peak signal is reduced to 7.5 V (10% max amplitude) with the 100 µm stack, again, the result would be 10 times better at about 1060 Hz.

Triangle Wave Signal

For a piezo actuator driven by a triangle wave of max voltage Vpeak and minimum voltage of 0, the slew rate is equal to the slope, or:

Piezo Equation 8

or, since f = 1/T:

Equation 9

Square Wave Signal

For a piezo actuator driven by a square wave of max voltage Vpeak and minimum voltage of 0, the slew rate limits the minimum rise and fall time. In this case, the slew rate is equal to the slope while the signal is rising or falling. If tr is the minimum rise time, then:

Equation 11

or

Equation 12

 

PE4 Piezo Connection

BNC Male

BNC Male

0 - 150 V

 

DRV517 Connections

Displacement Sensor

7 Pin LEMO Male

LEMO Male
PinDesignation
1+15 V
2Oscillator +
30 V
4Signal Out -
5Signal Out +
6-15 V
7Travel

Piezo Drive Input

SMC Male

 

SMA Male

Maximum input voltage:75 V

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Posted Comments:
Poster: bdada
Posted Date: 2011-06-09 17:41:00.0
Response from Buki at Thorlabs: Thank you for your feedback. Factors that can affect the piezo resolution are the noise from the driver and the voltage precision of the driver. However, the 10nm resolution we specify for the PE4 is due to the limitations of the position sensing detector that we used to measure the resolution. Therefore, the specified 10nm is limited by the resolution of our measuring device. Please contact TechSupport@thorlabs.com if you have more questions.
Poster: simon.holzberger
Posted Date: 2011-06-07 10:28:17.0
What actually limits the resolution of the piezoelectric actuator in an open-loop setup to the 10nm? Is it only the noise of the power supply, or are there in the case of the PE4 other limitations?
Poster: jjurado
Posted Date: 2011-05-26 09:49:00.0
Response from Javier at Thorlabs to last poster: Thank you very much for your feedback. Most applications involving piezo electric actuators assume a positive driving voltage, given that the piezo crystals are almost always poled for positive voltage input during the manufacturing process. Regarding the driving voltage value, we have added this information to the specs chart on the Overview tab. Please contact us at techsupport@thorlabs.com if you have any further questions.
Poster:
Posted Date: 2011-05-25 17:08:08.0
Information about the required drive voltage and polarity appears to be lacking. A few more details in the description would be useful.
Poster: bdada
Posted Date: 2011-04-25 17:32:00.0
Response from Buki at Thorlabs: When the knob of the PE4 actuator is turned, the actuator pin moves. The actuator pin has the ball attached. Please contact TechSupport@thorlabs.com if you have further questions.
Poster:
Posted Date: 2011-04-24 22:18:29.0
Not clear from the dwg what part moves. Would be good to have a dwg showing the part fully extended and fully contracted.
Poster: Laurie
Posted Date: 2009-03-10 15:28:30.0
Response from Laurie at Thorlabs to rausch: Our specifications tabs provide most of the technical data regarding the PE4 piezo actuator and the NF5DP20 piezo translation stage. This tab can be accessed under the family image at the top of the page. If you cannot find the technical data you are seeking under this tab, please let us know.
Poster: rausch
Posted Date: 2009-03-09 12:18:25.0
Hello, for our application we are interested in the following items: PE4 piezo actuator & NF5DP20 piezo translation stage It is possible to obtain more information / technical data regarding the piezos and overall system resonance frequencies, their modulation capacity and driving voltages? Thank you very much, Stefan
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Piezoelectric Actuator
pe4 drawing

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